High Vacuum Angle Valve 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.
SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 < >: AC type and TV approved type Dimensions (mm) Equation L1=16n+118.5 L2=16n+131 n: Station (Max. 20) L n 20 438.5 451 475 485.5 19 422.5 435 462.5 473 18 406.5 419 450 460.5 17 390.5 403 425 435.5 16 374.5 387 412.5 423 15 358.5 371 400 410.5 14 342.5 355 375 385.5 13 326.5 339 362.5 373 12 310.5 323 350 360.5 11 294.5 307 337.5
45 45 60 60 75 85 89 93 105 105 129 129 157 12 16 16 20 20 25 25 92 96 109 109 134 134 163 62 80 80 100 100 120 142 7 9 9 11 11 13.5 13.5 MB-S04 MB-S06 MB-S10 MB-S12 Double clevis pivot bracket B DX DB Z + Stroke DD B 90 B 4-DT A DH DS DA DL DU DU 4-DR DE DC DO DO Without Air Cushion (mm) Bore size (mm) Part no.
18 32 5 Up to 600 20 75 1/4 40 120.5 65 46.5 104.5 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 32 18 9 Up to 600 90 1/4 20 45 134.5 75 56.5 119.5 17.5 23 68 35 27 14 20 14 12 80 19 13 37 22 11.5 Up to 750 102 1/4 30 45 169 95 72 150 33 22 81 40 32 22 25 20 18 Data 100 19 16 26 37 17 Up to 750 30 116 1/4 55 189 114 89 170 37.5 25 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE
18 32 5 Up to 600 75 1/4 20 40 120.5 46.5 104.5 65 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 18 32 9 Up to 600 90 1/4 20 45 134.5 56.5 119.5 75 17.5 23 68 35 27 14 20 14 12 80 19 13 22 37 11.5 Up to 750 30 102 1/4 45 169 72 150 95 22 33 81 40 32 22 25 20 18 Data 100 19 16 26 37 17 Up to 750 30 116 1/4 55 189 114 89 170 25 37.5 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE
Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52
Head Flange (mm) Bore size (mm) Standard stroke A AL D J B B1 C H1 H ZZ E F FX FD FT GA GB I KA MM NA P S 20 25 32 40 50 63 80 100 12 12.5 11 10.5 15 15 17 20 85 92 94 101 130 130 162 166 14.5 17.5 17.5 23.5 29 29 35.5 35.5 5 6 6 8 11 11 13 16 14 16.5 20 26 32 38 50 60 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 8 10 12
20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc1/8 Rc1/8 Rc1/4 Rc1/4 7 13 9 14 32 40 50 63 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 66 44 14 14 M8 X 1.25 M8 X 1.25 18 10 72 44 14 12 M10 X 1.5 M10 X 1.5 21.5 11 M10 77 49 16.5 16.5 M10 X 1.5 M10 X 1.5 28 13.5 WA R S T U VA VB WB Bore (mm)
77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.
Standard stroke range (mm) Long stroke range (mm) Bore (mm) TC GB GA F E AL TB C D B1 ZZ A H H1 I J K KA MM NA P S TA WA WB W WH 30 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 14 11 11 20 25 32 40 50 63 80 100 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 10 (12) 35 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 M4 X 0.7 Depth 7 5 6 8 10 14 18 18
(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8
EA EE G J JA K R WF Y LF P ZZ TN XT SN d mm 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.10 11/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3
Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 1/4 25, 50, 75, 100, 125 150, 200, 250, 300 Non-lube Double acting single rod 1/8 1/4 174 Low speed cylinder 10CM2X/11-CM2X Specifications
no.) 20 A1 B1 Produced upon receipt of order (Robotic cable only) (13.5) A6 B6 1 2 Connector D (14.7) 15 16 Cable type Connector A (30.7) L (11) (10) Robotic cable (Flexible cable) Nil Connector A terminal no.
12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82
(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.
52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 8 9 9 13 13 13 15 15 18 24 24 24 42 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5
52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 8 9 9 13 13 13 15 15 18 24 24 24 42 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5
6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20
WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Bore size S 102.5 101.5 45 45 20 20 NB FB 17.5 19 NN Z 16 10 15 15 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 M5 x 0.8 M4 x 0.7 D GC B F H MM GB GA C A 28 28 NA WW WA WB FC 5.5 5.5 FT 2.3 2.3 FX 33 33 FY 20 20 FZ 42 42 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 29.5 29.5 4 5 M12 x 1.0 6 B Air Cylinder CJ2 10-/1121-/22Head Side Flange Style (G) / CJ2G, CJ2G