Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: E3 (Output: PNP Output; Electrical Entry: Wiring Bottom Entry), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Y (Upward), Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 30, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 02 (1/4), Options: EH (E+H), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 30, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 02 (1/4), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: Y [DIN Terminal w/Connector (DIN 43650C)], Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4),

LX

Allowable Moment (Nm) Allowable dynamic moment Allowable static moment Pitching Rolling Yawing 4 3 4 LXF Model Load movement direction a = 1000 2000 a Mep a = 2000 L1 (mm) Pitching Rolling Yawing a = 3000 m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment 1000 m L1 3 0 1 2 Transfer load m (kg) a = 1000 300 L2 (mm

2 Phase Stepper Motor/Without Motor Brake Series LXS

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through Refer to Cross section C-C, bottom view.

Uniaxial Electric Actuator Series LJ1

10 0 10 20 30 0 20 40 60 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 L2 M2 400 400 400 L2 mm L2 mm L2 mm Rolling Yawing W 200 200 200 L2 M2 0 10 20 30 0 20 40 60 0 2 4 6 8 10 Work load (W) kg Work load (W) kg Work load (W) kg W 3000 2000 2000 a=1000 a=1000 a=1000 2000 L3 mm L3 mm L3 mm L3 1000 1000 1000 a=2000 a=2000 W a=2000 a=3000 a=3000 a=3000 M3 a 0 20 40 60 0 2 4

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

Series KC Self-seal Fittings

L4 Weight (g) A L3 L1 L2 D1 D2 D3 Part No.

Short Stroke Electric Actuator Series LX

) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BC Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 G 28 58 5H9 +0.030 0 depth 5 (5.5)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

Size: 1/8, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: None, Option 1: None, Option 2: Upward Handle

Size: 1/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: None, Option 1: None, Option 2: Upward Handle

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -