ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Operating Range [mm] Auto switch model Bore size 32 40 50 63 80 100 125 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV 4 4.5 5 6 6 6 7 D-A9m/A9mV 7 7.5 8.5 9.5 9.5 10.5 12 D-F5m/F5mW D-J59/J59W D-F5BAL D-F59F/F5NTL 3.5 4 4 4.5 4.5 4.5 5 D-A5m/A6m 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-Y59m/Y69m D-Y7P(V)/Y7mW(V) D-Y7BAL 5.5 5.5 7 7.5 6.5 5.5 7 D-Z7m/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-G39/K39

Guide Cylinder Series MGG

(Assuming approximately 30% dispersion) There may be the case to change substantially depending on an ambient environment. 4 4 4.5 5 6 6.5 6.5 7 8 10 9 10 10 11 D8 10 9 10 10 11 5 5 5.5 6 7 7.5 7.5 8 11 11 13 13 14 14 14 17 35 40 40 45 45 45 45 50 16 18 -X 8 10 9 10 10 11 Individual -X 387 Series MGG Auto Switch Mounting Bracket: Part No.

HRX-OM-M005

Factory default: LOCAL 11 [Comm] key Used to display the Mode selection screen on page 5-11. 12 [Status] key Used to display the Status screen 1 on page 5-14. 13 [Alarm] key Used to display the Alarm list screen on page 5-19. 14 [Detail] key Used to display the Detail setting screen 1 on page 5-22.

VQ4000

SOL.B 23 23 () (+) Gray Red 10 stations SOL.B SOL.A 11 11 () (+) White Red SOL.A SOL.B 24 24 () (+) Black White 11 stations SOL.B SOL.A 12 12 () (+) Yellow Red SOL.A SOL.B 25 25 () (+) White None 12 stations SOL.B COM. 13 13 (+) () Orange Red COM. Note) Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common.

3 Port Air Operated Valve Series SYJA300

(80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting) 2-4.5 Manual override (Non-locking) Manual override (Non-locking) (External pilot port) (For mounting) (For solenoid valve) 12 23.5 11 A (44) (36) 21 28 29 25 27 34 18

EX120/121/122

CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR 13 PWR e 15 e t y y t Shown with cover removed.

IDX-OM-W022

Specification for Option R 11 1 Safety instructions .11 1 11 2 Specifications .11 1 11 3 Power supply connection procedure .11 2 11 4 Cautions for handling the GFCI .11 3 11 5 Electric circuit .11 3 Chapter 12 Specification for Option S 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Electric circuit . 12 1 Chapter 13 Specification for Option T 13 1 Safety instructions .

Compact and Lightweight

22.23 37.1 NPT3/8 ZH18DA-11-N03-13 39 ZH20DA-11-N04-13 23.81 44.1 NPT1/2 ZH -X267 Inch ZHP ZU Screw-in connection VQD-V H1 H3 Connection thread 1 Connection thread 3 SUP.

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

IDX-OM-W023

R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W023 i

4/5 Port Air Operated Valve Series SYJA3000

Station n L1 L2 Station 2 77 49 Station 20 419 391 3 96 68 4 115 87 5 134 106 6 153 125 7 172 144 8 191 163 9 210 182 10 229 201 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 1-5-69

SYJ300/500/700

(Pitch) P=10.5 12.5 5 M5 x 0.8 (P, R port) Approx. 300 (Lead wire length) 2-3.5 (For mounting) 48.8 [51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P=10.5 12.5 4.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 13.5 M3 x 0.5 (A port) A A 13 10 (Pitch) P=10.5 11.5 M3 x 0.5 (A port) L plug connector (L) M plug connector (M) M8 connector (

CXS

6.6 +0.2 0 + 0.2 0 10 0 0.2 CXS25 +0.019 +0.001 0.05 0.15 +0.3 0 6 M6 x 1.0 12 8.5 9.5 C0.7 6.2 2 12 11.5 7 10 35 0.1 M8 x 1.25 12 2 11 6.6 Made to Order +0.4 0 +0.019 +0.001 13 +0.2 0 0 0.2 CXS32 + 0.2 0 0.05 0.15 8 M8 x 1.25 12.5 11 13.5 C0.7 8.2 2 16 15.5 8 13 44 0.1 M10 x 1.5 16 3.5 14 9 Notes) Dimension tolerances that are not indicated in the table above are based on JIS B 0405 Permissible

CHKD/CHKG

depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

CJ5-S

13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41

CJ5-S

13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41

High Power Cylinder Series RHC

10 D-B5/B64 8 9 10 10 11 11 11 10 D-B59W 13 14 14 14 17 16 18 13 D-H7/H7NF/H7W/H7BAL 4 4.5 5 6 6.5 6.5 7 4 D-H7C 7 9 10 9.5 10.5 10.5 11 8.5 D-A3/A44 9 9 10 10 11 11 11 10 D-G39/K39 8 9 9 9 10 10 11 9 4 D-G5/K59/G5W D-K59W/G5BAL/G5NTL Since this is a guideline including hysteresis, not meant to be guaranteed.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

REC

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC (mm) 32 H1 I K MM A AL B1 B2 D F G H E Bore (mm) Stroke range MK(2) 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x 1.25 5 33.5 5 18 15.5 13 26 8 13 10 41 Up to 700 20 25 M10 x 1.25 6 37.5 5.5 22 19.5 17 32 10 13 10 45 Up to 700 26 RS Q G 32 M10 x 1.25 6 46.5 5.5 22 19.5 17 32 12 13 11 45 Up to 1000

RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5