Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.

Digital Flow Switch

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Modular F.R.L. Unit

A O OUT 2 I N 1 SMC A J A IN OUT H G M Parts list Material Note Description No.

Compact Rotary Actuator Series CRQ2

12 V Reed switch Solid state switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9BAV 12 V 3-wire (NPN equiv.)

Modular F.R.L. Unit

Factory mounting of a cross interface on the AC model is available as a special order. 3-Port Valve for Residual Pressure Release: (V) With the use of a 3-port valve for residual pressure release, pressure left in the line can be easily exhausted.

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For Heated water/ High temperature oil Full-wave rectifier T f 2.6 VXK A B IN OUT VXD VXD M VXZ 2 x P Port size I F J a b 2 x 8.5 VXS e d L K VXB (D) VXE VXP VXR DIN terminal U V E Cable 6 to 12 G1/2 VXH C VXF (44) T 31.5 VX3 VXA B A IN OUT M 2 x P Port size I F J (D) K L (mm) Model Grommet DIN terminal Electrical entry Port size P A B C E F I J K L U T D M U 53 (59) T V 3/8, 1/2 96.5 (102.5

Air Slide Table Series MXJ

5 V 12 V Relay, PLC Yes Grommet 24 V F8P 3-wire (PNP) 12 V F8B 2-wire 3-wire (NPN) Diagnostic indication (2-color indication) M9NW M9NWV 5 V 12 V IC circuit 3-wire (PNP) M9PW M9PWV 12 V 2-wire M9BW M9BWV IC circuit A96V A96 3-wire (NPN equivalent) Yes 5 V 100 V Grommet A93V A93 12 V Relay, PLC 24 V 2-wire IC circuit 100 V or less A90V A90 5 V, 12 V Lead wire length symbols: 0.5 m Nil

MXW Series Long Stroke Slide Table

150.5 175.5 200.5 B A MXW 8 6 W 32.5 11.5 7.5 7.5 7.5 7.5 V 99.5 120.5 145.5 170.5 195.5 220.5 A 51 31 31 31 31 B 104 124 149 174 199 MXW12 6 W 31 11 11 11 11 V 124 144 169 194 219 W V A 59.5 34.5 34.5 34.5 34.5 34.5 B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 8.5 W 39.5 14.5 14.5 14.5 14.5 14.5 V 155.5 180.5 205.5 230.5 225.5 280.5 A 68.5 43.5 43.5 43.5 43.5 43.5 43.5 B 168.5

Compact Manifold Regulator Series ARM5

Note) A standard model is equipped with a backflow function.

Applicable Auto Switch Model

D-Y7NW(V)/Y7PW(V)/Y7BW(V) D-Y7BAL BU-1 BU-1 BU-1 BU-1 A B A B Reed switch D-A90(V)/A93(V)/A96(V) Solid state switch D-F9N(V)/F9P(V)/F9B(V)/F9NW(V)/ F9PW(V)/F9BW(V)/F9BAL How to mount and move the auto switch How to mount and move the auto switch Note) Use a watchmaker driver whose grip dia. is 5 to 6mm when tightening the auto switch mounting screw.

HRX-OM-M005

[Tips] The setting range of items is displayed on the Ten-key screen with the touch of the [V Lo] or [V Hi] key. A scaling must be specified to cause V Hi to be larger than V Lo (V Lo<V Hi). 5.3 Operation Screen HRZD Series 5-40 HRX-OM-M005 Chapter 5 Product Operation Procedure for setting analog output signal TYPE 1. Touch the [TYPE] key. The box appears flashing.

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L/min 2100 L/min PFMC7202 Rated flow range Set flow rate range Displayable range Analog Output Flow/Analog Output Output A B C Voltage output 1 V 1.04 V 5 V C Current output 4 mA 4.16 mA 20 mA Model Minimum flow of rated flow range Maximum flow of rated flow range PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min B A 0 Flow Minimum flow of rated flow range

PFxx-OMS0001CN

DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1 (IN) M8 M8 IN OUT (UP) (SET) (DOWN) () OUT1OUT2 ON (1 ) (UP) ON/OFF (SET) (DOWN) ON/OFF -11No.PF-OMS0001CN-A F.S. ( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L

2/3 Port Valve for Various

(A value under a specified condition.) VN LVC LVA Electricity LVH 1. Apparent power (VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W = V/A cos. For DC, W = V/A (Note) cos shows power factor. LVD LVQ 2. Surge voltage The surge voltage is a high voltage generated momentarily when cutting the power supply. LQ 3.

JXCx-OMU0024

[How to JOG] a) Change the mode to Remote mode in the main window. b) From the main window select View (V), select the Teaching window and select the JOG tab. Refer to section "4.1 (1-1-2) View (V)" for how to display the Teaching window.

PF-OMN0011_C

-40-W) AWG26 0.51 mm 1.00 mm 3.5 mm -68No.PF-OMN0011CN-C / (PF3W704/720740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521 30 250 -69No.PF-OMN0011CN-C / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -70No.PF-OMN0011CN-C

CXWM/CXWL

A73C A72H A73H E76A E73A F79 F7P J79 F79W 200 V Relay, PLC 2-wire 100 V 12 V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic

VS 8-2/VS 8-4

There is a danger of malfunction or damage to the reduced wiring system or input/output equipment. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

PSxx-OMM0006CN

-"()7 digit() 1 digit=1 kPa 1,2,3,,99,100 1 kPa 15[V] F.S.=514[V] (1F.S.=40.01=0.04[V]) F.S. () NPN()() NPN PNP()() PNP R.D. 1.000 5R.D.1.000 50.05 0.800 5R.D.0.800 50.04 ON OFF () (30 ) ON OFF Hysteresis ON-OFF /, () () 25[]ON-OFF (copy function) () -13No.PS-OMM0006CN-E NPN () () ()()( ) () ON ON 0 (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005 V ) 30 ON-OFF ON

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Model Uni thread size Metric size Inch size Elbow type 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Gasket AS22l1FSl-U01 1/8 V V V V V V V V V AS22l1FSl-U02 1/4 V V V V V V V V V V Female thread AS32l1FSl-U02 1/4 V V V V V V V Rc, G NPT, NPTF Uni thread AS32l1FSl-U03 3/8 V V V V V V V AS42l1FSl-U04 1/2 V V V V V Shape of Uni thread ridge Use of the chamfered surface of the female thread