Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Power Valve Precision Regulator

(MPa) (Relief exhaust) L/min(ANR) L/min(ANR) L/min(ANR) Flow (Pressure reducing supply) 1(P)2(A) 3(R)2(A) 1(P)2(A) 3(R)2(A) 1(P)2(A) 3(R)2(A) (Relief exhaust) Flow (Pressure reducing supply) (Relief exhaust) Flow (Pressure reducing supply) VEX1530 3-06 VEX1730 3-12 VEX1930 3-20 Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) L/min(ANR) L/min(ANR) L/min(ANR) 1(P

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Brown DC (+) (Red) Terminal + Main Circuit Analog output Black OUT (White) PSE ZSE4 ISE4 GND terminal Blue DC () (Black) ZSE5 ISE5 ZSE6 ISE6 Dimensions ZSE3 ISE3 GS 3000 30 25.5 12 7 PS ISA PSE510-01 DC12 to 24V ANALOG1 to 5V GND 1MPa MADE IN JAPAN RED(+) WHITE(1) BLACK() MAXPRESS 13 10 ZSE1 ISE1 7 ZSE2 ISE2 01, T01 ZSP ISl (20) 24 ZSM Width across flats 12 PFl 01: R(PT) 1/8 T01: NPTF 1/

42

: 0.62(n1) + 2.6 F, L, T1 kits 12 stations L F kitD-sub connector L T kitTerminal block box L T1 kitIndividual terminal block kit L L kitLead wire L S kitSerial transmission 3/8 1/2 Side 3/4 Option Direct exhaust with silencer box SV VQ5l00 VQ5l01 T kit 12 stations VQ5000 VV5Q51-lll Not including valve weight.

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

CG1

120+l 123+l 114 119 125 134+l 141+l 147+l 66+l 73+l 73+l 82+l 91+l 91+l 67.7 78.7 118 (125) 138 (145) +l 146 (153) 166 (173) +l 98.6 136 (147) 156 (167) +l 168 (179) 188 (199) +l 119.2 136 (147) 156 (167) +l 173 (184) 193 (204) +l Consists of pins, flat washer and hexagon socket head cap bolt.

Series VQ Base Mounted Metal Seal/Rubber Seal

L plug connector C Kit only Except for AC.

VDW

VCL Standard Option t 1 Body Brass (C37) Stainless steel VCS 2 Tube assembly Stainless steel 3 Coil assembly VCW y 4 Armature assembly FKM, EPDM Stainless steel, PPS, NBR 5 O-ring (Body) FKM, EPDM NBR 6 Return spring Stainless steel q 7 Cover SPCE 8 Clip Stainless steel 245 Series VDW10/20/30 Dimensions VDW11-l G W VDW21-l G W 22 20 Lead wire l Approx. 300 Lead wire l Approx. 300 20

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Gun Type Ionizer

Static Neutralization Characteristics e Pressure Flow Rate Characteristics IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 500 450 400 Flow rate [L/min (ANR)] 350 Flow setting: Max.

0.4

4 VVQC1000-T0-1 Terminal block box housing assembly T kit VVQC1000-L25-0-1 L kit with 0.6 m lead wire !5 VVQC1000-L25-1-1 Lead wire housing assembly L kit with 1.5 m lead wire VVQC1000-L25-2-1 L kit with 3.0 m lead wire !6 VVQC1000-M26-1 Circular connector housing assembly M kit, 26 pins 586 VQC1000/2000 Series Plug-in Unit Base Mounted Manifold Assembly Part No.