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Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 Refer to page 8 for cylinders with auto switches. 12 6 OUT 113 23 34 45 57 68 79 IN 85 17 25 34 42 51 59 Auto switch proper mounting position (detection at stroke end) and mounting height Minimum stroke for auto switch mounting Operating range Auto switch mounting 16 6 OUT 201 40 60 80 101

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Model Heat radiation [kW] Facility water specifications HRS100-WApprox. 19 Refer to "Facility water system" in the specifications on page 101. HRS150-WApprox. 28 Tap Water (as Circulating Fluid) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Make-up water 2.

119 97 111 98 153 96 109 Body ported Base mounted 0.32 0.53 0.33 0.4 1.6 2.2 2 position C6 0.33 0.49 0.27 0.37 0.35 0.27 1.4 1.1 1.8 [0.78] 1.9 2.5 [1.3] 1.6 1/8 (6 Onetouch fitting) 10-SYJ723--C6 0.32 [0.54] 0.30 0.61 [0.38] 0.39 129 121 163 119 3 position 0.36 [0.40] 0.45 [0.22] 101 119 97 111 98 153 96 109 0.34 0.61 0.39 0.52 2.0 2.3 2 position C8 0.29 0.49 0.35 0.38 0.42 0.33 1.7 1.2

) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101

22 35.2 49.5 12 20.9 1/2" 21.7 22 101 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads after installation.

22 35.2 49.5 12 20.9 1/2" 21.7 22 101 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads after installation.

B H S + Stroke FX FZ ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E F FV FD FT FX FY FZ GA GB GC GD GL Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 71 96 1/4 1/4 44 16 32 10 60 9 12 80 42 100 85 15 26 54 10 50 Up to 600 20 to 600 35 32 70 27 81 108 1/4 1/4 52 20 40 10 70 9 12 90 50 110 95 17 27 59 13 63 Up to 600 20 to 600 35 32 86 27 101

size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ A GAGB H P S ZZ H1 K KA N 60 12 80 42 11 22 M8 x 1.25 27 44 40 33 15 51 16 Up to 1000 8 6 14 1/4 32 30 60 27 9 71 100 102 164 M14 x 1.5 70 12 90 50 11 27 M8 x 1.25 30 52 50 35 17 58 20 Up to 1000 11 7 18 3/8 40 35 70 32 9 81 110 108 177 M18 x 1.5 85 15 59 14 27 31 64 63 35 17 58 20 Up to 1000 11 7 18 3/8 40 35 86 32 130 116 101

(mm) Female rod end (mm) With air cushion ZZ Bore size H Bore size S A1 GA RA ZZ WH WB WA MM Rubber Air 8 8 12 13 18 18 21 25 87 (96) 102 (114) 102 (114) 13 14 14 15 16 16 19 22 22 26 26 8 9 9 15 (17) 16 (18) 17 (18) 26 30 30 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 M14 x 1.5 M16 x 1.5 139 (148) 162 (174) 162 (174) 1.5 3 3 40 50 63 92 (100) 93 (101) 95 (103) 95 (104) 108 (

25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101

ZZ + Stroke Z FT RT DFZ FX ZZ + l + Stroke h + l -X 20Bore size (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8 M8 x 1.25 Up to 800 Data 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 x 1.25 Up to 1000 35 32 86 27 101

V = 1.4 x Va V = 1.4 x 200 V = 280 mm/s M1E = 1/3 x FE x Z = 1/3 x 150.9 x 101/1000 = 5.1 [Nm] (A) m x g (z) 3A = M1E/M1max = 5.1/12.1 = 0.42 Z M1 FE Find the value of M1Emax when Va = 280 mm/s from Graph (11) c. Va Examine M3E.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2023 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

From the above 2. position, turn the adjustment needle 1/4 to 1 turn clockwise. 1 kPa = 7.5 mmHg 1 kPa = 7.5 mmHg 101 101 Supply pressure (kPa) Supply pressure (kPa) Applicable adsorption nozzle range Applicable adsorption nozzle range 50 50 3. 2. 1. 20 20 ZSE ISE Right 0.2 0.3 0.4 0.5 0.6 0.7 0.3 0.5 0.7 0.9 1.1 1/4 to 1 turn Right Left PSE Adsorption nozzle diameter (mm) Adsorption nozzle

How to Order . 74 75 77 77 78 81 82 82 83 83 83 83 83 84 84 84 85 85 85 85 85 86 86 86 86 86 87 88 89 89 90 90 91 92 92 93 93 94 95 96 97 99 99 99 99 101 102 104 104 104 105 107 108 110 110 110 110 112 113 115 115 115 116 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Speed 600 mm/s 10 REAL15 45.5 11.3 + 2Lo 5 4 15 REAL10 101 13.6 + 2Lo 3 20 2 180 15.2 + 2Lo 25 330 18.9 + 2Lo 32 1 0 500 (650) 750 1000 1500 624 22.5 + 2Lo 40 Cylinder stroke (mm) High Precision Guide Type REBH Order Made Auto Switches 100 80 3.

stroke type 8.4 56 33.6 28.0 22.4 16.8 11.2 39.2 OUT CXS6 4 -XB13 Low speed cylinder (5 to 50 mm/s) 4.6 31 18.6 15.5 12.4 9.3 6.2 21.7 IN -XB19 High speed cylinder 157 94.2 78.5 62.8 47.1 31.4 110 15.7 OUT CXS10 6 -XC18 NPT finish piping port 100 60.0 50.0 40.0 30.0 20.0 70.0 10.0 IN -XC22 Fluoro rubber seals 353 212 177 141 106 70.6 247 35.3 OUT CXS15 8 -X593 Without plate 252 151 126 101

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

resistant type) Note) RBL (coolant resistant type) shock absorbers are used. 2020 to 50 Front mounting flange Data Dimensions 32 to 50 Front mounting flange R Y + Stroke Front mounting flange 63 Y + Stroke Q X 63 to 100 R Front mounting flange Y + Stroke 63 40 50 25 32 20 Bore size (mm) R 16 15 16 14 14 14 Y 119 Dimensions other than the above are the same as those on pages 8-21-22 to 25. 101