Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

High Pressure Coolant Valve

SGH Ex. 2) 3 port valve: Switching nozzle 12 VNC VNH Port 12(P1) (Pilot air SUP port) Nozzle Port 12(P1) (Pilot air SUP port) 3 1 2 VNH VNH Tank Coolant pump VND Switching nozzles on supplying coolant liquid.

42

(Refer to pages 482 to 485.) 26.4 48.7 5(R1) 3(R2) 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Circuit diagram Po Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A (1 pc.

Mechanically Jointed Rodless Cylinder Series MY2

Coordinates and Moments z MY1B M3: Yawing MY1M MY1C MY1H MY1HT M1: Pitching y MY1W x M2: Rolling MY2C Static Moment MY2H MY3A MY3B Ceiling mounting Horizontal mounting Wall mounting MY3M M2 M1 M3 M2 M1 M2 y z X x Y X Z y X x Y m3 x g x m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z

MY2

g x Y m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

: Rolling D-X Static Moment 20Ceiling mounting Horizontal mounting Wall mounting Data M2 M1 M3 M2 M1 M2 y z X x Y X Z y X x Y m3 x g x m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

15

M2 Motor M1 Motor mounting screw Actuator Component Parts Quantity Size 25, 32 40 1 Motor flange 1 1 No.

CEx-OMQ0013

P1 No.

Title not found

P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No.

IR1000/2000/3000

IR1000-01 IR1000-01 IR1000-01 Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa 0.5 0.204 0.2 Set pressure P2 MPa Set pressure MPa Set pressure MPa 0.4 0.202 0.15 Setting point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 40 20 80 60 100 140 120 0 50 100 200 250 150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1

IR1000/2000/3000

02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Hysteresis mode (P1 P2, P3 P4) PSE (Hysteresis = 3 digits fixed) Hysteresis (Variable from 0) Hysteresis (Fixed) Hysteresis (Fixed) 1 digit is the minimum setting pressure unit. ON IS ON OFF OFF ISG P1 (P3) P2 (P4) P1 (P3) P2 (P4) ZSM Pressure Low High Vacuum Low High Pressure Low High Vacuum Low High 1 output type with failure prediction function 1. Input mode for set point value 2.

Precision Regulator Series IR1000/2000/3000

01 IR1000-01 Back pressure: 0.5 MPa Supply pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 ARJ 0.202 0.15 Set point AR425 to 935 0.3 0.200 0.1 0.2 AMR 0.198 0.05 0.1 ARM 0.196 ARP 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 Flow rate (l /min (ANR)) Relief flow rate (l /min (ANR)) Supply pressure P1

Precision Regulator

)) Relief flow rate (L/min (ANR)) IR1010-01 IR1010-01 IR1010-01 Back pressure: 0.7 MPa Supply pressure: 0.7 MPa 0.4 0.204 0.7 Set pressure P2 (MPa) Set pressure P2 (MPa) Set pressure (MPa) 0.6 0.202 0.3 0.5 Set point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 40 80 120 160 200 0 50 100 150 200 250 300 350 Flow rate (L/min (ANR)) Supply pressure P1

NCQ8

M2 bolt circle M1 W I dia.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

x 10 x 10-3 = 0.08 (Nm) Load factor 3 = M2 M2 max = 0.08 0.8 = 0.1 M2 8-14-12 12 Mechanically Jointed Rodless Cylinder Series MY3A/3B Calculation of Guide Load Factor 4.

e-Rodless Actuator

Load factor 1 = m3 / m3 max = 7.025 / 22.5 = 0.31 m3 M2: Moment Z M2 max (from 2 of graph MY2H / M2) = 19.5 (Nm) . M2 = m3 x g x Z = 7.025 x 9.8 x 37.8 x 103 = 2.60 (Nm) Load factor 2 = M2 / M2 max = 2.60 / 19.5 = 0.13 m3 M2 5 Series E-MY2 Selection Example cont. X M3: Moment M3 max (from 3 of graph MY2H / M3) = 19.5 (Nm) .

MY1

max. m1 max. m3 max. m2 max. m1 max.

Digital Pressure Switch

Set value input mode Press the "SET" button to display "P1-20" 1. The output OUT1(1) set value input mode is selected. 1: If the set value of P1 is -20) 2. OUT1(1) set value input Pressing the button increases the set value. Pressing the button decreases the set value. Press the "SET" button to save the set value and select the output OUT1(2) set value input mode.