C95

48 55 68 80 100 120 32 36 45 50 63 75 16 20 25 25 30 35 10 10 12 12 16 16 130 145 155 170 190 205 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71

CJ2

Auto switch Mountable (Band mounting style) Mounting Bottom mounting style 6-3-70 71 71 Series CJ2RK Air Cylinder: Direct Mount, Non-rotating Rod Type Double Acting, Single Rod Construction (Not able to disassemble.)

MB

6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com FX FZ FT MB Center trunnion: (T) MB1 Z + 1/2 Stroke Center Trunnion Cushion valve Port Stroke range Bore (mm) CA2 TDe8 Z TDe8 TT TX TY TZ 32 40 50 63 80 100 17 22 22 28 34 40 to 1000 25 160 160 210 157 125 50 to 500 to 500 to 600 to 600 to 800 to 800 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71

PF-OMN0009_C

1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2 3/4 98 71

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

High performance type Step Motor Controller (Servo/24 VDC)

Controller and its peripheral devices /Specific product precautions 69 14.1 Design and selection 69 14.2 Handling 69 14.3 Installation 70 14.4 Wiring 70 14.5 Power supply 71 14.6 Ground 71 14.7 Maintenance and inspection 71 15. Troubleshooting 72 3 No.JXC-OMY0002-A JXC5H/6H Controller 1.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Controller and its peripheral devices /Specific product precautions . 71 15.1 Design and selection . 71 15.2 Handling . 71 15.3 Installation . 72 15.4 Wiring . 73 15.5 Power supply . 73 15.6 Ground . 73 15.7 Maintenance and inspection . 74 15.8. Specific Precautions for Battery-Less Absolute 3 - Encoder . 74 16. Troubleshooting . 77 4 - JXC51/61 Controller 1.

Digital Flow Switch (Remote type sensor unit)

14 50 250 PF3W521-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0010-J Dimensions PF3W504/520/540/511 Basic type Symbol Piping port size A AA B DD E F G H J K L N P Model PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 depth 14 PF3W520 3/8, 1/2 78 54 30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 PF3W540 1/2, 3/4 98 71

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

end stroke only) MQQ M RHC Scraper Can be mounted on standard products MK(2) Theoretical Output RS Q G Unit: N Operating pressure MPa Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) RS H A 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 RZQ 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 MI W S 26 17 IN 60 51 43 34 85 94 63 OUT 220 188 157 126 314 20 10 CEP1 71

Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

3 Port Air Operated Valve Series SYJA300 1

3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

VZ100/300/500

DXT170-71-1 With indicator light (AC) Type M Cover Crimping of lead wires and sockets Peel 3.2 to 3.7 mm of the tip of lead wire, enter the core wires neatly into a socket and crimp it with a special crimp tool. Be careful so that the cover of lead wire does not enter into the crimping area. (For special crimping tool, please contact SMC.)

VFR

DXT170-71-1 Plug-in type (VFR300/400) Non plug-in type (VFR310/410) Non plug-in type (VFR340/440) Cover Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor Attaching and Detaching Lead Wires with Sockets Peel 3.2 to 3.7 mm of the tip of lead wire, enter the core wires neatly into a socket and crimp it with a special crimp tool.

VQZ1000/2000/3000

DXT170-71-1 Refer to page 2-7-61 for part no. of plug connector assembly. Connection and Electrical Circuit Caution Both DCs have no polarity, and then connect each lead wire with the power source side.

2/3 Port Valve for Various

$ ' $ # ' ,*# ./ 01 ( *# ./ 2 01 $ ./ 23 ##4 #1 /47 .81 < :# /4; .71 + + 47 ./1 + /4 ./31 /;3 /;> /3 /3 17-3-4 Series VX / VXZ22/23 VXH22 VXF21/22 VX31/32/33 . !"! !#! !"! !"! !"! 0 !#! 0"!#! !"! 0 !#! 0" #!

Plate Cylinder

Rc1/8 Rc1/4 Rc1/4 G1/8 G1/8 G1/4 G1/4 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 The position of the 4 flats of the piston rod is 3 in relation to the cylinder side surface. 5 Plate Cylinder: Double Acting, Single Rod Series MU Dimensions with Mounting Bracket Foot (mm) LY LH 29 37 46 57 67 LS 79 90 96 116 123 LT 3.2 4.5 4.5 5 6 LX 11 12 15 18 22 LY 56 71

Digital Flow Switch (Integrated display type)

92 PF3W704--T 115 74 PF3W721-F12-T 119 76 PF3W721-F14-T 123 78 -86No.PF-OMM0005-N PF3W704/720/740 (With flow adjustment valve) Basic type and flow adjustment valve Symbol A AA B D F K L N P Q Q: Number of rotations Model PF3W704S 104 50 63.6 (Max. 68.6) 70.2 34 58.5 18 13.6 2.7 depth 10 19 6 turns PF3W720S 112 54 63.6 (Max. 68.6) 74.2 34 62.5 18 13.6 2.7 depth 10 19 6 turns PF3W740S 142 71

Escapements Series MIW/MIS

surface) RSQ Stroke adjuster (Rear end stroke only) RSG RS Scraper Can be mounted on standard products Theoretical Output MI Unit: N Operating pressure MPa Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 26 17 IN 60 51 43 34 85 94 63 OUT 220 188 157 126 314 20 10 71

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Axial foot (L) [mm] XA + Stroke Bore size [mm] E1 TR AH AO AT AB SA XA C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Made to Order Related Products 32 48 32 32 10 4.5 7 142 144 40 55 36 36 11 4.5 10 161 163 50 68 45 45 12 5.5 10 170 175 63 80 50 50 12 5.5 10 185 190 80 100 63 63 14 6.5 12 210 215 100 120 75 71 16 6.5 14.5

KR

(71) 100 (100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.