Release Valve: N.C., Voltage: 24VDC, Electrical Entry: L Plug Connector, Lead Wire Length 0.3m, Light & Surge Suppressor, Manual Override: Non-locking Push Style; Latching: Push Lock Type, Vacuum Pressure Switch Suction Filter: Suction Filter Only, Vacuum Pressure Switch Unit Specs: Unit Switching Function, Vacuum Pressure Switch Lead Wire: No Connector, Check Valve: None, Fitting (V Port): 3

Vacuum Release Valve: N.C., Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style; Latching: Push Lock Type, Vacuum Pressure Switch Suction Filter: Suction Filter Only, Vacuum Pressure Switch Unit Specs: Unit Switching Function, Vacuum Pressure Switch Lead Wire: No Connector, Check Valve: None, Fitting (V Port): 3

Main Body Shape: Unit, Additional Function: Silencers / Filter, Ultimate Vacuum(kPa): -80, Air Consumption Flow Rate(l/min): 14, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: -, Air Supply Port One-Touch Fitting Size: -, Operation Category: Normally Closed, Application: Manifolds, Operating Pressure Range(

CJP

24 5 19 14.5 11.5 15 10 5 25 19 M22 X 1.5 20.5 4.5 17.5 15 31.5 27 24 Panel Mounting Style CJPB B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14

FC2W-X110

FC2W-X110 How to Order Piping port size Flow rate control range Symbol Port size 03 3/8 0.5 to 4.0 L/min FC2W504 03 X110 3 2.0 to 16.0 L/min FC2W520 X110 3 04 Piping port size Lead wire 3 Lead wire with connector (3 m) Symbol Port size 04 1/2 Specications Model FC2W504-03-3-X110 FC2W520-04-3-X110 Applicable uid Water Flow rate detection method Karman vortex Flow rate control range 0.5 to

7.4

)5 S07A5 2(B) 4(A) 2 (B) 3 (R2) 1 (P) 4 (A) 5 (R1) y t 4-Position Dual 3-Port Valve 5(R1) 3(R2) u r e w q 1(P) N.C. + N.C.

EXxx-OMZ0016

Change the operation mode of the Base or the number of inputs/outputs mapped to the wireless system (Base and Remotes). (3) Network setting error (4) Number of registered Remotes Red Flashing (3) This is a CC-Link station number 3 MS setting error (factory preset).

VSA4

Mounting Bolts, Gasket Part No.: BG-VS4030 How to Order 2 position double VSA 1 4 3 0 02 Thread type Air operated valve N Nil Rc 4/5 port valve NPT NPTF PF T Function 3 position closed center F 2 position single 2 position double 3 position closed center 3 position exhaust center 1 2 3 4 Option 2 Body size standard 3 8 Pilot Nil Body side 1 Base side (Without sub-plate) Piping Option 3

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

(3) Note 3) At rated voltage 1449 VT325 Series Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet Port size C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for

Thermo-chiller

3 w Parts List (170) No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3 9.8 30 54.8 21.9 1.2 49.3 123 AS320-N03-SD NPT 3/8 NPT 3/8 AS320-F03-SD G 3/8 AS320-03-SD Rc 3/8 19 22.5 R 3/8 24.3 9.8 30 52.6 19.7 1.2 47.4 128 AS420-N04-SD NPT 1/2 23.8 NPT 1/2 AS420-F04-SD G 1/2 AS420-04-SD Rc 1/2 24 27.5 R 1/2 28.5 12.4 38.5 62.9 25.8 1.2 55.8 222 Reference thread dimensions after installation. 599

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

Series LX Acceleration Time Guide

F A A Lr Lr = 150mm L X F 60 Table displacement (m) Table displacement (m) Table displacement (m) 10 40 LXFH-100 50 LXFH-100 8 LXFH-100 40 30 LXFH-75 LXFH-75 6 30 20 LXFH-50 LXFH-50 LXFH-75 4 20 LXFH-25 LXFH-25 10 LXFH-50 2 10 LXFH-25 0 Weight (kg) 0 Weight (kg) 0 Weight (kg) 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 Displacement at the section indicated by the arrow when a load

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Finger opening port M3 x 0.5 Finger closing port A C 32 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 3-3 depth 6 +0.02 0 (A, B, C common view) 6-M3 x 0.5 thread depth 6 (A, B, C common view) 29 9h9 0 0.036 32 1 5 15 10 (35) 7 14.5 2 8 0 0.05 2 3 0 0.02 3 0 0.02 Open: 16 Closed: 10 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 12 12 4 4 4 4 12-5-10 11 2 Finger

3 Port Solenoid Valve Metal Seal Series VZ200 1

DXT170-176-2-01 DXT170-176-2-02 100V 200V 100 VAC 200 VAC DXT170-176-2-03 110V 110 VAC DXT170-176-2-04 220V 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240V 6VD 12VD 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC circuit DC circuit NL: Neon bulb R: Resister D: Protective diode LED: Light emitting diode R: Resistor 4

LEKF-OMZ0035

Slider type LEKFS series . 7 2.1 Specification . 7 2.2 How to Order . 9 2.3 Construction . 11 3.

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

3 14 port side SOL 3 Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) ZNR 4 4 2 1 DC: Single COM M12 Connector: Wiring specifications (EVS1-01) 3 1 14 port side SOL 12 port side SOL Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) 5: Ground ZNR ZNR 4 2 2 4 5 DC: Double 3 3 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series

,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)