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available Non.rclaling rcd Sngle f0( (N)C@K 1 2 . 1 6 24,25 3 2 , 4 A 5 0 , 6 3 Also Available: E 12,16 2A 25 32,40 Double rod iN)c0r(u'/ a 1 2 , 1 6 20,25 32,.1O CQP2 80,100 Spr ng _ _ elurn 3/extend ; coP2 1 2 , 1 6 24,25 32,44 50 Serbs End o20 to MechanicallY the cylinder at end of Large bore size Single rod 14n 160 180 200 124 Double r c d c02w 160 200 Long stroke 32 40 50,63 a0,100

LEY-OM007

c. d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

CNA

Yes 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) 24 V Grommet 12 V 2-wire Water resistant (2-color indication) With diagnostic output (2-color indication) Magnetic field resistant (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Solid state

CNA

0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

Cylinder with Lock

5!6 !0!1 !7 #6 #8 #7#5 #0#1#9 @1@0 @2 @3 @6 @8$0@4@5 @9 t !9 #3#2 #4@7!7!2 Component Parts Component Parts No. Description Material Qty.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MNB

5 @4!8 @0!7 !9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

JXCx-OMU0004

-6 S 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 8 14.2 B1 A1 17.7 2 1 14 18 10.2 6 A6 B6 5 B1 A1 B3 A3 2 1 5.7 15 16 L 11 30.7 11.4 [820m] A B-1 2 A A-1 1 L B B-2 6 LE-CP-1 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* B 15m* Shield Vcc B-4 12 C 20m* GND A-4 13 A B-5 7 * * * A A-5 6 B B-6 9 B A-6 8 3 4 + B-1 5 A-1 1 + B-3 2 A-3 2 1 14 18 5.5 6.3 B1 A1 17.7 5 6 14.2

Modular F.R.L. Unit

AC60B to W Z C D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -32- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

CL

2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Environment

2 Controller/Driver mounting Nil Without cable (Without communication plug connector)*3 1 1.5 3 3*2 5 5*2 S Straight type communication plug connector*3 T T-branch type communication plug connector*3 Nil Screw mounting D DIN rail mounting* 11LEJS * DIN rail is not included.

Integrated Controller

Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 9. When an actuator is operated with one end fixed and the other free (ends tapped or flange), a bending moment may act on the actuator due to vibration generated at the stroke end, which can damage the actuator.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6:

rep-filter-e

O-ring 5-2. Hit the circumference of V-band lightly with plastic hammer for secure mounting. 5-3. Mount T-bracket to the latch correctly. [See Fig. (c)] 5-4. Tighten the clamping nut to specified position (position from where clamping position check pin can be inserted), and insert the clamping position check pin. [See Fig. (c)] 5-5.

Industrial Filters Replacement Procedure

O-ring 5-2. Hit the circumference of V-band lightly with plastic hammer for secure mounting. 5-3. Mount T-bracket to the latch correctly. [See Fig. (c)] 5-4. Tighten the clamping nut to specified position (position from where clamping position check pin can be inserted), and insert the clamping position check pin. [See Fig. (c)] 5-5.