MHS

-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D MHS2 -32D MHS2 -40D MHS2 -50D MHS2 -63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 21 37 63 111 177 280 502 1 N 23 42

Cylinder with Turntable Series MGT

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Mounting Mounting Warning Caution 1. Do not scratch or dent the sliding parts of the piston rod and guide rods. Damage to seals may cause air leaks or faulty operation. 2.

VCA

2-P Port size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42

VCA

G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

0.4

one-touch fitting C6: 6 one-touch fitting C8: 8 one-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 one-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153

High-precision Digital Pressure Switch

Setting 19 3-Step Setting Mode 20 Simple Setting Mode 22 Function Selection Mode 24 Function selection mode 24 Default setting 24 F 0 Display units and switch output specifications function 26 F 1 Setting of OUT1 27 F 2 Setting of OUT2 30 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 42

Modular Type Lubricators Series AL

H F G JIS Symbol (A) Lockable at the time of exhaust E 2 C D 1 3 (P) (R) Effective area mm2 (Cv) Model Port Size EXH 1/8 1/4 3/8 IN, OUT 1/4 3/8 1/2 IN to OUT 14 (0.76) 31 (1.68) 55 (2.98) OUT to EXH 16 (0.87) 29 (1.57) 42 (2.28) VHS20 VHS30 VHS40 A Paint color (Standard) Handle: Red Body: Platinum silver Use an air filter on the IN side for operating protection.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

MY1

socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring) Y Bore size (mm) 16 20 J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153

CXWM/CXWL

Note 2) For 25 stroke, 2 magnets for auto switches are installed in the housing. 8-26-43 42 Series CXWL 25 Basic Type: CXWL25Stroke/25 to 200 2 x 2-5.2 through 2 x 2-9.5 counterbore depth 5 (6H7 hole pitch) 6H7 depth 4 +0.012 0 4-M6 x 1.0 thread depth 12 4 positions for set screws for fixing shock absorbers (M5) 2 x 2-Rc 1/8 Plug (R 1/8) 6H7 depth 8 +0.012 0 Courtesy of Steven Engineering

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

XL-OMY0002

60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45 80 160 200 300 800 L/S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46 200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42

XLDV Series

8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66 53.5 15.0 55 41 48.5 XLDV50 70 183 79 57.5 17.5 75 52 55.0 XLDV63 88 217 100 72.2 20.0 87 95 70 66.5 XLDV80 90 256 117 82.6 26.5 114 110 83 75.0 XLDV100 108 321 154 95.2 38.0 134 130 102 93.5 XLDV160 138 335 200 101.2 40.0 190 180 153

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

When power is supplied, alarm for AbEnc ID ALM /code: 1-153 is generated. 1) Combination of the controller Combination at the time of shipment and actuator is not correct. shall be kept. 2) The product is used for the This is normal. Turn ON RESET to reset the alarm. first time, or when the actuator or controller is replaced. Input the reset signal.

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

CRQ2

BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153

Table of Contents

Specific Product Precautions. 126 127 127 128 129 130 131 131 131 134 135 136 138 139 139 139 143 146 148 150 151 152 152 153 154 155 156

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Selection Caution Mounting Caution Operate loads within the range of the operating limits. Select a model taking into consideration the allowable horizontal loads, rotational torque and eccentric loads that will apply.



L Dimension Equation L1 = 31n + 29, L2 = 31n + 14 n: Station n 8 7 6 5 4 3 2 Symbol L1 L2 277 246 215 184 153 122 91 262 231 200 169 138 107 76 14-6-13 14 Series VEX130 3 Precautions Related Products: Silencer (Series AN) Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reduction capability of over 30 dB.