VXA21/22 Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.
Plug-in tyP N0n Pad No , NPIFllvw$m+{Il NWF$2m0P.0rT-2 %NPTF IvwSmP-02T-1 nwFs2000P@T-2 Other Opirons Available: (See NVFS Se.ies Catalog) . Air Shutofi Valve spacer . Single-cheok Drop Guard spacer . Double-check "Pertect" spacer .
Plug-in tyP N0n Pad No , NPIFllvw$m+{Il NWF$2m0P.0rT-2 %NPTF IvwSmP-02T-1 nwFs2000P@T-2 Other Opirons Available: (See NVFS Se.ies Catalog) . Air Shutofi Valve spacer . Single-cheok Drop Guard spacer . Double-check "Pertect" spacer .
PLC No. 1-051 PLC 15ms 30ms 2(P.40) No.
i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD
i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD
36 40 58 22 20 82 65 102 11-/22-MXP16-20 28 70 119 50 42 56 70 29 30 108 75 128 11-/22-MXP16-30 104 Precision air slide table MXP/MXPJ6 1122Made to Order Specific Product Precautions Anti-corrosive specifications for guide unit -X42 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure
Response time 5 (EA) 1 (P) 3 (EB) Response time ms at 0.5MPa (72.5psi) Type of actuation 3 position pressure center SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 2 position single 11 or less 25 or less 28 or less 40 or less 2 position double 10 or less 17 or less 26 or less 40 or less 3 position 18 or less 29 or less 32 or less 82 or less 5 (EA) 1 (P) 3 (EB) 4 position dual 3 port valve 15 or
40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10 0 0 0 0 400 800 1200 1600 2000 0 100 200 300 400 500 0 200 400 600 800 1000 Flow [L/min] Flow [L/min] Flow [L/min] IN Side Straight Piping Length and Accuracy (Reference Value) The piping on the IN side must have a straight section of piping with a
62.5 71 XSA3-3P(N) 40 40 88 40 16.5 24.5 3/8 29 32 77.5 35 64 52.5 71.5 28 77.5 69.5 69.5 57.5 104.5 71.5 73.5 6 XSA Series Special Option/Replacement Parts Special Option Special Electrical Entry Direction 2 1 S 5 G 1 XSA 2 Enter standard product number.
Fig. 3-2 T 1 ms 40 ms UT1UT20V UT1 UT2UT1UT2LED UT1/UT2 10.2 GND OFF OFF LED AcknowledgementPROFIsafe 16.3 2 20 D 17 No.EX##-OMY0006CN SI UT1 UT2 OFF1 UT1 UT2 UT1 UT2 1(IN0-IN3)UT1 2(IN4-IN7)UT2 UT1/UT2 UT1 UT2 3.3.5 UT1/UT2 3.3.7. SI 7.2 SIL/SIL CL/Cat. /PL Table 3-1 SIL/SILCL/Cat.
10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1 DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1
Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard
suppressor With light/surge voltage suppressor 19.5 14.5 n-M5 x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 2 43 54 3 59 70 4 75 86 5 91 102 6 107 118 7 123 134
N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB KM11-04-08-6 6 65 40 61.5 47 73 55 86 22 30 32 44 44 62 8 4 10.6 10 18 29.5 19.5 27 12 16 18.5 6 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 6 13 10 19.5 31.5 21.5 31 13.5 17 21 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 12 8 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 KM12/Dimensions Inch H (Hex.) Thead NPT T Applicable tube O.D.
OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -35No.PF-OMP0001CN-F [F 2] OUT2 OUT2 (28 )(29 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] OUT2 [---] [oU2][] [2ot][] 37 38 39 40 -36No.PF-OMP0001CN-F a.
. 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23 62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102
Rc 1/4 108 Head end cylinder port Rc 1/4 Dustproof cover Rod end cylinder port (Manual lock release) D (Stroke) Rc 1/8 Unlocking port IN OUT (125) (102) C B A Rc 1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN111 FN112 610 (730) (844) 20 Rc 1 860 (1000) (1134) 40 8 Series FN1 Options Reservoir Dust removal filter 108 32 0 315 45 P.C.D.220 70 70 90 270 (80) 50
Specifications / technical information / supplementary information . 102 8.1 Terminology . 102 -2No.EX##-OMV0017-D 1. Introduction 1.1 About the I/O Configurator (NFC version) With the I/O Configurator (NFC version), the status of a wireless system can be checked and all parameters of a wireless unit can be set from a PC using an NFC reader / writer.