Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.

Air Slide Table Series MXS

2) Option R is not available with the MXS6 series.

Series VS

SIZE 2 3/8, 1/2,3/4 SIZE 3 3/4, 1 6 PORTS,1,3,5 PORTS 2) SIZE 1 1/4,3/8, 1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 1/2, 3/4,1 2 PORTS,2,4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS SIDE U SIDE D n 3 STATION 2 1 SMC SMC BB 2 2 2 2 2 2 AA S R Q 4 4 4 4 4 4 U T X Y Z V W PITCH NOTE #2 177.5 A 119 B 9 C 50.5 D 48.5 E 58.5 F 87 G 105 H 20.5 I 26.5 J 20.5 K 30.5 L 58.5 M 22 N 45.5 O 52 P 81 Q 49 R 18 S 5.5

Clamp Cylinder with Lock

9 @0 #8 #1 @8 @2 r $0 #6 #5 $2 @6 @7 $5 !5 !0 !6 !2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

IDX-OM-W089

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions about reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term

VQ20/30

VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).

Industrial Filters

tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931 1325 516 871 1225 1191 1860 1191 1825 647 1133 1620 31 Industrial Filter FGG Series How to Order FGG S B 20 B N 002 A G1 Symbol Option Pressure gauge type G46-10-02M (Brass at wetted

Compact Type

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Rotary Clamp Cylinder: Standard Series MK 12, 16, 20, 25, 32, 40, 50, 63 How to Order MK 10 R 20 A F M9BW Number of auto switches Rotary clamp cylinder Standard Nil S 2 pcs. 1 pc.

CY1F

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

AKH/AKB Series Check Valve with One-touch Fitting

From male thread to female thread Female Thread/Male Thread Combinations A R(PT) thread NPT thread Female thread NPT Male thread NPT Female thread Rc(PT) Male thread R Model Model 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 From female thread to male thread AKB01 AKB02 AKB03 AKB04 AKB01 AKB02 AKB03 AKB04 1/8 1/4 3/8 1/2 1/8 1/4 3/8 1/2 B 2 Check Valve with One-Touch Fitting Series AKH/AKB Specifications

NCA1

NCA1-P325 NCA1-P800 NCA1-P1000 CB 1 1/4 1 1/2 2 CD 3/4 1 1 3/8 DD 17/32 21/32 21/32 E 3 1/2 4 1/2 5 F 5/8 3/4 7/8 FL 1 7/8 2 1/4 3 LR 1 1/4 1 1/2 2 1/8 M 3/4 1 1 3/8 MR 7/8 1 1/4 1 5/8 R 2.56 3.25 3.81 Weight (lbs) 3.11 5.80 10.42 Note: Pivot pin is not included Clevis Bracket CB CW CW CD MR BA E LR DD AA M F E FL Dimensions Part No.

Compact Type Dual-Rod Cylinder Series CXSJ

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

High Vacuum L Type Valve

when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0016 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83

High Vacuum L Type Valve

52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

1 e w r !3 !8 !7 @3 @0 !9 @4 @1 @2 @6 @5 @7 @8 LVM No.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

28.6 24 R 1/2 52.5 102 109 25 38.2 20.9 Note 1) Reference dimension for threads after installation Note 2) 1 is the weight for type AS21FPQ (brass + electroless nickel plated), 2 is the weight for type AS21FPG (SUS304). 4

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

i r t !

Air cylinder

Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P19 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4. Made to order product (XC85, X446) P27 4-1.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !