SI Unit: 32 Outputs, 1 to 16 Stations, Stations: 2 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: -
Specifications 1: w/o SI Unit, Serial Interface Unit: D Side, Stations: 16 Stations, Mounting Position: Both Sides 2~16 Stations, Specifications 2: Standard Internal Pilot, Port Size: 1/4" One-touch Fitting
Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not
Passage Number: 2 (2 Port Valve, Cleaning Valve), 2 Port Valve Number: 16 (16 pcs., colors), 3 Port Valve Number: 00 (No 3 Port Valves Used), Port Fitting Size: C6 (ø6 One-touch Fitting, Antistatic), Gate and Cleaning Valve: G02 [Cleaning Valve (2 Port Valve): 1pc + Gate Valve 1pc]
Magnet: D (Built-in Magnet), Bore Size: 16, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 25mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal
Magnet: D (Built-in Magnet), Bore Size: 16, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 40mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal
Magnet: D (Built-in Magnet), Bore Size: 16, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 20mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal
Magnet: D (Built-in Magnet), Bore Size: 16, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 15mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal
Magnet: D (Built-in Magnet), Bore Size: 16, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 30mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal
Magnet: D (Built-in Magnet), Bore Size: 16, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 10mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal
Magnet: D (Built-in Magnet), Bore Size: 16, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 10mm, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical
SI Unit: 1A3N (32 Outputs, 1 to 16 Stations), Stations: 2 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)
/8-16 1 1/4 1 1 15/16 1.75 3 3/4 2 3/8 4 7/8 3/4 3.1 1 1/8 1 1/8 3/8 9/16 5/16-24 0 3 1 1/2 3/8 19/32 1.3 1.06 2.48 2.19 325 (3.25") 1 3/4-16 1/2-13 1 1/2 1 3/8 2 7/16 2.34 4 1/4 2 5/8 5 53/64 1 1/8 3.9 1 1/2 1 1/2 1/2 7/8 3/8-24 3 3/4 1 7/8 0 1/2 1.57 1.18 5/8 2.72 2.76 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4 1/2 2 1/4 0 1/2 1.57 1.18 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34
Model: 10S (Side Ported), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 2 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N9 (ø5/16" One-touch Fitting, Straight, Inch)
Model: Side Ported, SI Unit Specification: EtherCAT - 16 Outputs - Connector M12, SI Unit Ouput Polarity: Negative Common, PNP, Valve Stations: 2 Stations, P,E Port Entry: Both Sides, 2 to 16 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø5/16" One-touch Fitting, Straight, Inch, Mounting: -, DIN Rail Option: -
SI Unit: 32 Outputs, 1 to 16 Stations, Stations: 16 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, A, B Port: ø8 One-touch Fitting, Mounting Method: -
Stations: 7 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: NPTF5/16" One-touch Fitting, Mounting Base: U Side, Kit Type: DeviceNetâ„¢, 16 Output Points, Option 1: -, Option 2: -, CE Compliant: -
Stations: 8 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: NPTF5/16" One-touch Fitting, Mounting Base: U Side, Kit Type: DeviceNetâ„¢, 16 Output Points, Option 1: -, Option 2: -, CE Compliant: -
SI Unit: DeviceNet, PROFIBUS-DP, EtherNet/IP, Stations: 2 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: 5/16" One-touch Fitting, Mounting Method: -