3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

B P_1 or n_1 H_1 P_1=A(AB)/4 n_1=B+(AB)/4 H_1=(AB)/2 Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere B Display value fine adjustment function (F6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (The scattering of the indicated value can be eliminated.) 5% R.D.

Multi-Axis Step Motor Controller

5 !6 No.

Industrial Filters

N.C. and N.O. common Noninductive load (A) Inductive load (A) Resistance load Light load Inductive load Motor load Rated voltage (V) Normally Normally Normally Normally Normally Normally Normally Normally closed open closed open closed open closed open AC125 AC250 DC8 DC14 DC30 DC125 DC250 5 5 5 5 5 0.4 0.3 1.5 1 0.7 0.5 4 4 2.5 1.5 1.3 0.8 3 3 3 0.1 0.05 3 3 3 0.1 0.05 5 4 Reset button 4

DOC1003626

. 807Eh 2 3 Perform (6) for the 2nd value (0006h) and then, perform (5). 2280h 4 Perform (6) for the 3rd value (0h) and then, perform (5).

3 Port Solenoid Valve Series SYJ300/500/700

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

VQ 0 0 5 2 1 Y Flat cable kit with terminal block VV5Q11-08C6G0 ... 1 set Manifold base part number VQ1100-5 ... 4 sets Valve part number (stations 1 to 4) VQ1200-5 ... 1 set Valve part number (station 5) VQ1300-5 ... 3 sets Valve part number (stations 6 to 8) Series Manual override Symbol Manual override Non-locking push type (tool required) Slotted locking type Knob locking

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Width across flats 19 5 I 5 J 5 J Width across flats 12 Width across flats 12 Applicable tube O.D.

T

(mm) 8 6.5 5 4 Inner tubing I.D.

3 Port Solenoid Valve

01 02 SS073A Stations C L2 0.1 W with power saving circuit L1 1.8 18 5 23.5 21 P = 7.2 11 22 3.5 3.5 8 R1.7 7 25.5 3.4 28.5 3.5 150 (lead wire AWG#26) 27 5 150 (lead wire AWG#26) 3.5 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side 6 barb fitting 3 (EXH) port (18) 12 7 5 5 3.5 3.2 3.5 P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port Dimensions Formulas: L1 = n 7.2 + 14.8, L2 = n 7.2

&snac

a m e t e r : 8 m m I D G E L 5 F O T I D G 5 I I D G E L 5 H F O T I D G s H t D e w ( 0 p t i o n : S ) 4 5 1 3 3 5 N / C C o r p . I 6 4 , 1 C h o m e , 5 h i m b a s n i , M i n a t o k u T o k v o 1 0 5 0 0 0 4 , J a p a n T E L . 0 3 3 5 0 2 B ? 7 t L 0 J ,r-O c ) ( d o a F D r a i n ( M i n i m u m c I e a r

reduces flow setting time

Inch size 1/8" 1/4" 5/32" 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.2 0.3 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Controlled flow 0.2 0.3 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Free flow 0.3 0.4 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.2 0.3 0.3 0.3

7

A filtration degree of 5 m or less should be selected.

53

A 15 8 Rated power consumption Note 5) kW (kVA) 4.6 (5.2) 5.0 (5.6) Noise level (Front 1 m/Height 1 m) Note 5) dB (A) 66 Accessories Alarm code list stickers 2 pcs.

Dedicated Controller

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

IDX-OM-W011

. i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 .

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

108 126 150 160.5 6 128 146 175 185.5 L1 L2 L3 L4 2.10-36 VQZ100/200/300 Base Mounted Manifold Options Blank plate VVQZ100-10A-5 VVQZ200-10A-5 VVQZ300-10A-5 This is used when removing the valve for maintenance, or reserving a valve mounting space on the manifold for future use.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

M14 x 1 Hexagon width across flats 19 M5 x 0.8 5 5 20 D 5 F Hexagon width across flats 21 C Y 2.5 A B Dimensions (mm) A B C D F Y Model ZPT40F-B5-A14 40 43 12.5 18.5 51.5 5 ZPT50F-B5-A14 50 53 13.5 19.5 52.5 6 13-11-103 8 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer/Female Thread Series ZPT How to Order ZPT 20 F GS B01 Vacuum entry/ Mounting thread diameter Pad diameter

15

5 !1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !0 @8 @6 #5 #3 @5 $2 #7 #6 With bumper bolt CY1SG/Centralized piping type For 6 For 6 $0 #9 23b 29b $0 #9 #4 $1 $3 With bumper bolt With shock absorber 1502 Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing CY1S Series Component Parts No. No.

HRX-OM-Z015

EC01h 4 Perform (6) for 3rd. value (0h) and then, perform (5). C02Dh Calculation 5 Perform (6) for 4th value (0040h) and then, perform (5). ED01h 6 Perform (6) for 5th value (0h) and then, perform (5). C02Ch 7 Perform (6) for 6th value (0001h) and then, perform (5). 1D00h 8 Perform (6) for 7th value (0002h) and then, perform (5).

HEC-OM-S008

. 5-5 5.6 Function codes . 5-7 5.7 LRC . 5-7 5.8 Explanation of function codes . 5-8 5.9 Negative response . 5-12 5.10 Register Map . 5-13 5.11 Communication Format and Examples of Answers from Thermo-con . 5-16 6 Troubleshooting . 6-1 Preparation for Communication 1 Preparation for Communication Make preparation for using communication facility as follows. 1) Turn off the power switch