Rotary Table: High Precision Type

35 How to change the auto switch detecting position 35 Auto switch operating angle and hysteresis angle 36 Operating range and hysteresis auto switch 37 Internal construction and component parts 37 Internal construction of rotary table with auto switch 39 MDSUA1/3 auto switch mounting 40 Maintenance and Inspection 40 Maintenance unit How to replace table unit / How to replace rotary unit 41

1.63

Description Bore size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Side porting type -X867 MGF OUT 314 63 94 126 157 188 220 251 283 314 Made to Order (For details, refer to pages 1247 to 1440.) 20 10 IN 236 47 71 94 118 141 165 188 212 236 MGZ OUT 491 98 147 196 245 295 344 393 442 491 25 10 Symbol Description IN 412 82 124 165 206 247 289 330 371 412 MGT With knock pin holes -XC56 OUT 804 161

ML2B

For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17

Transfer

60 Applicable bore size (mm) Shock absorber model Maximum energy absorption (J) Stroke absorption (mm) Maximum collision speed (mm/s) Maximum operating frequency (cycle/min) Extended Retracted Spring force (N) Operating temperature range (C) 710 Stroke Reading Rodless Cylinder with Brake ML2B Series Theoretical Output (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.2 98 161

MU

Output (N) 25 32 40 50 63 Operating pressure (MPa) Bore size (mm) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Basic style 0.18 0.28 0.42 0.80 1.20 0.7 0.6 0.5 0.4 0.3 0.2 Axial foot style 0.25 0.42 0.63 1.14 1.83 344 295 246 196 147 98 491 OUT 25 12 Basic weight Flange style/Rod side, 265 227 189 151 113 76 378 IN 0.28 0.42 0.65 1.26 2.03 Head side 563 482 402 322 241 161

MLGP

Spring washer (nominal size 3) 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 40, 50, 63, 80, 100 BMG1-040 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161 804 OUT 16 32 603 543 482 422 362 302 241 181 121 603 IN 1257 1131 1006 880 754 629 503 377 251 1257 OUT 16 40 1056

MLGP

Spring washer (nominal size 3) 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 40, 50, 63, 80, 100 BMG1-040 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161 804 OUT 16 32 603 543 482 422 362 302 241 181 121 603 IN 1257 1131 1006 880 754 629 503 377 251 1257 OUT 16 40 1056

MRQ

Replace moment of inertia1B around the rod (A) with 1A, a +b 2 2 1=m 12 1A =( ) b a 2 1B 1.5-3 Datae Theoretical Output bLinear Motion Part Theoretical Output Linear motion Part theoretical output table Unit: N Operating pressure (MPa) Piston area (mm 2) Operating direction Rod diameter (mm) Size 0.3 0.4 0.5 0.6 0.7 0. 15 0.2 241 322 402 482 563 121 804 OUT 161 32 12.2 675 202 270 337 405

Low Friction Cylinders Series MQ

38 SR3 4 9 22 3 16 3.2 M3 x 0.5 6 -X 6 18 3.2 M3 x 0.5 6 41 38 SR5 6 9 24 3 10 20 3.5 M4 x 0.7 6.5 7 4 46.5 41.5 SR8 10 29 5.5 38 5 Individual -X 16 25.5 5.4 M6 x 1.0 9 10 7 49 44 SR12 16 36 5.5 47 5 20 28 5.4 M6 x 1.0 9 10 7 52.5 47.5 SR15 20(19) 40 5.5 52 5 Note) ( ): Rod end dimensions 1193 Series MQP Specific Product Precautions Be sure to read before handling.

Rotary Table/Vane Style Series MSU

Adjustment: Max.10.2 2 x M5 x 0.8 1.5 7 3 x 4H9 long groove depth 3 +0.030 0 B port A port 0.5 ( A , B , C ) 4 x M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 158 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Basic style Width across flats 3.5 23 9 4.5 4.5 MXH MXU 6.5 3.5 2 x M3 x 0.5 (Port size) MXS 2 x M3 x 0.5 MXQ (Port size for axial piping type MTS8-P) 0.2 2 x M3 x 0.5, effective length 5 9 5 MXF +0.035 +0.025 4 MXW 22 12 16 MXJ M2.5 x 0.45 12 41 + Stroke MXP 53 + Stroke 9 15 MXY MTS 0.2 9 4 x M3 x 0.5, effective length 5 10 15 Rod end male thread Width across flats 3.5 +0.035 +0.025 4 M3

70pvpump

Circuit example/Built-in solenoid valve Ball valve Regulator FLUID OUT AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 17-5-166 27 Series PB Process Pump: Built-in Solenoid Valve Type/ Air Operated Type (External Switching Type) Dimensions PB1000 FLUID OUT Rc 1/8 VC 11 OUT VDW 11 VQ 84 72 VX2 Mount with this surface (out port side) on top 7.5 41 60 45 VX Courtesy

2/3 Port Valve

Use 2 port valve VNH33. 4.2-33 VNH Dimensions Dimensions (mm) Model Main port 2 port 3 port Pilot port H I A C B D E F G 3 8 3 8 Rc(PT) 1 8 2-Rc(PT) 2-Rc 3-Rc(PT) 3-Rc 50 60 79 90 77 95.5 111 119 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1

Title not found

Rod Dia 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 120 PSI 1-1/2 None 1.77 106 124 142 159 177 195 230 5/8 1.46 88 102 117 132 146 161 190 1 0.99 59 69 79 89 98 108 128 2 None 3.14 188 220 251 283 314 345 377 5/8 2.83 170 198 227 255 283 312 340 1 2.35 141 165 188 212 235 259 283 2-1/2 None 4.91 295 344 393 442 491 540 589 5/8 4.60 276 322 368 414 460 506 552 1 4.12 247 289 330 371 412 454

MU

(mm) Size direction Fluid Air 0.2 0.3 0.4 0.5 0.6 0.7 Proof pressure 1.05MPa OUT 491 98 147 196 246 295 344 25 12 Max. operating pressure 0.7MPa IN 378 76 113 151 189 227 265 Min. operating pressure 0.05MPa OUT 804 161 241 322 402 482 563 32 14 Ambient and fluid temperature 10 to 60C IN 650 130 195 260 325 390 455 Lubrication Not required (Non-lube) OUT 1257 251 377 503 629 754 880 40 16

Title not found

Rod Dia 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 120 PSI 1-1/2 None 1.77 106 124 142 159 177 195 230 5/8 1.46 88 102 117 132 146 161 190 1 0.99 59 69 79 89 98 108 128 2 None 3.14 188 220 251 283 314 345 377 5/8 2.83 170 198 227 255 283 312 340 1 2.35 141 165 188 212 235 259 283 2-1/2 None 4.91 295 344 393 442 491 540 589 5/8 4.60 276 322 368 414 460 506 552 1 4.12 247 289 330 371 412 454

Hygienic Design Cylinder Series HY

DBore size X Y LD LH LC LQ LT LX LY LZ ZA ZB 107 115.5 133.5 134 ZC 129 139.5 165.5 166 ZB 122 130.5 148.5 149 ZC 144 154.5 180.5 181 HY-L032SUS HY-L040SUS HY-L050SUS HY-L063SUS 32 40 50 63 M6 x 1 x 18L M6 x 1 x 18L M8 x 1.25 x 20L M8 x 1.25 x 20L 100 120 210 260 24 28 32 32 11 10 11 11 7 9 9 9 32 36 45 50 142 161 170 185 109 121.5 140.5 141 4 4 5 5 32 36 45 50 57 65 80 92 49.5 57.5 69 84

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specification Note 4) Value for the low power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-

LJ1H

230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface thickness 5) CNP1 CNP2 130 120 CN1 CN3 CN2 6 5 5.5 LECSB 40 6 Mounting hole 6 135 (Bearing surface thickness 4) 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161

Compact Guide Cylinder

Height (Compared with the current product (MGP-Z)) Overall length (Compared with the current product (MGP-Z)) Current product MGP-Z [mm] Current product CXS [mm] Current product MGP-Z [mm] Current product CXS [mm] JMGP [mm] JMGP [mm] Bore size [mm] Bore size Stroke [mm] 12 26 17 17*1 12-10 stroke 52 43 82*1 16 30 18 20*2 16-10 stroke 56 43 89*2 20 36 22 25 25 42 26 30 32 48 32 38 40 54 41