Pad Diameter: ø80, Pad Type: HB (Heavy-duty, Bellows), Pad Material: S (Silicone Rubber), Mounting Thread Size: A16 (M16 x 1.5, Rc1/8, Male Thread)

Pad Diameter: ø63, Pad Type: HB (Heavy-duty, Bellows), Pad Material: S (Silicone Rubber), Mounting Thread Size: A16 (M16 x 1.5, Rc1/8, Male Thread)

Pad Diameter: ø80, Pad Type: HB (Heavy-duty, Bellows), Pad Material: F (FKM), Mounting Thread Size: A16 (M16 x 1.5, Rc1/8, Male Thread)

Pad Diameter: B30 (ø30), Pad Material: S [Silicone Rubber, White (A40 Not Applicable for 40, 46; A50 Not Applicable for B15, B20, B30)], Mounting Thread Size: A16 (Short Thread, M16 x 1.5)

Pad Diameter: B30 (ø30), Pad Material: S6 (Silcone Rubber, High-hardness Type, White), Mounting Thread Size: A16 (Short Thread, M16 x 1.5)

Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø63, Bowl Shape: RB (Bowl Bellow), Material: FS (FS61, Fluoro-based Rubber, Green), Connection Thread and Type: A16 (Direct Mounting, Male Thread, M16 x 1.5)

0.4

5 Port Solenoid Valve VQ1000/2000 Series Metal Seal Rubber Seal SV [Option] Power saving Power saving SYJ Standard: 0.4 W Standard: 0.4 W SZ (Reduced by 60% compared to current model) (Reduced by 60% compared to current model) VF VP4 High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 365 5 Port Solenoid

Compact 5-Port Solenoid Valve

0.1 W 1 Made to Order 0.4 W 2 The JSY1000 series is only available as the power-saving type.

Compact Manifold Regulator

IC Dimensions ITVH ARM10-06 08 For dimensions and accessories of One-touch fittings, please refer to page 745.

reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

Suction Guard (Produced upon receipt of order) FHG Series

R P Q Port size Weight (kg) d K W Y AE (mm) (75) (50) W J W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69 69 74 80 80 85 R 70 70 70

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

CL

Basic Foot Front flange W/o rod boot W/ rod boot S W/o rod boot W/ rod boot W/o rod boot W/ rod boot S Stroke range LS Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 WB S Bore (mm) Bore (mm) Bore (mm) Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 GB GB TB GB ZZ 206 223 226 250 ZZ ZZ 210 ZZ ZZ 206 223 226 250 ZZ 20 25 32 40 20 25 32 40 20 25 32 40 186 201 204 230 190 201

ARM10/11

t y w F.R.L.

ARM10/11

t y w F.R.L.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !