Base Mounted Wiring: Plug-in, Insert Plug w/Lead Wire, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: P and EA,EB: Common, Port A,B: Bottom, Port Size: 1/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 9 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 12 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 4 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 11 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 4 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8)

ZP

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

ZP

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

2

Model Section Type Round type Standard G27-10-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type Note 2) Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only

Table of Contents

" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17

ZP

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Micro Mechanical Valve Series VM1000

F.O.F. 6 N 2.5mm[2mm] 4.8mm[2.5mm] 2.3mm[0.5mm] Roller lever VM1000-4N-01 VM1000-4NU-01 VM1100-4N-01 VM1100-4NU-01 Symbol/2 port 3 port (A) 2 (A) 2 12 12 10 10 1 (P) 1 (P) 3 (R) 0.5 MPa supply Applicable tubing VM1100-4N-01 VM1000-4N-01 T0425 TU0425, T0403, TS0425 Side ported 3 port 2 port VM1100-4NU-01 VM1000-4NU-01 T.T. O.T. P.T.