Table of Contents

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 35 35 5.5 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge G36 01 Connection thread GC3 4 4 AS Nil

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

V

Orifice Size (Number) 1 2 3 4 5 6 VX21 VX22 VX23 2mm 3mm 4.5mm 6mm 8mm 10mm 01 (1/8) 02 (1/4) 02 (1/4) 02 (1/4) 03 (3/8) 03 (3/8) 04 (1/2) 04 (1/2) Courtesy of Steven Engineering, Inc. !

VM

-36 VM132-M5-36 Red Black Green Yellow VM131-01-35R VM131-01-35B VM131-01-35G VM131-01-35Y VM133-M5-35R VM133-M5-35B VM133-M5-35G VM133-M5-35Y VM151-01-35R VM151-01-35B VM151-01-35G VM151-01-35Y VM153-M5-35R VM153-M5-35B VM153-M5-35G VM153-M5-35Y Twist selector (3 position) (3 port) (5 port) (3 port) (5 port) Note) Actuator replacement is available for all styles except for roller lever,

KJ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03

Modular F.R.L. Units

3.5 29 AC25B-B 1/4, 3/8 1/8 110.2 115.1 28 30 55.1 35 27.5 0 41 35 7 14 4 41 AC30B-B 1/4, 3/8 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/4, 3/8, 1/2 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5 48 AC40B-06-B 3/4 1/8 155.2 149.1 35.8 38.4 77.6 40 33.8 3 50 40 9 18 5 48 AC50B-B 3/4, 1 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 AC55B-B 1 1/8

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

SYJ300/500/700

Type of actuation Series Port size 1 2 5 7 M5 01 Normally closed Normally open 3 port SYJ500 SYJ700 M5 x 0.8 1/8 (SYJ700 only) (For manifold type 20, 21R) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SYJ 2 5 Y M5 1 5 Body ported 5 1 SYJ 4 5 Y 01 Base mounted Body

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Power saving circuit is only available for the Z type. 5 01 SY 5 1 20 LO Z For DC: 10 CE-compliant 1 01 SY 5 1 20 LOZ For AC: 10 Nil Q CE-compliant Note) CE-compliant: For DC only.

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (

VQZ1000/2000/3000

(B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35 7 61 86.5 39 23 14 35 7 61 B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01

Speed Controller with One-touch Fitting

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-03(S)A 5/32" 8.2 AS221F-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS221F-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS221F-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-

Flow Control Equipment

Style Inch Millimeter Elbow Universal 2 3 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control Meter out Meter in 0 1 1/8" tube should be used.

Modular F.R.L. Unit

04 01 02 VHS3002 03 VHS40-06 VHS3002 03 VHS20VHS403-port valve for residual pressure release 02 03 04 06 02 03 04 06 01 02 Y3401 02 01 02 03 E30002 03 04 E30002 03 04 E500-06 Note 5) E200E400Piping adapter Note 5) 01 02 03 IS1000E-30 02 03 04 IS1000E-30 02 03 04 Y3401 02 Pressure switch with piping adapter IS1000E-20 IS1000E-40 Y4402 03 Y5403 04 Note 5) Y24Cross interface Note 1) in part

SX

How to Order Valves 01 5 MOZ N SX 5 1 20 Thread type Series A/B port size Thread piping Nil Rc 3 SX3000 5 SX5000 G F N NPT Symbol Port size M5 x 0.8 Applicable series Rated voltage 7 SX7000 NPTF T M5 SX3000 SX5000 SX7000 5 24 VDC 6 12 VDC 1 8 1 4 01 02 Type of actuation One-touch fitting (Metric size) 1 2 position single 2 2 position double Common specifications Symbol Port size Applicable

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR ZPX40H-01-B8 ZPX100H-01-B10 ZPX100H-01-B12 ZPX125H-01-B10 ZPX125H-01-B12 ZY ZPX40H-01-B10 ZPX50H-01-B8 ZPX50H-01-B10 ZPX63H-01-B10 ZPX63H-01-B12 ZPX80H-01-B10 ZPX80H-01-B12 40 50 63 80 100 125 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP Add or deduct the mass shown in the table on the left for order materials.

3 Port Air Operated Valve Series SYJA300

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5

HRX-OM-T004

Simple communication protocol function . 5-1 5.1 Precautions for communication. 5-1 5.1.1 Precautions after wiring and before communication . 5-1 5.1.2 Precautions for communicating . 5-2 5.1.3 Precautions after the completion of the communication . 5-2 5.2 Communication specification . 5-3 5.3 Setting and checking . 5-4 5.3.1 Setting and checking items . 5-4 5.3.2 Setting and checking .