A_HEC-OM-I009

Table 2-1 Division of DANGER, WARNING, CAUTION, and NOTE -2-2 Table 2-2 Meaning of a symbol -2-2 Table 2-3 Safety interlock list(Part 1) -2-5 Table 2-4 Safety interlock list(Part 2) -2-5 Table 6-1 Specifications -6-1 Table 8-1 Available mode in Level 1 -8-2 Table 8-2 Available mode in Level 2 -8-4 Table 8-3 Available mode in Level 3 -8-5 Table 9-1 Alarm information -9-1 Table 9-2 Reset of

Valve Single Unit

operated 2 position type.

IDX-OM-W025

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

Programless controller Step motor (servo 24 VDC)

Safety Instructions . 4 2.

4-channel Flow Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

VQ20/30

PB Construction Component Parts q e Description Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Material No. q w e r t y u r Resin Stainless steel Stainless steel Stainless steel NBR HNBR, Resin w t y u 17-2-83 Series VQ20/30 Dimensions: Series VQ20 In-line Type: Grommet (G) VQ21A1-GBracket mounting holes Mounting holes 2-3.2 through 2-3.2 through Light

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

Multi-channel Digital Sensor Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Safety Instructions. 4 2.

Ｍ icro Mist Separator Regulator

Rc G Rc G AD27-6C-A AD27-6-A NPT AD27-6C(Z)-A NPT AD27-6(Z)-A C Note 1) Option symbol 2 Semi-standard symbol Semi-standard: 2 Piping port thread ty pe (9) Part No. Rc G NPT AD27-2(Z)-A AD27-2-A Appearance and part No. Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. (9) includes Bowl seal (8). Refer to section [12. Disassembly Drawing] (P38).

Mist Separator Regulator

Rc G Rc G AD27-6C-A AD27-6-A NPT AD27-6C(Z)-A NPT AD27-6(Z)-A C Note 1) Option symbol 2 Semi-standard symbol Semi-standard: 2 Piping port thread ty pe (9) Part No. Rc G NPT AD27-2(Z)-A AD27-2-A Appearance and part No. Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. (9) includes Bowl seal (8). Refer to section [12. Disassembly Drawing] (P38).

Round Type Hydraulic Cylinder

4 o i q !3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.

High-precision Digital Pressure Switch ( compatible)

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 DO White Switch output 2 3 LBlue 0 V 4 C/Q Black Communication data (IO-Link)/Switch output 1 (SIO) -17No.PS-OMV0004-H Wiring examples Used as switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Used as IO-Link device : Numbers in the figures show the connector pin layout. -18No.PS-OMV0004

High-precision Digital Pressure Switch

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 DO White Switch output 2 3 LBlue 0 V 4 C/Q Black Communication data (IO-Link)/Switch output 1 (SIO) -19No.PS-OMV0009-E Wiring examples Used as switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Used as IO-Link device : Numbers in the figures show the connector pin layout. -20No.PS-OMV0009

High-precision Digital Pressure Switch ( compatible)

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 DO White Switch output 2 3 LBlue 0 V 4 C/Q Black Communication data (IO-Link)/Switch output 1 (SIO) -18No.PS-OMY0007-A Wiring examples Used as switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Used as IO-Link device : Numbers in the figures show the connector pin layout. -19No.PS-OMY0007

PC Wiring System Series PCW

3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1 2 3 4 CN7 1 2 3 4 CN8 1 2 3 4 CN9 1 2 3 4 CNA 1 2 3 4 CNB 1 2 3 4 CNC 1 2 3 4 CND 1 2 3 4 CNE 4 3 2 1 24 VDC 2 *S2 (S2) 3 0 VDC CNF 4 S1 INPUT Input connector PCW-EC16YBR00 PCW-EC16YBR01 [Applicable PLC example: OMRON Corporation C200H-OD219] 115 114 113 112 111 110 109 108 107 106 105 104 103

Manually Operated Integral Fitting Type/Threaded Type Series LVH

2 8 A Stacking type 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" 02 2 stations 3 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" 12 1/2" LQ2 integral fitting 4 4 19, 3/4" 19, 3/4" How to Order Valve LVH 2 0 07 A S Body class Symbol 2 3 4 Body class 2 3 4 Orifice dia.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

2 !1 !0oi q w e r t y u i !1 !2 No.