5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?

5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?

5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?

5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?

5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?

5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?

5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1760? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?

5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1760? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?

Low Differential Pressure Sensor

Sensor -2kPa 0 2kPa 5kPa 10kPa Pressure range For low differential pressure PSE550 0 2kPa -0.2kPa 2kPa Rated differential pressure range of sensor Set differential pressure range of controller 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing July, 2003 D-YGA P-120 (YGA)

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Compact Manometer Series PPA 1

Note) Dimension X includes the One-touch fittng IC 4 6 1/4" 123 124 126 VBA VE (Front) (Back) VY1 G 20 Option/Case holder 5 Fitting port diameter M5 x 0.8 Thread depth 5 PPA 44 6.8 9.2 4.5 AL 2 SMC 15 25 18 2-(R) 4.5 120 29 14-12-7 8 Series PPA Error Correction Maintenance Span calibration method When errors occur, they should be corrected as shown below.

E-P HYREG ® Series VY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VY130 0 1 VY11 /120 0 1 0 1 VEX A port pressure (MPa) A port pressure (MPa) AMR Set point Set point Set point Set point Set point Set point ITV IC VBA VE P port pressure (MPa) P port pressure (MPa) VY1 VY140 0 1 VY150 0 1 G PPA A port pressure (MPa

VEA

Externally set input impedance 100 k or more Externally set input voltage 0 to 5 V 1 8 External potentiometer 10 k ( W or more): not provided Step response 0.06 s or less (1 A, 95%) Dither frequency adjustable range (DITHER) 120 to 180 Hz (140 Hz when delivered) 0 to 500 mA (0 mA when delivered) Zero adjustable range (NULL) 500 mA to 1 A for input voltage 5 V (1 A when delivered) Gain adjustable

TL/TIL

side fixed, gradually close the other side and measure 2R at the point where the tubing folds or flattens, etc. 2R Fixed side How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size 0.4 Tubing Model Symbol 10 20 50 100 Type Length 10 m 0.2 20 m Roll 50 m 0 20 40 60 80 100 120

VCS

seal material FKM only. 17-2-42 5 Series VCS Direct Operated 2 Port Solenoid Valve For Steam Standard Specifications Valve construction Direct operated poppet Fluid Steam (184C or less) Withstand pressure MPa 5.0 Body material C37, Stainless steel Valve specifications Coil specifications Seal material PTFE (FKM) Ambient temperature (C) 20 to 100 Fluid temperature (C) VC 184 or less (PTFE), 120

VVXA21/22

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Blanking plate Mounting hole n-Rc , 8 1 4 1 (Pitch) (Pitch) Stations 10 9 8 7 6 5 4 3 2 Model Symbol L1 L2 L1 L2 384 372 494 476 348 336 448 430 312 300 402 384 276 264 356 338 240 228 310 292 204 192 264 246 168 156 218 200 132 120 172 154 96 84 126

VXD21/22/23

Q N 60 62 62 Applicable flange N Q L K J B C H F E D A M 90 (100) 101 (111) 106 (116) N 25.5 28 28 M 82 (92) 93 (103) 98 (108) N M 82 (92) 93 (103) 98 (108) M 82 (92) 93 (103) 98 (108) Normally open Normally closed VXD2270 VXD2380 VXD2390 VXD2272 32A 40A 50A VXD2382 VXD2392 48 50 50 95 97 97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 51.5 54.5 59 100 105 120

3 Port Solenoid Valve

Printed in Japan. 1st printing April, 2003 D-DN P-120 (DN) Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Vacuum System Peripherals:

6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.9 SYJ714/724 1 8 1 4 , Model/Rubber Seal 3 port solenoid valve Series VZ100/300/500 Compact size: Width 15 mm (VZ100, 300) Width 18 mm (VZ400, 500) Low power consumption 1 W(0.5W) Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications VZ110/120

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Solenoid Valve Dimensions Plug lead unit manifold (VV2Q32) VX VNl VQ Equation L1= (n1) X 37+56 L2=L110 L3=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max. 20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 389 759 352 722 315 685 278 648 L1 L2 L3 L4 L5 241 611 204 574 167 537 130 500 93 463 56 426 379 749 342 712 305 675 268 638 231 601 194 564 157 527 120