-- NCM seies

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

2 !3 !4 !5 !6 !7 !

Series H, DL, L, LL Self-align Fittings

L2 L1 Thread R(PT) Part No.

VQ

(Value in the initial stage.) 1 (P) 3 (R) Normally closed VQZ VZ (A) 2 VS 1 (P) 3 (R) Normally open Option Specifications Latching AC Large flow capacity Type Item Normally open 1 2 VQ120-l VQ110L-l VQ110l (A) 2 VQ110U-l Model 0.7MPa 0.6MPa 0.5MPa Max. operating pressure 3 2 0.14mm2 (Cv ) 1 2 0.68mm2 (Cv ) 0.20mm 2 (Cv ) 2 1 Effective area 0.008 0.038 0.011 1 (P) 3 (R) 0.20mm2 (Cv ) 2 3 0.68mm2

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

VCB

Note 1) The same bracket is used for VCB3 and VCB4 (port size 1/2). 17-2-26 7 Series VCB Direct Operated 2 Port Solenoid Valve For Heated Water Dimensions Grommet : G Conduit: C Q 300 F D 280 D Q F VC C G1/2 C R R VDW VQ E E B A H 2-P Port size VX2 2-P A B H 2-M Thread depth N VX Port size 2-M Thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

C95Series

, ~ 24V .ZV 2-wire Diagnosis indication 3m . . L (Example: A5JL) Sm" . ... Z (E.l2 color Indication) ~ 3wire NPN IC ~ W&(.. rMIsWl1 'YIM (2 <:OIor 1nOIet.\IorI) With timer 5V, 12V _n 4-wire ~ (NPN) ~"I)I:M/tcdOt~on) ~ Latch type cbQnos~ output (2 color IncllcaJIoo) Mounting bracket part number !f;o II.': 1110. , .100 1 , ' ";. ~"'_CV!_ ~.r-U 1141) lf1~'~I'tI" ##!

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Pin Cylinders Series CJP2/CJP

Allowable lateral load 1 Allowable lateral load (N) 0.8 16 0.6 0.4 10 D0.2 6 -X 4 0 Individual -X 0 5 10 15 20 25 30 35 40 45 Stroke (mm) Technical data 25 Series CJP2 Construction CJP2B4 CJP2B6 i e u q i r u q w Built-in magnet Built-in magnet !4 !5 !1 o r !0 !2 w t t y !1 o !0 !2 !4 !5 CJP2B10, 16 i e u q Built-in magnet !1 o r !0 !3 !2 t w !5 !4 Component Parts No.

RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 10-10-8 9 3 Position Cylinder Series RZQ Construction u i @2 r !0 y q w !9 e @1 @4 !3 RE A B @0 REC !2 CX @3 !

S

Long Lead Wire 30G Shock Rating S W I T C H T Y P E S T R O K E 50M or more @ 500VDC (between lead wire and case) Insulation Resistance Note) * Auto Switch Capability is not offered on these mount types R O D E N D T H R E A D See Auto Switch Accessories 1000VAC for 1 sec (between lead wire and case) Min Beakdown Voltage 025 1/4 037 3/8 050 1/2 075 3/4 100 1 125 1 1/4 40~140F (5~60C) Ambient

CJP

Mounting nut (Refer to page 6-2-13.)

CJP

Mounting nut (Refer to page 6-2-13.)

FQ1

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

R.