Mechanical Valves Series NVM, NVFM, NVZNI

(kg) 11.46 (5.2) P.T. ln(mm) 0.12 (3) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.19 (5) '75 PSIG (5 Kgf/cm2) -ffi 2 WaY DIMENSIONS A B c D E F G H J K M 't.57 (40) 1 . 1 8 (30) 2.40 (61) 2.05 (52) o.87 (221 0.51 (13) 0.98 (251 0.63 (16) 1.06 (27\ 0.31 (8) 1 . 2 6 (32) Millimeters in Parentheses HOW TO ORDER NV[f220-N02-40 : 2 way; 2 portr/e" NPT WFoot Pedal NVM23O-NO2-40 : 3 way; 2 poft 1/4" NPT w

HRX-OM-K003

C Facility water temp. +15C Circulating fluid rated flow rate L/min 4 30 40 40 (1.1 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 20 25 40 (2.6 [gal]/min) (5.3 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Galden HT200 or FluorinertTM

HRX-OM-Y120

HRX-OM-Y120-D Operation Manual Communication function Thermo-chiller Air-Cooled refrigerated type Water-Cooled refrigerated type HRL100-A-20/40 HRL100-W-40 HRL200-A-20/40 HRL200-W-40 HRL300-A-20/40 HRL400-A-40 Keep this manual available whenever necessary 2023 SMC CORPORATION All Rights Reserved To Users, Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product

7.4

Tightening torque VQ1000FPG-FB 0.22 to 0.25 Nm 16 16 stations VVQ1000-FPG-066-station manifold Note) This torque is used to mount the bracket on the double check block.

XMC/XYC Series

Specifications Model Note 1 XMC-16 XMC-25 XYC-25 XMC-40 XYC-40 XMC-50 XYC-50 XMC-63 XYC-63 XMC-80 XYC-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Double acting(Dual operation) , pressurize to open/close Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6

Series KP/KPQ/KPG

18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

AIR SLIDE TABLE

25 25 25 31 39 65 65 65 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 32.9 33.9 33.9 33.9 46.9 46.9 32.9 71.9 71.9 16 Solid state switch A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 16 5.4 5.4 5.4 5.4 14 14.6 17.6 19.6 19.6 MXQ8(A,C) 11.9 11.9 11.9 11.9 11.9 11.9 19.1 19.1 19.1 25.1 42.1 19.1 MXQ12(A,C) 14.5 14.5 14.5 14.5 14.5 14.5 14.5

3 Port Solenoid Valve/

245 16 VP500/700-X538, X555 Optional Accessories For details about optional accessories, refer to the WEB catalog.

3 Port Solenoid Valve/

245 16 VP500/700-X538, X555 Optional Accessories For details about optional accessories, refer to the WEB catalog.

LEF-OM007xx

) 6N Motor option Ball screw lead With controller (PNP) 6P With controller (PNP) 6P Without lock Nil Without lock Nil Size Size With programless controller (NPN) With programless controller (NPN) 1N 1N With lock B With lock B 40 32 25 16 40 32 25 16 With programless controller (PNP) 1P With programless controller (PNP) 1P Stroke Actuator cable length 10mm 10mm 12mm 12mm 16mm 16mm 20mm 20mm

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2

H/DL/L/LL

(mm) Connection threads Rc Model Effective area (mm 2) Weight (g) M L2 L1 Applicable tubing Connection thread 1 4 1 4 3 8 1 4 1 4 1 4 4 DHF04-02 27 DHF06-02 28 16 16.5 30.3 30.8 17 17 10 15 4 6 16 12 11 DHF06-03 31 18.5 32.8 19 8 DHF08-02 29.8 30 16 20 14 17 15.5 DHF10-02 10 12 30.8 37 DHF12-02 30.8 16.5 17 17 40 17 19 17 17 34 51 16.5 15-2-62 Self-align Fittings Series H/DL/L/LL Male Branch

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

CXWM/CXWL

There are 16 possible reciprocating piping methods.

Title not found

(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.

SI Unit for Vacuum Manifold

Settable range : 31...2000 (3.1 kPa...200.0 kPa) Combination conditions with other parameters : H3+1 P3 2000 (40) ... ... ... ... ... 16 2 R/W 0x0028 Release confirmation threshold (P3) of CH15 (40) 3.4.6. Hysteresis H3 (Index 69) Table 3-14.

Digital Flow Switch (Integrated display type)

Page 36 [ oU2] Output mode (OUT2) [ HYS] Hysteresis mode (Flow) Page 40 [ 2ot] Switch operation (OUT2) [ 2_P] Normal output Page 40 50% of maximum rated flow [ 2.00] 2.00 L/min (4 L type) [ 8.0] 8.0 L/min (16 L type) [ 20.0] 20.0 L/min (40 L type) [ 50] 50 L/min (100 L type) [ 126] 126 L/min (250 L type) [ P_2] Set value (OUT2) [F 2]/[ oUt2] Page 41 5% of maximum rated flow [ 0.20] 0.20

MHL2

10, 16, 20, 25: 40 mm, Bore size 32, 40: 80 mm.

33

0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE024-A-20/23-(T) [50 Hz] [60 Hz] 3000 3000 Ambient temperature Ambient temperature Cooling capacity [W] Cooling capacity [W] 25C 2500 2500 25C 2000 2000 1500 1500 35C 35C 1000 1000 40C 500 500 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature