AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

Content Applicable shaft type Shaft type variation X,Y,Z,T,J,K S,W XA1 to XA24 Shaft pattern sequencing I X,Y,Z,T,J,K XA31 to XA59 XC7 Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" Size Standard weight XC12 to XC15 90 180 S,W,Y Change of angle adjustable range (90 to 190)" XC16, XC17 10 X,Z,T, 120

EX9-PE1-X15/X22/X23/X24

made by SMC) Output block1 Residual voltage 0.7 VDC or less Rated load current PWR1 (Outputs 0 to 3): Max. 2 A PWR2 (Outputs 4 to 7): Max. 2 A PWR1 (Outputs 8 to 11): Max. 2 A PWR2 (Outputs 12 to 15): Max. 2 A PWR1 (Outputs 16 to 19): Max. 2 A PWR2 (Outputs 20 to 23): Max. 2 A PWR1 (Outputs 24 to 27): Max. 2 A PWR2 (Outputs 28 to 31): Max. 2 A Standards CE marking Enclosure IP67 Weight 120

FHIA

HOW Replacement Element Part No. 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Element size Port size (Nominal size) 04 (1/2B) 06 (3/4B), 08 (1B) 10 (1 1/4B), 12 (1 1/2B) 16 (2B) 20 (2 1/2B), 24 (3B) 28 (3 1/2B), 32 (4B) 65 x 90 85 x 110 100 x 160 120 x 180 140 x 200 180 x 260 EM001H-074N EM101H-074N EM201H-074N EM301H-074N EM401H-074N EM501H-074N EM001H-105N EM101H-105N EM201H-105N EM301H

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Type Length 10 m 20 m 50 m 100 m Symbol 10 20 50 100 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Note 9) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 120) Item 13 * For altitude of 1000 m or higher. 100 A

NARM Ser ies

Specialty Regulator s NARM Ser ies Regulator for Manifold NARM1000, 2000 Standard Specifications 4 Ways of Connection Fluid Air Proof pressure psig (MPa) 175 (1.2) Max. operating pressure psig (MPa) 120 (0.8) Set pressure range psig (MPa) 7~100 (0.05 to 0.7) 23~140F (5 to 60C) (No freezing) Ambient and fluid temperature Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction

Series IDK Moisture Control Tube

D X IDK02-100 IDK02-200 IDK04-100 IDK04-200 IDK06-100 IDK06-200 100 200 100 200 100 200 120 220 140 240 140 240 2 x 1.2 D 4 x 2.5 Inner sleeve 6 x 4 Note) Dimensions at 40% relative humidity. Dimensions may change if the relative humidity changes. Made to Order If you require the moisture control tube with an effective length not listed in the above table, please contact SMC. 1

AP10PA

Pneumatic Actuation Pressure Regulator Low flow Series AP10PA Actuation control pressure isolated from process gas by two seals Body material: 316L SS secondary remelt High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (Option): to 120 slpm Ni-Cr-Mo alloy internals available for corrosion resistance 100 psig (0.69 MPa) outlet pressure achievable with

Shock Absorber RJ Series

2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 1.5 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 Collision speed (m/s) 80 80 70 45 25 10 Max. operating frequency (cycle/min) Note) Extended 1.3 2.8 5.4 6.4 14.1 14.7 Spring force (N) Compressed 3.9 5.4 8.4 17.4 29.1 34.4 150 245 Max. allowable thrust (N) 422 814 1961 2942 Ambient temperature (C) 10 to 60 (No freezing) Basic type 15 23 65 5.5 120

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

mounting brackets (BMG2-012) are necessary. 544 Parallel Style Air Gripper/2-Finger Type Series MHS2 Model/Specifications MHS2-20D MHS2-25D MHS2-32D MHS2-40D MHS2-50D MHS2-63D MHS2-16D Model Bore size (mm) 16 20 25 32 40 50 63 Air Fluid 0.1 to 0.6 0.2 to 0.6 Operating pressure (MPa) -10 to 60 Ambient and fluid temperature (C) 0.01 Repeatability (mm) 60 Max. operating frequency (c.p.m.) 120

High Speed 2 Port Valve SX10 Series

Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) 300/50 Enclosure Dustproof Electrical entry Grommet Weight (g) Screw mount type 27 Quick disconnect type 29 Characteristics Pressure/Flow Rate Characteristics (without lter) Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 380 360 340 320 300 280 260 240 220 200 180 160 140 120

Non-contact Gripper XT661 Series

Degree 4, 4, 2 or more Bernoulli type XT661 X321 4C Outer body diameter: 4C 39 mm 6C 59 mm 8C 79 mm 10C 99 mm 4C 6C 8C 10C 120E 150E Bernoulli type Outer body diameter (mm) 39 59 79 99 l120 l150 Piping port size M5 x 0.8 Rc 1/8 XT661 X322 120E Fluid Air* Operating pressure 0.01 to 0.4 MPa Body size: l Proof pressure 0.6 MPa Ambient and operating temperature 5 to 40C (no freezing) 120E 120

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

ZHPBM-07ZHPBM-10ZHPBM-12ZHPBM-15 63 295 143 120 86 80 455 221 190 140 Response time means a period of time that the vacuum pressure reaches 57 kPa after the externally installed valve has been turned ON when the bellows type pad is used and the supply pressure is 0.35 MPa.

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to +10% of rated voltage, Ambient & fluid temperature: 0 to 60°C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, N, "VALVE

rangePressure gauge port sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV50003/41.5 MPa0.2 to 1 MPa1/80 to 60C (1)1131321.60100, 200, 110 to 120

rangePressure gauge port sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV30003/81.5 MPa0.2 to 1 MPa1/80 to 60C (1)37490.48100, 200, 110 to 120

rangePressure gauge port sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV40001/21.5 MPa0.2 to 1 MPa1/80 to 60C (1)61760.74100, 200, 110 to 120

front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, DI FIlter Inlet Tube, CHILLER, 729, 120

Operating pressure range: 0.2 - 1MPa, Coil rated voltage: 12, 24VDC; 100, 110 to 120, 200, 220VAC, Allowable voltage fluctuation: -15% to 10% of rated voltage, Ambient and fluid temperature: 0 to 60C, Electrical entry: grommet, type D DIN connector, type Y DIN connector, VALVE, SOFT START, VALVE, AV SOFT START UP BODY PORT, EA, AV BODY PORT 1/4 NPT, 1.37365 lb