CG1

Rod End Nut Material: Rolled steel -03 32-01 -03 Applicable pin O.D. 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Bore size (mm) Part No.

90

Otherwise, it may cause switch output malfunction. 33 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Modular Type Air Filters Series AF

238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21B AC31B AC41B * Without relief valve option ** With relief valve option 2 Series AC21~41 F.R.L.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Standard stroke Refer to Standard Stroke on page 8-15-33. For 6, 10 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Large Size Vacuum Module: Series ZR

Stations Port location R16 Arrangement (Right valve station which is looked from valve side is first station.) 01 1 Left side Right side R L B 06 6 Refer to (About individual spacer.)

ZSE30A(F)/ISE30A

For vacuum/ compound pressure ZSE30A 01 N M ISA2 Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.

Guide Cylinder Series MGG

23.5 26.5 25 27.5 20 (28) 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 24 (32) 25 25 27 29.5 30 30.5 28.5 29.5 26.5 29 33 23.5 26.5 25 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 21 (29) 25 (33) 32 32 30.5 33 33.5 31.5 29.5 30.5 30 30 34 24.5 27.5 26 33.5 23 (32) 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 27 (36) 40

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Compact manifold regulator ARM5 Series

Direct mount VBA VBAT DIN rail mount AP100 Mounting position Direct mount Mounting position Symbol L R Left DIN rail mount Right L side end block R side end block L side end block R side end block 33 33 50 50 50 50 SMC SMC SMC SMC 3.5 33 3.5 10 3.5 33 10 3.5 10 12.6 10 12.6 Direct mount DIN rail mount 703 ARM5A/B Series DIN Rail VVQ1000 90 7 L dimension Enter the No. for the desired L dimension

MGG

BA 32 BA 04 BA 05 BA 06 BA 08 BA 10 BA 01 BA 02 BM1 01 BM1 02 BM1 32 BM1 04 BM1 05 BM1 06 The following stainless steel mounting screw kits (including set screws) are available for use depending on the operating environment. (Order the mounting band separately, as it is not included.)

VVX31/32/33

Series VVX31/32/33 Normally Closed (N.C.), Normally Open (N.O.), Common (C.O.)

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS TMH-01J TMH-03J TMH-07J AS2002FS AS2052FS TMH-07 TMH-09 AS3002FS TMH-10 AS4002FS TMH-13 Tubing size Applicable model Dimensions D2 through Part no.

Multi-channel Digital Sensor Monitor ( compatible)

Panel mount adapter (Model: ZS-26-B) Panel mount adapter + Front protective cover (Model: ZS-26-01) 48 conversion adapter (Model: ZS-26-D) : The panel mount adapter can be rotated by 90 degrees for mounting. : Front panel of this Controller meets IP65 (if 48 conversion adapter is used, it meets IP40).

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Air Pilot Operated

DIMENSIONS a o 5.30 (137) 4.80 (1e) 2.13 (s) 2.36 (60J 3.27 (33) 3.23 182) r.06 (21! 0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'

3 Port Solenoid Valve

Symbol Stations 01 Manifold direct mounting type 1 station 1 12 12 stations Note) N B: D-sub connector 26 pins With mounting nut No. 10-32 UNF (Inch size) Note Up to 24 solenoids possible.

ZQ-OM01301

37 29 31 25 54 44 47 40 50 38 42 40 68 61 Standard supply pressureNote 1) 0.5 65 60 57 53 48 46 81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 12.

ZQ-OM01401

B 2 4 () 3) (2)Q1 3 6 () (3)Q2 5 4 () (10) (1):U 4) ) (5) ( [kPa] 7) Assy EA NPN2 EB PNP2 0 to -100 N EC NPN1 + C EE PNP1 + D FA NPN2 (1):M FB PNP2 9) 7) (PD) -100 to 100 FC NPN1 + FE PNP1 + S 5) F C 4) ZFC 5) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01

Air Pilot Operated Series NVSA

DIMENSIONS a o 5.30 (137) 4.80 (1e) 2.13 (s) 2.36 (60J 3.27 (33) 3.23 182) r.06 (21! 0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'