Table of Contents

Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Torque (Nm) Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 0.09 42 2.87 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 234 27 Courtesy of Steven Engineering, Inc.-230

SYJ300/500/700

VQ VKF VQZ L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (WO): SYJ54-WO-01 VZ VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7

Table of Contents

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

L plug connector (L): 10-SYJ54M-L-01 M plug connector (M): 10-SYJ54M-M-01 DIN terminal (D): 10-SYJ54M-D-01 M8 connector (WO): 10-SYJ54M-WO-01 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 MAX.10 74.6 74.9 49.6[56.6] 63.6 34.2 M8 x 1 48.5 54.1 36.6 60.7[67.7] Approx. 300 (Lead wire length) Pg7 6 6 6 6 65.5[67.7] 75.5 55.7[57.9] 64.6 57.2 50.7 42 42 42 42 34.7 17 9 17

Table of Contents

AZ-T-VCS Valve model no. on page 17-2-42/46 Seal part no. Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

LX

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

LX

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 11 Courtesy of Steven Engineering

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

Air Slide Table

85 174.5 8 4 147 159 MXQ8B-100Z 36 14 66 36 100 42 110 199.5 10 5 172 184 MXQ 8BL-mZ Symmetric type 2 x M3 x 0.5 thread depth 5 13 20 27 40 42 21.7 Pilot port side 23 * Dimensions other than those listed above are the same as those for the standard type. 59 Air Slide Table/Low Thrust with High Rigidity Type MXQB Series Dimensions: MXQ 8B [Adjuster Option] MXQ 8B-m With adjuster option (8

25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

1

188 42 170 42 42 Series MXH Series MGC/MLGC Series MGG Table material: Aluminum Front plate material: Steel Front plate material: Steel NCA 2-D A B 2-C 2-E DMounting side Connecting port side Mounting side Connecting port side -X 20Data D LX B C D A 4-C2 Dimensional Range Not Possible to Machine Additionally E A B C D Bore size (mm) 20 25 32 40 50 63 80 100 Dimensional Range Not Possible

Made to Order

36.5 34 33.5 29 29 32.5 45.5 43 48 42.5 40 31.5 35 39.5 37 42 36.5 34 36.5 32 32.5 35.5 46.5 44 49 43.5 41 34.5 38.5 40.5 38 43 37.5 35 41 36.5 37 40 51.5 49 54 48.5 46 39 43 43.5 41 46 40.5 38 46.5 42 42 45.5 58.5 56 61 55.5 53 44.5 48 51.5 49 54 48.5 46 53.5 49 49 52.5 58.5 56 61 55.5 53 51.5 55 51.5 49 54 48.5 46 62.5 58 58 61.5 68.5 66 71 65.5 63 60.5 64 61.5 59 64 58.5 56 73 68.5 69

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7/D-J79 D-F7W D-J79W D-F79F D-F7NT Auto switch model D-P3DW D-A9V D-M9V D-M9WV D-M9AV D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-J79C D-A79W D-P4DW U 34.5 38 44 47.5 57.5 67.5 U 31.5 35 41 47.5 57.5 67.5 U 44 50 56.5 66.5 76.5 U 27 30.5 36.5 40 50 60 U 29 32.5 38.5 42 52 62 U 32.5 36 42 48.5 58.5 68.5 U 38.5 42 48 54.5 64.5 74.5 U 35 38.5 44.5

SX

Double solenoid SX3240-5MO Single solenoid Common connector assembly SX100-42-4D SX3140-5MO Common connector assembly SX100-42-4S Common connector assembly (With common lead wire) SX100-40-4S SS5X3-41-04-C6 1 set SX3140-5MO 2 set SX3240-5MO 2 set SX100-40-4S 1 set (Single solenoid with lead wire for common) SX100-42-4S 1 set (Single solenoid) SX100-42-4D 2 set (Double solenoid, 3 position

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-41 VV5Z5-42 Before using, refer to page 3-3-8.

5

23 26 228 251 100 22+0.084 0 300.1 0.3 42 23 26 228 251 188 Smooth Cylinder MBY Series Standard/With Mounting Bracket * Refer to Basic (B) for other dimensions.

KQ2

fitting size 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 20 18.5 KQ2R08-12 42 4.6 12 12 KQ2R10-12 18.5 44.5 41.5 32.8 33 23 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.

4/5 Port Air Operated Valve Series SYJA3000

Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold gasket DXT199-21-11 Refer to page 1-5-80 prior to handling.

LVQ

42 84 48 96 75 136.8 32 60 88 10 7 20 50.8 38.5 45 LVQ60 available only as V. 521 Series LVQ Dimensions With flow rate adjustment, High back pressure spec. with flow rate adjustment N.C. valve Dimensions (mm) (Max.

ZP

135 186 B 42 C 100 A B C D E F G H Y 63 65 14.5 26 41 63 103 154 3.5 Model ZPX63HJ25-B01-A18 ZPX63HJ50-B01-A18 ZPX63HJ75-B01-A18 ZPX80HJ25-B01-A18 ZPX80HJ50-B01-A18 ZPX80HJ75-B01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-B01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-B01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43