Series SV

21 22.5 13.5 M5 x 0.8 (External pilot port) 99.2 84.9 23.4 M5 x 0.8 (Pilot EXH port) 2-4.3 (Mounting hole) 21 21.5 A B PE 38 46 A B A B SMC B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 19.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 134.4 128.8 M12 waterproof connector 60.5 58.7 26.5 13.5 5-Rc 3/8, 1/4 (Piping port

CLQ

16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5 x 0.8 unlocking port (Unlocks when pressurized) Rod end male thread H1 Rod end nut H2 X C1 L1 Stroke range Without auto switch With auto switch Bore size (mm) A G L M U VH VV W E H I K Q S D C A B B 61 68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 20 25 36

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(Z) TT QQ (G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 21 21.5 M5 x 0.8 (Pilot EXH port) 2 x 4.3 (For mounting) A B PE SMC 38 46 A B A B B A X Manual override P A side: Orange B side: Green EA EB 21.5 21 61 69 6.4 (Light/surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.3 58.5

5 Port Solenoid Valve

B B B 61 106 107.8 9 9 29.5 VQ 1/2 80 A A A A A 192.8 R1 5 R2 3 179 179 155 VQ 4/5 1 P PE VQC 1/2 29.5 B B B B B VQC 4/5 VQC 4/5 12 21 47.5 VQZ n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port SQ 3/4" 1(P), 5(R1), 3(R2) port VFS 1/2" 3(R) port 3/8", 1/2" 4(A), 2(B) port VFR M5 x 0.8 Ground screw VQ7 117 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.7 3 1 69 55.5 53.7 45.5 12 X 4 A 4 A 4 A 4 A 4 A 4 A

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Bottom Mounting Style / CJ2RA, CJ2RA 10112122X GC Y Relief port M5 x 0.8 GA GB Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 MM C D B 0 0.3 L LX B 0 0.3 LB LH Head cover port location Axial direction (R) NA H A Z + Stroke S + Stroke NB 2 x LD The overall cylinder length does not change.

Compact Cylinder with Lock Series CLQ

clevis type: CLQD/CDLQD CD hole H10 Shaft d9 4-M5 x 0.8 Cap bolt Double clevis type (mm) S Stroke range Without auto switch With auto switch Bore size (mm) A B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

C85

18.3 10.5 10 10 M5 x 0.8 M6 x 1 88 20 6 20 21 5 26 16 67 5 16 16 25 6 4.5, 8 depth of counterbore 5 29.5 Base mounting/C85RAF Y Without magnet, Built-in magnet (Band mounting type) 20/25 Stroke B XB WH G1 EF EE G2 2-LD D D SW C KK ND B LH K NA LX AM NA 3 N1 N2 L S + Stroke H ZZ + Stroke Head cover Y Head cover F (mm) NA Bore KK ZZ AM B C D EE G1 G2 H K L LD LH LX N1 N2 ND h8 S SW WH XB 0

C85

F (mm) Bore AM EE KK LD ZZ B C D G1 G2 H K L LH LX N1 N2 NA S SW WH XB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 15 9.5 7 8 M5 x 0.8 M4 x 0.7 74 16 4 17 16 23 14 58 4 12 12 19 5 3.5, 6.5 depth of counterbore 4 23.5 10 15 9.5 7 8 M5 x 0.8 M4 x 0.7 74 16 4

Auto Switch Guide

switch mounting screw (M4) M5 x 0.8 x 12 l RHC Mounting bracket (A) MK(2) RS Q G Auto switch Auto switch mounting bracket RS H A Set screw (M4) RZQ Mounting bracket (b) Tie-rod MI W S Auto switch mounting screw (With hexagon socket head) M5 x 0.8 CEP1 CE1 Auto switch CE2 Bracket set screw M5 x 0.8 x 12 l ML2B Mounting bracket (A) C J G5-S 1.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations 15-9-76 Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting, Elbow Type/Universal Type Construction Universal type Meter-out type Elbow type Meter-out type M5 type U10/32 port M5 type U10/32 port AS ASP ASN

Compact

L L Model Screw size Maximum tightening torque [Nm] L (Maximum screw-in depth)[mm] LEMBl M5 x 0.8 3 8 LEMC25 LEMH25 M4 x 0.5 1.5 7 LEMC32 LEMH32 M5 x 0.8 3 9 6. Do not dent, scratch or cause other damage to the body and table mounting surfaces. This may cause unevenness in the mounting surface, play in the guide or an increase in the sliding resistance.

Electric Actuator

(Terminal no.) (16.6) (23.7) Cable length (L) [m] 1 3 5 8 A B C Connector A (7.0) 1 3 2 4 (12.7) (5.6) 1.5 3 5 8 3 2 1 (13.5) 1 4 A 1 2 (6.7) B 10 (18) 15 (14.7) 15 16 (30.7) (1 1) L Connector B 20 (10) Connector D Produced upon receipt of order Connector A terminal no. 1 2 3 Connector C terminal no. 1 2 3 Signal Cable color Red White Black U V W Connector B terminal no.

3 Port Solenoid Valve Metal Seal Series VZ200 1

length 2-2.8 mounting hole VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG VP S070 Pilot EXH Locking type manual override VQ VKF VQZ 1 2 DIN terminal: VZ2 2-D(Z)-M5 1 2 L plug connector: VZ2 2-L(Z)-M5 VZ 300 (Lead wire length) VS VFN With light/surge

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C A 54 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 14 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 25 25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B,

One-touch Fittings Series KQ2

b a c i l p p A .

MY1

(A) Black zinc chromated MY-16B-stroke (B) Nickel plated MY-16BW-stroke 4 Series MY1W Dimensions: 16, 20 L (LL) 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K PA YW PB QW LW 2 x 2-M5 x 0.8 (Hexagon socket head plug) PG Q + Stroke M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) W CH LH RR SS NE RR SS H QQ NH NC This port is not available for

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T Glossary of Terms Specific Product Precautions 54 JSX/JSXm Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI units = L (liter) b : Critical pressure