High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

240

5 !4 !3 e u !

Compact manifold regulator ARM5 Series

1/4 3 12.5 19 35.5 8, 5/16 8, 5/16 5 13.5 21 38.5 Note) The O-ring is attached.

SMC

stroke adjuster at retraction end) I 5 11 10 9.5 8 8.5 5 4.75 8.5 5 18.5 NA-M4 x 0.7 thread depth 5 K KA 18.5 31.5 (With stroke adjuster at extension end) Stroke adjuster at extension end Stroke adjuster at retraction end N-M4 x 0.7 thread depth 5.5 (Insert) 5 9 5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 depth 3.5 +0.030

MU

5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

CXWM/CXWL

5.

PFxx-OMA1007

Current read value For example, when the display value is 1.000 [MPa], 5%R.D. is 5% of 1.000 [MPa], which becomes 0.05 [MPa]. When the display value is 0.800 [MPa], 5%R.D. is 5% of 0.800 [MPa], which becomes 0.04 [MPa].

rep-filter-e

Instruction Drawing for Disassembly & Reassembly of Filter q AIR VENT e r w 5-1 t 5-2 i y u Element support Body IN OUT DRAIN qHexagon head Bolt tElement mounting bracket uJoint wHexagon Nut Spring iElement guide eCover Element holder rGasket yElement 5-1 5-2 476 Series FGC Replacement Procedure of Element 2 2. Overhaul 5.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

5 Port Air Operated Valve Series SYA3000/5000/7000 1

for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 5 16" One-touch fitting for VR F2 With side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 VH 3 SYA3000 5 SYA5000 SYA7000 VHS 7 SYA7000 SYA 5 1 C6 Body ported 20 40 SYA 5 1 Base

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

12 16 0.1 5 10 20 30 40 50 100 200 0.01 5 10 20 30 MXW Overhang L (mm) Overhang L (mm) Maximum Speed: Up to 400 (mm/s) Graph (5) Graph (2) Maximum Speed: Up to 300 (mm/s) MXJ 0.3 50 40 30 20 MXP 0.2 10 MXY 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 MTS 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.01 0.1 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3)

Compact Cylinder

RB S V W Y 5 to 100 10 7 12 43 43.5 59 5 to 100 10 7 12 43 43.5 67 10 to 100 14 8 17 54 63 83 10 to 100 18 10.5 17 54 63 97 Note 1) The dimensions (A + stroke) and (B + stroke) for 5 mm stroke will be the same as those for 10 mm stroke.

3 Port Solenoid Valve

Note 3) As the distance between the block end to the thread is 2.5 mm, the screw depth should be 5 to 7 mm.

Process Valve Series VNA

to 60C Note 1)/5 to 60C Note 1) (NBR seal) 5 to 60C Note 1)/5 to 99C Note 1) (FKM seal) VNH A VNH B 1 3 1 3 Pressure Temperature Lubrication 5 to 50C Note 1) 0.25 to 0.7 MPa Pilot air Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

CG5-S

GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB

Industrial Filters Replacement Procedure

Instruction Drawing for Disassembly & Reassembly of Filter q AIR VENT e r w 5-1 t 5-2 i y u Element support Body IN OUT DRAIN qHexagon head Bolt tElement mounting bracket uJoint wHexagon Nut Spring iElement guide eCover Element holder rGasket yElement 5-1 5-2 476 Series FGC Replacement Procedure of Element 2 2. Overhaul 5.

C76

5 !6 !7 !

Tie-rod Type Hydraulic Cylinder

x 28l SWRM Polished round 18SPCC 113 5 18 123 5 80 clevis type C1 100 5 x 30l SWRM Polished round 20SPCC 132 7.5 20 147 5 100 clevis type E B 125 Polished round 22SPCC 5 x 35l SWRM 154 7.5 22 169 5 125 clevis type A 160 Polished round 24SPCC 5 x 35l SWRM 190 7.5 25 205 5 160 clevis type Note) Does not come with other accessories.