Clean Regulator

Flow Rate Characteristics Construction XT13-394-06, 10 Max. operating flow rate It is recommended to be used within the max. operating flow rate (negative) range. ( ) Conditions/ Inlet pressure: 0.5 MPa, Fluid: Water 0.5 82 SMC Outlet pressure MPa 0.4 K P C U O S H L 0.3 0.2 82 0.1 0.0 10 20 30 40 50 60 70 0 Flow rate L/min (ANR) w INA-48-1-06, 10 142 (Max. 146) Conditions/ Inlet pressure

Pin Cylinders Series CJP2/CJP

M3 AS1001F-23 3.2 AS1211F-M5-23 AS1311F-M5-23 M5 AS1211F-M3-04 AS1311F-M3-04 M3 AS1001F-04 4 AS1211F-M5-04 AS1311F-M5-04 M5 AS1001F-06 6 AS1211F-M5-06 AS1311F-M5-06 M5 For details about one-touch fittings, miniature fittings and speed controllers (applicable tubing O.D. 2 only), refer to the catalog ES50-25 (B edition or later).

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

): VQZ1 2 wGwC3, C4, C6, M5 0 1 300 (Lead wire length) 103.5 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 Mounting holes 0.8 SY 4 8.6 10 SMC SMC 2 Cover diameter 1.6 Cross section 0.34mm2 R2 25.8 2-C3, C4, C6, M5 SYJ 60.3 C3: One-touch fittings for 3.2 Manual override SX C4: One-touch fittings for 4 C6: One-touch fittings for 6 VK M5: M5 thread VZ 9.5 (C3,C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

Applicable Auto Switch Model

(RedGreenRed) CDJ2, CDVJ3, 5 10, 16 CDQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 CDlXW Plate mounted(P), 10, 16, 20, 25, 32, Housing mounted(B), 16, 20, 25, 32 CDY1S, CY1L 6, 10, 15, 20, 25, 32, 40 RSDQ 20, 25, 32, 40, 50 MDU 25, 32, 40, 50, 63 CE1 12, 20, 32, 40, 50, 63 MK, MK2 20, 25, 32, 40, 50, 63 CXT 32, 40 Specifications PLC: Programmable Logic Controller D-F7lW/D-J79W

HRX-OM-Q026

/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note 3) For the inch-size One-touch fittings, refer to page 4-14-40.

VZ3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB 4 x 1 m AS1301F-04 AN120-M5 SZ3120-M5 3-3-19 Series VZ3000 Construction 2 position single 2 position double 3 position closed center 3 position closed center/exhaust center/pressure center

VCL

81.5 1/4, 3/8 11 15 36.5 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 86 30 50 1/2 15 13.5 36.5 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 17 41 11 M5 36 22.5 23 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 M5 36 25 23 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 17.5 17 41 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 332 Direct Operated 2 Port Solenoid

Ozone Resistant

120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

R ZZM 06 06 R Multi-ejecter Common SUP port location Port and silencer location Series ZM Manifold Nil Both sides Number of stations R Right side L Left side B Both sides Right side Left side R L 01 1 station Right or left to the VAC port Right or left to the VAC port 05 5 stations Common EXH port size 10 10 stations (Max.) 04 06 1 2 3 4 Thread type S Silencer for ZZM (ZZM-SA) Nil Rc NPTF

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Mass: 0.8 [kg] (1.76 [lb]) Mounting screw Screw size: M5 Tightening torque: 3.24 [N m] (28.7 [lb in]) Terminal signal layout For 3-phase or 1-phase 200 to 230VAC For 1-phase 100 to 120VAC PE terminal Approx. 40 L1 L1 6 L2 L2 L3 CNP1 CNP1 Screw size: M4 Tightening torque: N N 2-M5 screw 1.2 [N m] (10.6 [lb in]) P1 P1 P2 P2 P P C C CNP2 CNP2 D D L11 L11 L21 L21 U U CNP3 CNP3 V V W W Mounting

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

8 13.2 23.9 33 (33.3) 14.2 25 (26) AS22l1FSl-U02-10 10 15.9 26.9 36 (36.3) 15.6 26 (27) AS32l1FSl-U02-06 6 1/4 17 (17.5) 13 AQ 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 ASV 24.5 28.5 9.3 19.2 47 (48) AS32l1FSl-U02-08 8 13.2 22.7 33 14.2 AS32l1FSl-U02-10 10 15.9 26.7 37 35.7 15.6 48 (49) AS32l1FSl-U02-12 12 18.5 29.7 40 34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7

VCA

48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

VCA

48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers

Mist Separator Series AFM20/30/40

40 J (5) Drain guide 1/4 AFM30/40 Float type auto-drain (N.C.) (4) Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right Left AFM20 to 40 N (1) Drain cock with barb fitting: 6 x 4 nylon tubing Float type auto-drain (N.O.) (4) W F (2) AFM30/40 D AFM30/40 Note 1) Drain guide is NPT 1/4 (applicable to AFM30 and 40), and the exhaust port for auto-drain comes

Micro Mist Separator Series AFD20/30/40

Applicable model AFD20 to 40 Nylon bowl Symbol Nil B Body size Body size Port size Metal bowl with level gauge Symbol 20 30 40 AV 20 30 40 (3) Thread type With bowl guard 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 (5) (4) C AFD20 to 40 Nil N (1) Drain guide 1/4 Rc AU Flow direction: Right Left NPT (4) D AFD30/40 Drain cock with barb fitting: 6 x 4 nylon tubing Name plate and caution plate for bowl

Soft Start-up Valve AV2000/3000/4000/5000 1

31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6