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Flange Size: 63, Flange Type: D [K(DN)], Port Direction: Flange Side, Temperature: 5 to 60Â°C, Version: 2 (Refresh)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLG-63D-2

XGT221-32222-2

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (KalrezÂ® 4079)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT221-32222-2

XGT221-46236-2

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (KalrezÂ® 4079)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT221-46236-2

XGT222-32222-2

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (KalrezÂ® 4079)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT222-32222-2

XGT223-46236-2

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (KalrezÂ® 4079)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT223-46236-2

XGT224-46236-2

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (KalrezÂ® 4079)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT224-46236-2

XGT311-50336-2

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (KalrezÂ® 4079)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT311-50336-2

XGT312-50336-2

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (KalrezÂ® 4079)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT312-50336-2

XGT313-50336-2

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (KalrezÂ® 4079)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT313-50336-2

XGT222-46236-2

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (KalrezÂ® 4079)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT222-46236-2

LVQ40-V13N-2

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ40-V13N-2

LVQ50-V19NP7-2

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 19 (3/4" or ø19), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: P7 (Direction 7), Option 1: 2 (By-pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ50-V19NP7-2

LVQ30-V1011N-2

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 10 (ø10), Output Tube Size: 11 (3/8), Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ30-V1011N-2

LVQ40S-V13N-2

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 13 (Tubing O.D. 1/2), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ40S-V13N-2

LVQ60S-V25N-2

Body Class: 6 (ø22 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 25 (Tubing O.D. 1), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ60S-V25N-2

LVQ20S-V07N-2

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 07 ( Tubing O.D. 1/4), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 2 (By-pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ20S-V07N-2

LVD30-S11-2

Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVD30-S11-2

LVD30-S07-2

Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVD30-S07-2

LVD40-S11-2

Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVD40-S11-2

LVD20-S03-2

Body Class: 2 (Orifice Dia. ø4), Valve Type: 0 (N.C.), Applicable Tubing Size: 03 (ø3mm or 1/8"), Port B (OUT) Different Dia. Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 2 (With By-Pass)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVD20-S03-2