New

Test range Thermometer Equipment Pressure Pressure for test tap tap Restrictor Flow Restrictor on the 2d 6d on the meter downstream side upstream side r 20d r 10d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 32 Series VXN Flow-rate Characteristics Note) Use this graph as a guide. In the case of obtaining an accurate flow rate, refer to pages 28 through to 32.

Direct Operated

Test range Thermometer Equipment for test Pressure tap Pressure tap Throttle valve in the upstream side Flow meter Throttle valve in the downstream side 2d 6d 20d 10d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 29 Flow Characteristics Note) Use this graph as a guide. In the case of obtaining an accurate flow rate, refer to pages 25 through to 29.

New

Test range Thermometer Equipment for test Pressure tap Pressure tap Restrictor on the upstream side Flow meter Restrictor on the downstream side 2d 6d 20d 10d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 35 Series VXZ Flow-rate Characteristics Note) Use this graph as a guide. In the case of obtaining an accurate flow rate, refer to pages 31 through to 35.

7

VXZ VXS VXB Test range Thermometer VXE Equipment for test Pressure tap Pressure tap VXP VXR Throttle valve in the downstream side Flow meter Throttle valve in the upstream side VXH 2d 6d VXF 20d 7d VX3 Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005-2-3 VXA 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50 40

OMU0023

2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D 77 4D M 109 6D

10

Test range Thermometer Equipment for test Pressure tap Pressure tap Restrictor on the upstream side Flow meter 2d Restrictor on the downstream side 6d 20d 10d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 42 Series VX21/22/23 Flow-rate Characteristics 1 Note) Use this graph as a guide. In the case of obtaining an accurate flow rate, refer to pages 38 through to 42.

MB

D 6D 1 mm 6 < D 25D 2 mm D > 25D 4 mm 3) In case of a double rod type and a single acting retraction type, enter the dimension with the rod retracted. 4) In case of a double rod type, the change is applicable to a single side only.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Test range Thermometer Test equipment Pressure tap Pressure tap Throttle valve on the Flow meter Throttle valve on the downstream side 2d 6d upstream side 20d 7d Fig. (3) Test circuit based on IEC 60534-2-3, JIS B 2005-2-3 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50 40 40 50 P1 = 1 MPa P1 = 0.8 MPa P1 = 0.6 MPa

Table of Contents

60C, Ambient temperature: 32C Water cooled aftercooler Inlet air temperature: 180C Inlet temperature of cooling water: 30C Note 2) Series IDF Inlet air temperature: Saturated at 35C (IDF1D), saturated at 40C (IDF2D to 240D), Ambient temperature: 32C Note 3) Series IDG Inlet air temperature: Saturated at 25C, Ambient temperature: 25C Note 4) Series IDU Inlet air temperature: 60C (IDU3D to 6D

5 Port Solenoid Valve

6D-side end plate assembly part no. !7Manifold block assembly Tie-rod (2 pcs.) and lead wire assembly for extensions are attached.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Throttle valve in the upstream side Throttle valve in the downstream side Flow meter 2d 6d 20d 10d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 Front matter 6 15 Flow Characteristics Note) Use this graph as a guide.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

A

D O U B L E A C T I N G T Y P E: 10~25 Lubrication Not required Action Double Acting type, Single Acting type (N.O) Auto Switch See Accessories P R O D U C T S E L E C T O R (H O L D I N G F O R C E) Action Model Bore Size (mm) Holding Force @0.5MPa / 73PSI (Effective) (N) Opening Stroke (Included) (mm) P A R A L L E L T Y P E S I N G L E A C T I N G T Y P E: N O R M A L LY O P E N MHQ2-6D

CATALOG

D O U B L E A C T I N G T Y P E: 10~25 Lubrication Not required Action Double Acting type, Single Acting type (N.O) Auto Switch See Accessories P R O D U C T S E L E C T O R (H O L D I N G F O R C E) Action Model Bore Size (mm) Holding Force @0.5MPa / 73PSI (Effective) (N) Opening Stroke (Included) (mm) P A R A L L E L T Y P E S I N G L E A C T I N G T Y P E: N O R M A L LY O P E N MHQ2-6D