MLGC

1 Fine Lock Cylinder with Guide Series MLGC 20, 25, 32, 40 A linear transfer cylinder unit with a built-in locking mechanism and a guide rod integrated in a compact design.

SMC Wireless System PROFINET compatible

layout 1) 5 M12 (4-pin/5-pin) A-coded IN/OUT (PIN layout 2) : Refer to Connector Pin No.

EXxx-OMZ0016

number. *2: Select a protocol before performing pairing (V.2.0: 1 Mbps, V.1.0: 250 kbps).

SMC Wireless System EtherNet/IP ® compatible

layout 1) 5 M12 (4-pin/5-pin) A-coded IN/OUT (PIN layout 2) : Refer to Connector Pin No.

CNA

1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL CL1 MLGC #1 @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !9 @2 @6 $2 CNG A section B section MNB (Release piston bushing) 100 80 63 50 40 (Piston guide bushing) 50, 63, 80, 100 CNA @9 CNS !2 !2 CLS Description Material Note Component Parts CLQ Description Material Note No. No.

CNA

1 o q $8 y $1 r #5 B A CL CL1 MLGC @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

HRX-OM-W004

A A/B CON screen TYPE No.12 Contact output signal 1 function RUN *1 D.OUT1 Setting function of contact input signal 1. screen SEL Contact output signal 1 operation No.13 A A/B D.OUT1 Setting output operation of contact output signal 1. screen TYPE D.OUT1 No.14 Contact output signal 1alarm AL.01 AL.01AL.32 Setting selected alarm of contact output signal 1.

48

1 i Motor option: With motor cover Motor option: With lock !4 e y q w r !3 @2 !7 !2 !7 u A A A-A (LEL25LT-n) A-A (LEL25MT-n) !9 !9 t @0 @1 !0 !6 !8 !5 o Component Parts Description No.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

rep-filter-e

Instruction Drawing for Disassembly & Reassembly of Filter u AIR VENT y i q 9-1 r 9-3 t 9-2 e w Stopper IN !2 !0 !1 DRAIN Element support Partition plate Filter case A OUT BACK WASH A A-A SECTION qHexagon head bolt wHexagon nut eWasher rCover tGasket yAdjustment bolt uLock nut iElement retainer oElement mounting bracket Spring 9-1 Vibration stop Element holder !0Element !1Joint !

Industrial Filters Replacement Procedure

Instruction Drawing for Disassembly & Reassembly of Filter u AIR VENT y i q 9-1 r 9-3 t 9-2 e w Stopper IN !2 !0 !1 DRAIN Element support Partition plate Filter case A OUT BACK WASH A A-A SECTION qHexagon head bolt wHexagon nut eWasher rCover tGasket yAdjustment bolt uLock nut iElement retainer oElement mounting bracket Spring 9-1 Vibration stop Element holder !0Element !1Joint !

Mini Free Mount Cylinder

After manually tightening speed controllers and fittings, tighten approximately a quarter turn (a 1/6 turn for 20 only) more using a tightening tool. In cases where there are gaskets in two places such as universal elbows, universal tees, etc., double the additional tightening to a half turn (a 1/3 turn for 20 only).

DOC1023125

Keep the manual in a safe place future reference. Observe the tightening torque for screws. Tighten the screws to the recommended torque for mounting the product. D o n o t m a k e a n y a l t e r a t i o n s t o t h i s p r o d u c t .

Air Filter

Semi-standard: 6 Semi-standard: 6C Piping port Piping port thread ty pe (5) Part No. (5) Part No. thread ty pe Rc Rc AD27-6-A AD27-6C-A G G NPT AD27-6(Z)-A NPT AD27-6C(Z)-A C Note 1) Option symbol 2 Semi-standard symbol Semi-standard: 2 Piping port thread ty pe (5) Part No. Rc AD27-2-A G Appearance and NPT AD27-2(Z)-A part No. Note 1) Minimum operating pressure is 0.1 MPa.

Low Maintenance Filter Series FN1

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) Inlet pressure (MPa) Inlet pressure (MPa) 25 Series ARG20K/30K/40K Working Principle Specific Product Precautions A-A A w Be sure to read before handling.

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

VQZ100V-OMT0001

/VQZ 95 95 95 95 ,N.O. ,N.O. ,N.O. ,N.O. 3 5 3 4(A)5 4(A)2B 1 1 1 1 1 1 1 1 2 2 2 2 0 0 0 0 2 2 2 2 0 0 0 0 3 3 3 3 1 1 1 1 3 3 3 3 1 1 1 1 5 2 3 () () () (3 ) 5 3 NL R LED R 2(B),CM 10 No.VQZ100V-OMT0001 VQZ Series/ / / / DIN DIN DIN DIN DIN DIN 0.30.4Nm VQZ100 VQZ100 VQZ100 VQZ100 300 300 300 300 VQZ200 VQZ200 VQZ200 VQZ200 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000

2/3 Port Valve for Various

Base, Body Seal material Aluminum NBR, FKM, EPDM LQ Port A Port A LVN Port P TI/ TIL Port R Energized open Energized closed PA PAX PB Model Manifold base model Port A Rc Port P Rc Port R Rc VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Manifold Manifold stations Manifold B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 17-3-105 The VX series will be revised shortly.

Lubricator

AL-OMX0056-A PRODUCT NAME Lubricator MODEL / Series / Product Number AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-D AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)06(B)(-2,3,6,8,R,W,Z)-D AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,W,Z)-D AL60-(F,N)10(B)(-2,3,6,8,R,W,Z)-D Contents Page 1. Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4.