MQQ

A + Stroke FZ (mm) Double clevis type/MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU Special cap bolt 10 to 40 CU CD hole H10 Shaft d9 90.5 61.5 5 84.5 4 10 10 10 to 60 107.5 70.5 8 98.5 5 12 16 10 to 60 119 79 10 109 5 14 20 10 to 50, 75, 100 126.5 84.5 10 116.5 5 14 25 10 to 50, 75, 100 148 104 10 138 6 14 28 CX +0.4 +0.2 CT B + Stroke CW CZ -0.1 -0.3 L Bore size (mm) CW CX CZ L

KJ

(inch) Connection thread UNF NPT H (Width across flats) 8.4 9.6 <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 Applicable tubing L1 M 5 18 6 18 19 16 19 37 30 38 67 60 70 85 104 10 14 11 15.5 14 11.5 14 17.5 17 20 20.5 17.5 19.5 21 24 12.7 15.5 2.3 2.5 2.5 2.8 3.5 2.3 20 29.5 20 29.5 29.5 27 29.5 38.5 31 38.5 45 41 45 42 50 16.5 25.5 16 25.5 25.5 23.5 25.5

Plate Cylinder

K H ZZ + Stroke (mm) A 22 26 30 35 35 AL 19.5 23.5 27 32 32 B 24 28 32 39 50 BS 37 45 44 54 53 BT M5 x 0.8 depth 7.5 M6 x 1 depth 12 M8 x 1.25 depth 13 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 BX 9 6.5 8 10 11 BY 7 8 9 9 12 C 54 68 86 104 124 D 12 14 16 20 20 ET M5 x 0.8 depth 11 M6 x 1 depth 11 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M12 x 1.75 depth 15 EY 26 42 54 64 72 GX 10 8.5 9 11.5 11.5

0.4

-S) SUP block plate SSQ1000-B-R Blanking plug KQ2P-04/06/08/10 Dual flow fitting SSQ2000-52AC10 N11 P.102 P.103 P.104 P.100 D side U side Silencer (For EXH port) Individual SUP spacer SSQ2000-P-4EXH block plate SSQ2000-B-R Port plug VVQZ2000-CP C8 L8 P.100 P.102 P.103 P.104 D side U side Special wiring specifications (-K) Individual EXH spacer SSQ2000-R-4Back pressure check valve (-B) SSQ2000

KR

PBT parts have conductive (104 to 107 ) and flame resistant applications. (UL-standard, V-0) Conductive NBR (104 to 107) is used for seals.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Left Right VAC. port Common EXH port 2-Rc 1/2, 3/4 (mm) L1 1 Stations L 28 1.5 40 1.5 56 1.5 4 76 1.5 88 1.5 104 1.5 5 92 1.5 104 1.5 120 1.5 6 108 2.0 120 2.0 136 2.0 7 124 2.0 136 2.0 152 2.0 8 140 2.0 152 2.0 168 2.0 9 156 2.0 168 2.0 184 2.0 10 2 44 1.5 56 1.5 72 1.5 3 60 1.5 72 1.5 88 1.5 172 2.0 184 2.0 200 2.0 L2 L3 13-4-15 15 Series ZM Manifold

ZMA

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31

MU

Series MU Basic: MUB Rod end male thread MUB25 SMU25, #1 (#1+#11) MUB32 SMU32, #1 (#1+#11) MUB40 SMU40, #1 (#1+#11) MUB50 SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104

MXQ

NN-M5 x 0.8 thread depth 10 9 9 8.5 8.5 4.2 4.2 B A 16 8 16 8 H (NN 1) x H G Section AA Section BB (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104

Thermo-dryer

Pressure Dew Point Data Air Flow Capacity A C E Inlet air temperature F (C) Correction factor Outlet air pressure dew point F (C) Correction factor 3.5 (100) 7.1 (200) 10.6 (300) 14.1 (400) 17.6 (500) 21.2 (600) 24.7 (700) 28.3 (800) Air flow capacity scfm (L/min [ANR]) Model IDH4 IDH6 68 (20) 1.36 37.4 (3) 0.50 77 (25) 1.24 41 (5) 0.67 86 (30) 1.11 44.6 (7) 0.85 95 (35) 1.00 50 (10) 1.00 104

Fieldbus System

Note 1) When the power is energized continuously, refer to Specific Product Precautions 1 in the WEB catalog or the VQC4000/5000 series catalog (CAT.ES11-104). Note 2) For details about external pilot type, refer to the WEB catalog or the VQ4000/5000 series catalog (CAT.ES11-104).

Air Cylinder Series CA2

112 63 57.5 62 57.5 104 121 112 121 D-A9 and D-A9V types cannot be mounted on 50. 402 Series CA2 Air Cylinder Minimum Auto Switch Mounting Stroke n: Number of auto switches (mm) 40 50 63 80 100 Center trunnion Number of auto switch Brackets other than center trunnion Auto switch model 2 (Different surfaces and same surface) 1 80 85 90 75 15 D-A9 (n 2) 2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16

KA

PBT parts have conductive (104 to 107 ) and flame resistant applications. (UL-standard, V-0) Conductive NBR (104 to 107) is used for seals.

Basic type / Direct mount type Series CY3B/CY3R

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 120 in vacuum environments (1.3 x 104 Pa) low leakage, and low outgassing.

Dual Rod Cylinder Series CXSJ/CXS

48 10 10 38.5 CXW Dimensions by Stroke CXT Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 80 25 20 15 100 10 30 35 40 45 50 60 70 75 80 90 40 35 30 25 20 15 100 10 45 50 60 70 75 80 90 Model CXS10 CXS15 CXSJ 30 40 50 97 92 87 82 102 107 112 117 122 132 142 147 95 90 85 80 75 70 65 100 105 115 125 130 55 45 25 35 45 99 94 89 109 114 119 124 129 139 149 154 104

/

7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154 20 44.5 84 36 25 163 50 100 70 9 37 3 x 3/4 1/4 96 43 60 163 24 60.5 100 49 34 175 63 126 92 0.5 40 3 x 1 1/4 96 43 64.5 167.5 24 60.5 104

24

63 102 74 3 20 12 16 78 15.5 13.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 9 Rc1/4 NPT1/4 G1/4 Bore size [mm] PA PB PW Q R S T U VA VB WA WB X XA XB XC XL YY YL Z 75 st or less 100 to 175 st 200, 250 st 300 st or more 75 st or less 100 to 175 st 200, 250 st 300 st or more 32 31.5 16 35.5 30 96 44 110 78 98 63 48 124 200 300 45 83 121 171 42 4 4.5 3 6 M8 x 1.25 16 21 40 38 18 39.5 30 104

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

57 59 51 93.5 100 63.5 58.5 114 65 70 58.5 104 114

PC Wiring System Series PCW

Input PCW-EC16XBR00 PCW-EC16XBR01 PCW-EC16ZBM00 PCW-EC16ZBM01 Output Note PCW-EC16YBR00 PCW-EC16YBR01 Circuit board type With cover (DIN rail mount compatible) Circuit board type With cover (DIN rail mount compatible) 2 Series PCW-EC Circuit Diagram PCW-EC16XBR00 PCW-EC16XBR01 [Applicable PLC example: OMRON Corporation C200H-ID218] 115 114 113 112 111 110 109 108 107 106 105 104 103 102

Guide Cylinder Series MGG

70 245 15 125 80 210 245 35 190 304 153 M14 x 2 depth 28 80 85 280 274 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q P Y R O 63 80 100 63 80 100 63 80 100 300mm or more 350 to 1100 308 107 54 86 108 192 30 72 14 29 Rc 1/4 119 M12 x 1.75 depth 23 16 400mm or more 350 to 1200 355 131 66 104