IDX-OM-Y002

Fig. 1 shows the possible issues due to water quality 9 Trouble due to scale is likely to occur 8 pH (25oC) Within criteria 7 Trouble due to corrosion is likely to occur 6 5 4 102 2 3 4 5 103 2 3 4 5 104 102 102102102 102 102102102 Electric conductivityS/cm Fig. 1 Relation between pH conductivity and trouble (3) Maintenance and inspection of the strainer (monthly) CAUTION If the mesh of the

Sine Rodless Cylinder Series REA/REB

RHC W Z tb T TT ta S Q QW RW PW Model PB REAL15 REAL20 REAL25 REAL32 REAL40 112 0.5 1.0 92 22.5 15 77 12.5 30 70 95 90 RZQ 117 130 16.5 25.5 88 105 40 28 120 90 130 0.5 1.0 127 25.5 22 88 16.5 50 100 130 105 157 149 1.0 18.5 28.5 0.5 102 121 60 33 160 120 D194 1.0 1.0 187 35.5 35 138 20.5 84 140 190 159 -X Individual -X 975 Series REAL Auto Switch Proper Mounting Position (Detection at

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

-11 counter bore depth 6.3 98 96 1 6.3 76 5 75 0.2 44 8 4.1 M8 x 1.25 x 23l and M8 x 1.25 (hexagon bolt) (hexagon nut) 2-M6 x 1 (through) 18 2-M5 x 0.8 Thread depth 8 30 (Z) 8-M5 x 0.8 thread depth 7.5 (same on reverse side) 4-Rc 1/8 thread depth 6.5 (piping port) (same on reverse side) 9 20 Model S ZZ Z SS 19 CXS32-10-XB19 10 122 92 CXS32-15-XB19 15 127 97 10 56 40 CXS32-20-XB19 20 132 102

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

.@ (9r.514.O2 (102) 4.43 (1125) 4.84 (1Al 5.2 (13s.5) (144) 6.08 054.5)06s) 6.91 (175.5) (186) 7.74 096.5) 8.15 (207) 8-56 \217.5) -M5,B3T crommet(c), (H) : l I i e 't rI ; ; TVpe 542,/ Side Ported L Type Plug Connector (L) M Type Plug Connector (M) NVV3J3-542-a*on--M5.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 17 Series SYJ3000 C4 N3 Type 32 Manifold: Side Ported/SS5YJ3-32Stations -M5, [ ]: AC (Lead wire length) 91.7 [96.1] Approx. 300 C4

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Stations L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 29 Series SYJ3000 Manifold Drawings Type 31 Manifold: Side Ported / SS5YJ3-31 Station M3 (mm) Grommet (G) , (H) 4-M5 0.8 (P, R port) 52.4(GZ:53.1) [

Hydraulic Filters

120 130 78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread depth 8 50 8 91 240 3.6 5.0 44 50 M8 x 1.25 Thread depth 9 62 10 103 300 5.4 7.8 62 77 M10 x 1.5 Thread depth 12 10 118 360 9.7 13.5 90 102

Title not found

record display Log entry display Display setting (Easy/Normal mode) Language setting (Japanese/English) Backlight setting LCD contrast setting Beep sound setting Max. connection axis Distance unit (mm/inch) TB setting Easy/Normal Language Backlight LCD contrast Beep Max. connection axis Password Distance unit TB setting Reconnection of axis Reconnect Reconnect Dimensions 34.5 w 102

JA/JAH/JB/JS

4400 9000 9000 14000 22000 22000 22000 55000 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102

Floating Joint

80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102

48

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 51 5 2 101 10 D-M9W 1 52 2 102 10 D-M9WV D-M9AV 1 52 2 10 D-M9A 1 52 2 102 1 Confirm that it is possible to secure the min. bending radius of 10 mm of the

Compact 5-Port Solenoid Valve

EX250 ZK2 combination manifold Flat ribbon cable Lead wire EX245 EX260 D-sub Connector, Flat Ribbon Cable [IP20/40/67] How to Order p. 21 Dimensions Type 10/Side Ported: Common Dimensions (External Pilot, Built-in Silencer/Mixed Size, Straight Port Type) p. 97 Manifold Exploded View [By Wiring] p. 101 D-sub Connector/Flat Ribbon Cable (IP40/Connector Entry Direction Adjustable) p. 102

Slider Type Ball Screw Drive/11-LEFS Series

or less (No condensation) Cleanliness class Note 5) ISO Class 4 (ISO 14644-1) LER Grease Ball screw /Linear guide portion Low particle generation grease Motor size 28 42 Motor output [W] 30 36 LEH Electric specifications Motor type Servo motor (24 VDC) LEY -X5 Encoder Incremental A/B (800 pulse/rotation)/Z phase Rated voltage [V] 24 VDC 10% 11LEFS 11LEFS Power consumption [W] Note 6) 63 102

Exhaust Cleaner Series AMC

118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

Brake mechanism added

71.5 22 60 42 20 44 22 16 21 11.5 32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102

51

102 126 130 0 E 0.05 I C Up to 300 M5 x 0.8 Corner of the cover (20 to 63) Up to 300 M6 x 1 CJ2 Up to 300 M8 x 1.25 Width across flats B1 H A AL Up to 300 M10 x 1.5 JCM Up to 300 M10 x 1.5 NA F 8 x J S + Stroke ZZ + Stroke C Up to 300 M14 x 1.5 CM2 Up to 300 M16 x 1.5 Long Male Rod End 2 (mm) Female rod end Long male rod end CM3 Bore size (mm) Standard stroke A AL H ZZ MM Depth A1 CG1 20

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 10-4-14 15 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2.

VXA31/32

Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.

Stability of suction position,

ZP3E-63UMl 18.2 16.7 28.8 ZP3E-63UMl-P 35.9 34.4 46.5 ZP3E-80UMl 26.4 24.3 41.9 ZP3E-80UMl-P 44.1 42.0 59.6 ZP3E-100UMlZP3E-125UMl56 49.5 43 73 65 58 16.3 (Plate) 16.3 (Plate) 8 8 22 22 3 3 7 7 ZP3 103 100 24 128 125 24 ZP3E ZP3E ZP2 ZP2V ZP ZPT ZPR XT661 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-100UMl 44.7 40.9 70.7 ZP3E-100UMl-P 75.8 72.0 102