HEC_W-E

-4-9 4.6.5 TEMPERATURE SENSOR FINE CONTROL FUNCTION -4-9 4.6.6 SETTING VALUE MEMORY FUNCTION -4-9 4.6.7 UPPER/LOWER TEMPERATURE LIMIT ALARM FUNCTION -4-9 4.7 AUTOTUNING FUNCTION -4-10 5 NAMES AND FUNCTIONS OF COMPONENTS -5-1 5.1 HEC006 -5-1 5.2 HEC012 -5-2 5.3 OPERATION PANEL -5-3 5.4 DISPLAY -5-4 5.5 RESERVOIR CAP -5-4 6 SPECIFICATIONS -6-1 6.1 SPECIFICATION TABLE -6-1 6.2 PERFORMANCE CHART

VQ4000

(A) 4 (B) 2 (A) 4 (B) 2 VQZ 3 1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2)

V

Orifice Size (Number) 1 2 3 4 5 6 VX21 VX22 VX23 2mm 3mm 4.5mm 6mm 8mm 10mm 01 (1/8) 02 (1/4) 02 (1/4) 02 (1/4) 03 (3/8) 03 (3/8) 04 (1/2) 04 (1/2) Courtesy of Steven Engineering, Inc. !

IDX-OM-U010

ABOUT REINSTALLATION . 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1

Air Fittings & Tubing

(inch) Model Style 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 8 5 32 3 16 1 4 5 16 3 8 1 2 10-32UNF NPT NPT NPT NPT 10-32UNF NPT NPT NPT NPT 3 16 5 32 Hex. socket head male connector Triple universal male elbow 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 Different dia. union "Y" KQ2U KQ2S KQ2VT 1 4 5 16 3 8 1 2 Double branch universal male elbow 10-32UNF NPT NPT NPT NPT NPT NPT NPT

Electric Actuator / Slider Type 《 AC Servo Motor 》

Part name Qty (1) Electric Actuator / LEF Series 1 (2) Driver / LECS Series 1(in case with driver) (3) Motor cable Pre-installed (1) (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1(in case with I/O connector) LECSA(Pulse input / Positioning) (2) Driver (3) Motor cable (4) Encoder cable (5) Lock cable DC24V Host controller, etc (6) I/O Connector (1) Electric Actuator

ITV

Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Compact

5 10*2 5 10*2 *1 For 5 and 10 mm strokes, lead wires will interfere with mounting surface. *2 For 5 mm stroke, it is possible to mount an auto switch, but 2-color display may not be available. *3 When mounting an auto switch from the top with 5 or 10 mm strokes, use a D-F8 auto switch. (1) Bottom mounting (2) When mounting an auto switch (3) Tube top mounting (When mounting an auto

ARM10/11

A R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

ARM10/11

A R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

A

3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/

Title not found

E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Title not found

4 18 Nol a\railable with pre$ure range 1 I "-40" inplt ouFut combination not avaibble Slandard soecilication CE marked 1. 17. 18. 19 For man old mountino 2 , 3 . 1 5 CE marked DeviceNet comoatible 4, 5. 6.8. 14 CE marked 16 preset tvpe 4. 5. 7, 10 DeviceNet compatible 5, 6.8, 14 1 6 preset type 5,7.10. 16 0.1s hiqh speed response Digital input type 5. 6. 9. 11 Reverse output 12,13 CE marked

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) Made to Order Made to Order (For details, refer to page 411.)

Lightweight and Compact

m/Height 1 m)5 dB (A) 73 75 Alarm code list stickers 2 pcs.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Rated voltage A, B port size DC specifications AC specifications (50/60Hz) M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 (10SYJ7000 only) One-touch fitting for 4 One-touch fitting for 6 5 6 1 2 3 4 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] One-touch fitting for 5/32" One-touch fitting for 1/4 Body ported 5 Y M5 5 1 23 SYJ 10 43 5 2 5 Y SYJ 10 Base mounted Thread type Series Electrical

Compact Cylinder with Air Cushion

If the piston impacts the stroke end with excessive kinetic energy (values in Table 1 or more), an excessive impact will occur and this may cause damage to equipment. Table 1.

IDX-OM-M051

4 Checks and inspection 4 1 Daily check . 4 1 4 2 Parts requiring regular maintenance . 4 1 4 2 1 Maintenance of the water-cooled condenser . 4 1 4 2 2 Maintenance of auto drain . 4 5 4 2 3 Maintenance of timer type solenoid valve with auto drain (Option V) . 4 8 4 2 4 Maintenance of operating time accumulator . 4 8 Chapter 5 Troubleshooting 5 1 Troubleshooting . 5 1 5 2 Reset of protective