Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Description Stroke range Bore size Stroke range Bore size Stroke range 32 to 200 101 to 299 32 to 160 101 to 299 Part no.: CQ2A50-166DC CQ2A50-175DC with 9 mm width spacer. B dimension is 230.5 mm. Part no.: CQ2B50-166DC-XB10 Makes 166 stroke tube. B dimension is 221.5 mm.

VCA

A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

VCA

103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold

ITV

D side 1 2 3 PWR ERR PWR ERR PWR ERR 1 3 DIN rail 1 3 ITV0030-3MS ITV0030-3ML 14-8-3 4 Series ITV0 Specifications ITV001 ITV003 ITV005 ITV009 Model Min. supply pressure Set pressure +0.1 MPa Set pressure 1 kPa Max. supply pressure 1.0 MPa 0.2 MPa 101 kPa Regulating pressure range 0.001 to 0.1 MPa 0.001 to 0.9 MPa 0.001 to 0.5 MPa 1 to 100 kPa 2 /min(ANR) (Supply pressure: 101 kPa) 3.5 /min

PSE550/300

Applicable pressure sensor PSE531 PSE541 PSE561 PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) pressure range 5%R.D.

HRS100/150

Model Heat radiation [kW] Facility water specifications HRS100-WApprox. 19 Refer to "Facility water system" in the specifications on page 101. HRS150-WApprox. 28 Tap Water (as Circulating Fluid) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Make-up water 2.

XL-OMY0001

XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal

Clean Gas Filter

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

A 63 ZPT63HJ25-01-A18 F 121.5 63 ZPT63HJ50-01-A18 65 14.5 156.5 B 65 C 14.5 D 26 26 26 28 28 28 E 66 101 137 68 103 139 Y 3.5 3.5 3.5 4.5 4.5 4.5 194.5 63 ZPT63HJ75-01-A18 65 14.5 192.5 40 ZPT40HJ75-01-A18 42 134 189.5 50 ZPT50HJ25-01-A18 52 63 118.5 80 ZPT80HJ25-01-A18 83 16.5 123.5 50 ZPT50HJ50-01-A18 52 98 153.5 80 ZPT80HJ50-01-A18 83 16.5 158.5 80 ZPT80HJ75-01-A18 83 16.5 50 ZPT50HJ75

PSxx-OME0003CN

IP40 050 -1070 () 3585% RH() AC1000 V50/60Hz1 5 M(DC500 V) 2%F.S.(25 ) 3 2.7 3 m / 2 0.15 mm 0.8 mm CERoHS M5 R06 R07 M50.8 6 1/4 inch ONBR SUS304 PBT (3 m) 41 g 38 g 7 g 3.8 g -12No.PS-OME0003CN-F [V] A B C 0-101kPa 0 -101 kPa 10.1 kPa -101101kPa -100 kPa 101 kPa 0101kPa 0 101 kPa -10.1 kPa -01MPa 0 1 MPa -0.1 MPa -13No.PS-OME0003CN-F PSE53-M5 PSE53R06 R07 (D) PSE53-

100

Model GZ33-K1K-01-X56 GZ33-P1C-N01-X55 Pressure unit kPa inHg/psi dual scale Pressure range 100 to 100 kPa 30 inHg to 14 psi Connection thread R1/8 NPT1/8 Accuracy Vacuum 3% F.S., Positive pressure 5% F.S.

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

ZP

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

•

he Weat 01 s prvduCI duB lO !he use 01 !

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 Options Sensor cable (3m) + Connector (1 pc.)

EXxx-OMW0014CN

1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01 1 Valve 18, 19 diagnostics 01 2 Valve 20, 21 diagnostics 01 3 Valve 22, 23 diagnostics 01 4 Valve 24, 25

ZSE2/ISE2

ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

Model Selection 1

Manifold Direct operated Air operated VXA31/32 17-3-101 C.O. Single unit 3 port 17-3-105 VVXA31/32 C.O. Manifold Pilot operated Diaphragm opeation with zero differential pressure 17-3-61 VXZ22/23 N.C./N.O. Single unit Pilot operated (High pressure control) 17-3-69 VXH22 N.C.