SMC Corporation of America
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/m 3] 100,000 100,000 0/mi n(ANR) ISOclass6 50/mi n(ANR) 10,000 10,000 ISOclass5 ISOclass5 30/mi n(ANR) 1,000 1,000 ISOclass4 ISOclass4 100 100 90/mi n(ANR) 10 10 50/mi n(ANR) 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particl diameter[m] Particl diameter[m] 2.2 Amount of vacuum aspiration The amount of recommended vacuum aspiration according to the clean time class is shown

3 o @1 @0 !1 !0 !2 r w i e !5 !9 y u t MDHR3 !4 !3 q !1 @0 @1 w o e i MHZ2 !5 MHZJ2 MHQ r !7 !6 t !0 !8 !2 i !9 y u MHL2 Component Parts Component Parts MHR No. !2 !3 !4 !5 !6 !7 !8 !

MAKER MADE IN IDFA Series 6 i-2-8 IDX-OM-W017 i i 3 HFC i-6 i-3 IDFA Series i 7 IDX-OM-W017 i i 4 / 1 1.5 () IDFA Series i-4 / i 8 IDX-OM-W017 1. 1 1 1 IDFA3E (ONOFF ) (EVAPORATING TEMP) 1-1 IDFA Series 1 1 IDX-OM-W017 1. IDFA3E L N PE M3 6.5mm 1.25mm 2 1-1 IDFA Series 1 2 IDX-OM-W017 1. IDFA4E15E1 (ONOFF ) (EVAPORATING TEMP) 1-1 IDFA Series 1 3 IDX-OM-W017 1.

MAKER MADE IN IDU Series i-2 i 6 IDX-OM-W029 i i-3 HFC IDU Series i-3 i 7 IDX-OM-W029 i i -4 / 1 1.5 () IDU Series i-4 / i 8 IDX-OM-W029 1 1 1-1 IDU22E,37E OUT IN (ONOFF ) (EVAPORATING TEMP) 5-2 IDU22E 4 ) AC200V AC230V L N PE L1 L2 L3 PE M3 6.5mm 1.25mm M3 6.5mm 1.25mm 2 2 IDU Series 1-1 1 1 IDX-OM-W029 1 () IDU Series 1-1 1 2 IDX-OM-W029 1 IDU55E,75E OUT IN (ONOFF

3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly. 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch . 5 3 Chapter 6.

10 5 (mA) 30 11-3 M5 9.5mm 2 1.25mm L ,N N L () () IDU Series 11-1 11 1 IDX-OM-W014 11 R AC100V M4 () AC200V, AC230V (M3) 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W014 12.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 12-2 IDX-OM-W014 13 T 13 T 13-1 IEC 13-2 AC200V / 2A

Stations N R S 01 1 station Note 5) Note 6) The maximum number of stations differs depending on the electrical entry.

(The SI unit type is provided for use in Japan.) *7 Fixed unit: Instantaneous flow: L/min Accumulated flow: L Large flow type Thread type Nil Rc N NPT F*1 G Options Nil With lead wire and M12 connector (3 m)*5 *1 ISO 1179-1 compliant N Without lead wire and M12 connector *5 Option is shipped together, but not assembled.

Thread type S 1 pc. Mounting style Nil Rc n n pcs. TN NPT B Basic style Auto switch L Axial foot style Nil Without auto switch F Rod side flange style For the applicable auto switch model, refer to the table below.

Connector pin numbers -18No.PS-OMX1005 Internal circuit and wiring examples ZSE20AF---Output specification -N NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector 1 output Max. 80 mA Residual voltage 1 V or less -A NPN open collector 2 outputs Max. 28 V, 80 mA Residual voltage 1 V or less -B PNP open collector 2 outputs Max. 80 mA Residual voltage

3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly . 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch . 5 3 Table of Contents 1 Air Dryer Table

Model AC10*-A AC20*-B AC25*-B AC30*-B AC40*-B AC40*-06-B AC50*-B AC55*-B AC60*-B Port size M50.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 Gauge port size Note 1) 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 1 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 2 , 2 2 2 2 3 , , ,, 4 , , , , , , , , , , , , 5m [] ,, , , , , , , , 5 ,, , , , , , , , , , , , , , 6 , 2 ,40mm, ON ON ON ON , ,: 1000 (ms) (mm) V(mm/s) = <> ,,(ON ) ,5m , ,30m, , <> ,100m <> (D-A96A96V ) ,,( ) [n ,n ] ,, ,, ,D-A90,A90V

MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LG1-1-G05 1 (for motor) 2 LG1-1-R05 MR-JCCBL5M (for encoder) DP9320081-2 (for motor) DP9320089-2 (for encoder) LG1-1-Y05 3 1 When the Matsushita Electric Industrial Co., Ltd. motor driver is selected, in addition to the cable, a power connector (MOLEX 556910R) and an interface connector (Sumitomo/3-M Limited 10126-3000VE) are also required

Auto shift error Adsorption verification Internal data error High Vacuum Absorption Internal data error Work 1 Work 2 Work n Max. A System error P-1 Internal data error H-1 Internal data error Min. B Nonabsorption H Unit display switching function Work 1 Work 2 Work n Atmosphere Display units can be switched with this function.

.: IZ-OMR0035 PRODUCT NAME Ionizer MODEL / Series IZF21/31 Series 1 Doc. No.: IZ-OMR0035 Contents Safety Instructions . 3 1. How to Order. 8 1-1. Ionizer . 8 1-2. Accessories. 8 1-3. Option . 10 2. Procedures to Operation . 10 3. Installation and Wiring . 11 3-1 Installation . 11 3-1-1. Precautions for Installation . 11 3-1-2. Installation of Ionizer . 12 3-2. Wiring . 13 3-2-1.

M(D)SUA1 P211070-1 M(D)SUA3 P211090-1 M(D)SUA7 P211060-1 M(D)SUA20 P211080-1 *The auto switch unit can be retrofitted on a rotary actuator.