CP95 1q ye t !5 !9 !4 !7 !3 w A @0 A' Sectional view A-A' iu Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts No.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Hysteresis mode P. 879 P. 877 I U Input impedance Insulation resistance Internal voltage drop Unit conversion URJ P. 877 P. 879 V K Vacuum breaking pressure Vibration resistance Voltage resistance Key lock mode P. 877 P. 879 L W Leakage current LED level meter Liquid contact part Load Load current Load impedance Load lock chamber Load voltage Window comparator mode P. 879 Z P. 877 Zero out
N None 1 2 n T 7 Digital Gap Checker With Control Unit ISA3 Series 3-Color Display RoHS How to Order G C N M B 2 ISA3 L 1 Rated distance range F 0.01 to 0.03 mm G 0.02 to 0.15 mm H 0.05 to 0.30 mm 2 port solenoid valve Rated voltage Piping specifications Output specifications Nil 24 VDC 1 *11 100 VAC 2 *11 110 VAC *11: Made to Order N NPN output P PNP output Supply side Detection side Unit
CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !
Output form O: 1SHOT output H: HOLD output C: COMPARE output Reading pre-scale setting Command Block # 0 0 P R [CR] Unit No. Command Check sum code Response Block # 0 0 P R [CR] Unit No. Command Response Status Check sum code data Response data details 1 0 0 0 0 0 1 1 Multiplication Pre-scale value Decimal point position Writing pre-scale setting Command Block # 0 0 P W [CR] Unit No.
(ZSE/ISE30A) P Reduction in setting w Reduction in setting work ork P Pre Prevention of mistakes in setting vention of mistakes in setting P Reduction in setting work P Prevention of mistakes in setting Cop Copy Copy 1 switch Slave pressure switch Master pressure switch (source of copy) 2 switches 10 switches 3-step setting -step setting 3-step setting 1 2 3 Push Push Adjust to the set-value
Note 4) q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Rated circulating fluid flow rate, r Circulating fluid: Clear water, t Facility water temperature: 25C Note 5) Use a 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temperature is 10C or less.
g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole
Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?
0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !
Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port r q FV4 FV4 FV4 AZ1001S e w FV4 FV4 FV4 2PW 3PW 4PW 2PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.
Stations: 02 (2 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.
8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !
8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No.
8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note Note No. q Description Material No. Description Material Body Bushing B !
Description Chromate treatment, Epoxy coating on inner surface Housing Body q w e Note: Constructions show sight glass, but mounting position is different from actual position. Please refer to p.4.4-4 and 4.4-5 about drawings for more detailed. Sight glass Tempered glass AMG850: Aluminum casting Replacement Parts AMG450 Part No. No.
Size: 02 (Size 18mm), Stations: 6 Stations, A, B Port: 01 (Side, 1/8), Port Thread: T (NPTF), SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: S (Direct Exhaust w/Built-in Silencer)
Size: 01(Size 26mm), Stations: 1 Station, A, B Port: 02 (Side, 1/4), Port Thread: T (NPTF), SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: S (Direct Exhaust w/Built-in Silencer)
Size: 01(Size 26mm), Stations: 4 Stations, A, B Port: 02 (Side, 1/4), Port Thread: T (NPTF), SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: S (Direct Exhaust w/Built-in Silencer)