Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.
Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.
Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring.
Table of Contents Threaded type from 6A to 50A is standardized.
Description Size Option Stainless steel Option Stainless steel Brass (C37) Brass (C37) 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 50A 15A to 25A 32A to 50A 15A to 25A 15A to 25A 32A to 50A 10A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 10A to 25A 32A to 50A 10A to 25A 32A to 50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to
Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.
Screw-in styles, 6A to 50A, are standardized.
Threaded type from 6A to 50A is standardized.
Port size Manifold pitch VVQ0-50A-C2 2 one-touch fitting VVQ0-50A-C3 3.2 one-touch fitting VVQ0-50A-C4 4 one-touch fitting 8.5 VVQ0-50A-N1 1/8" one-touch fitting VVQ0-50A-N3 5/32" one-touch fitting SS070-50A-20 2 barb fitting SS070-50A-32 3.2 barb fitting 7.5 SS070-50A-40 4 barb fitting Note) Purchasing order is available in units of 10 pieces.
assembly 6 (NBR, FKM, EPDM) Stainless steel, Brass (C37) 32A to 50A (NBR, FKM, EPDM) Stainless steel Stainless steel 8A to 50A Valve spring 7 Stainless steel 8A to 50A Tube assembly 8 (NBR, FKM, EPDM) Stainless steel, PPS 8A to 50A Armature assembly 9 Stainless steel 8A to 50A Return spring 10 8A to 50A Solenoid coil 11 SK 8A to 50A Clip 12 The materials in parentheses are seal materials
) Brass or BC6, Copper Polyacetal B H X Stainless steel Note 1)15A to 25A are brass and 32A to 50A are BC6 Note 2)The highest operating temperature of 32A to 50A is 80C.
Metric size Inch size 3 SY3000 5 SY5000 7 SY7000 9 SY9000 Rc Nil 5 32" F G One-touch fitting for 4 VVQ1000-50A-C4 VVQ1000-50A-N3 One-touch fitting for SY3000 SY3000 1 4" N VVQ1000-50A-N7 One-touch fitting for 6 VVQ1000-50A-C6 NPT One-touch fitting for 5 32" NPTF T One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-51A-N3 One-touch fitting for A, B port size SJ Except for M5 1 4" One-touch
Applicable tubing O.D. 3.2 Applicable tubing O.D. 4 Applicable tubing O.D. 6 M5 female thread Straight VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 Elbow VVQ1000-F1-LC3 VVQ1000-F1-LC4 08 8 stations Note) 2 pcs. are included in one set. 26 Series ZQ Specific Product Precautions Be sure to read before handling.
Description Size Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless
One-touch fittings Port size SY3000 SY5000 SY7000 VVQ1000-50A-C2 3.2 VVQ1000-50A-C3 4 VVQ1000-50A-C4 VVQ1000-51A-C4 6 VVQ1000-50A-C6 VVQ1000-51A-C6 VVQ2000-51A-C6 8 VVQ1000-51A-C8 VVQ2000-51A-C8 10 VVQ2000-51A-C10 12 KQ2H12-17-X224 2 Metric size Straight type A, B port VVQ1000-50A-N1 5/32" VVQ1000-50A-N3 VVQ1000-51A-N3 1/4" VVQ1000-50A-N7 VVQ1000-51A-N7 VVQ2000-51A-N7 5/16"
Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass
Description Size Standard Brass BC6 Brass BC6 NBR Option Stainless steel Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless
Applicable tube 2 VVQ0-50A-C2 Applicable tube 3.2 VVQ0-50A-C3 Applicable tube 4 VVQ0-50A-C4 Applicable tube 1/8" VVQ0-50A-N1 Applicable tube 5/32" VVQ0-50A-N3 8.5 mm pitch (One-touch fitting) PR plate Barb fitting 2 SS070-50A-20 Barb fitting 3.2 SS070-50A-32 Barb fitting 4 SS070-50A-40 * Part number is for one fitting assembly.
One-touch fitting for 4 Metric size SX3000 VVQ1000-50A-C4 VVQ1000-50A-C6 One-touch fitting for 6 One-touch fitting for 4 SX5000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" Inch size Fitting assembly SX3000 VVQ1000-50A-N3 VVQ1000-50A-N7 One-touch fitting for 1/4" One-touch fitting for 5/32" SX5000 VVQ1000-51A-N3 VVQ1000
One-touch fitting for 4 Metric size SX3000 VVQ1000-50A-C4 VVQ1000-50A-C6 One-touch fitting for 6 One-touch fitting for 4 SX5000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" Inch size Fitting assembly SX3000 VVQ1000-50A-N3 VVQ1000-50A-N7 One-touch fitting for 1/4" One-touch fitting for 5/32" SX5000 VVQ1000-51A-N3 VVQ1000