SMC Corporation of America
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10.5 (G1) x H Connector Servo motor Step motor Motor cable 20 20 24 Note 1) Range within which the table can move when it returns to origin.

(Manual Drain) PANEL FITTING IN OUT Z CC Bowl Detail EE (AW20) AA K L V U X W T J S Y Q F Bracket and Mounting Nut (Optional) H IN OUT Note: Sight glass not applicable to AW20.

Anal ogue out put Vol t age t ype Anal ogue out put Current ( si nk) t ype I TV 0 1 I TV 0 4 O nl y use equi pm ent w i t h a m axi m um l oad i m pedance of 250 . O nl y use equi pm ent w i t h a m i ni m um l oad i m pedance of 100k .

IDH Particle Filter Set Parts List HRS PF005 H No.

t a c i f i c e p s h c t i w s t a o l F e g a t l o V A 5 2 . 0 V 0 0 1 A 5 2 . 0 V 0 0 1 l e v e l h g i h r o f 2 , ) N O n w o d t a o l F ( l e v e l w o l a r o f 1 x i f f u S d d A . e l b a l i a v a s i h c t i w s t a o l f l e v e l h g i h d n a l e v e l w o l a h t o B : h c t i w s t a o l F * . ) F F O n w o d t a o l F ( h c t i w s 177 Return to Menu NALF Series Specialty

H H Center of piping Center of piping Center of piping Dimensions Model Standard specifications Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B*1 C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28

H ZZ MM Depth A1 CG1 20 25 32 40 50 63 80 100 Up to 200 18 22 22 30 35 35 40 40 15.5 19.5 19.5 27 32 32 37 37 35 40 40 50 58 58 71 71 94 102 104 114 144 144 178 179 Up to 300 CG3 CG3 Up to 300 Up to 300 Up to 300 JMB AL Up to 300 H A Up to 300 ZZ + Stroke ZZ + Stroke H MB Up to 300 Basic (mm) MB1 Bore size (mm) Standard stroke A AL B1 C D E F GA GB H1 H ZZ I J KA MM NA P S CA2 20 25 32 40

H J K P.C.D L1 8 x 8.4 L2 XMC-50 XMC-63 XMC-80 70 88 90 29 36 44 P.C.D 92.1 10.5 9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ

Please take this graph as a reference if the cylinder is used under otherdriving conditions. 1,000 RHC20 (70kgfcm) 1.0 0.5 0 1,000 3,000 500 100 50 1,000 3,000 2,000 2,000 Max. speed Vmax (mm/s) Average speed Vm (mm/s) Mounting nut (mm) Accessories Rod end nut (mm) Material: Carbon steel Material: Carbon steel 30 30 d d D C D C H B H B Applicable bore size Applicable bore size D d H C B Part

Enclosure Dustproof Grommet (G)/(H), L plug connector (L), M Plug connector (M) RS Q G Electrical entry RS H A 24, 12, 6, 5, 3 DC Coil rated voltage (V) 100, 110, 200, 220 AC50/60 Hz Standard Stroke RZQ 10% of the rated voltage Allowable voltage (W) (2) (%) Model Standard stroke (mm) 0.5 (With indicator light: 0.55) Power consumption DC MI W S M L MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 0.9

MDHR3-15 MDHR3-10 H L H When auto switch D-M9V is used When auto switch D-M9 is used When auto switch D-M9V is used Max. Protrusion of Auto Switch from Edge of Body: L, H Max. Protrusion of Auto Switch from Edge of Body: H (mm) (mm) D-M9V D-M9V D-M9N Auto switch model Auto switch model L H 1.3 The auto switch will not protrude in the case of D-F9. H 2.3 12-5-26

9 12 GR-S-020 (20 g) MXP12-PS 16 GR-S-050 (50 g) MXP16-PS GR-L-005 (5 g) GR-L-010 (10 g) Cylinder unit GR-L-020 (20 g) GR-L-050 (50 g) D-X Individual -X 199 Series MXP Dimensions: MXPJ6 MXPJ6-5 , depth 2.5 2.5 H 7 5 3 3.5 4 x M3 x 0.5, depth 3 +0.030 0 B D 0.05 1 16.5 3.5 18 14 13 20 6 6 E 5 +0.030 0 Piping port , depth 2.5 2.5 Pilot hole diameter 3.3 2 x M4 x 0.7 6 2 x M3 x 0.5 QL F 13.5

Fitting Markings for Applicable Tubing Material (Barb fitting, Barb elbow, Barb elbow (H)) Tubing material determines the compatible fittings. (Refer to the table below.) Fitting marking for applicable tubing material Connection Tubing Barb fittings Barb elbow Barb elbow (H) Soft nylon tubing Polyurethane tubing Made to Order (Refer to page 200 for details.)

(mm) Thread Weight g Applicable tubing A B C D E F H Model 3 2 1 M3 x 0.5 M5 x 0.8 M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 x 1 .2 4 Thread Component Parts E D Material Brass Brass No. 1 2 3 Description Sleeve Barb fitting Gasket Note Electroless nickel plated Electroless nickel plated F K NBR, Stainless steel M B C A H Width across flats H Barb elbow: M-3ALU-2, M-5ALHU-2 D Applicable

Note 2) Non-locking push type (tool required) Locking type (tool required) Nil B Note) Note 2) Manifold block specification H Note 2) Note) Except double (latching) type. Nil M MB Note 1) For the double solenoid specification, the symbol for Function is "D". Note 2) Only rubber seal types are applicable.

effective area Q=11S P(P2+1.033).kg/h Equation in the domain of sonic flow Calculation by Cv factor Q=98.9Cv(p1+1.033).kg/h Calculation by effective area Q=5.51S(P1+1.033).kg/h 4.2-38 VND Flow Characteristics Water/VND 2 to 7 should be N.O. to suppress water hammer.

S W I T C H E S Model Standard Supply Pressure Max.

VQ111(H) (Y) Voltage 1 to 6 VQ111(H) (Y) Voltage 1 to 6 3 position X18 Nil {A side (Bottom side)} {B side (Top side)} 3 position X18 Nil {A side (Bottom side)} {B side (Top side)} Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only 2-4-100 Series VQ VQ1000 (VV5Q17)/Plug Lead Unit, Cassette Type (F, P, T, S kit) For how to increase the stations,