Compact Cylinder

26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42% weight reduction 32 Weight 106 g 36 20 40% volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150 g 40 25 40% volume reduction 30 + Stroke 33.5 37.5 + Stroke 40 Weight 135 g 33% weight reduction 43.5 1 32 Weight 202 g 49.5 35% volume reduction 32.5 + Stroke 41

Slider Type Ball Screw Drive/11-LEFS Series

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

Digital Flow Switch (Manifold type)

Width across flats of attachment With across flats of the main port 3/8 20.9 mm 1 41 mm 1/2 23.9 mm 3/4 29.9 mm After hand tightening, tighten the hexagon head bolt 2 to 3 rotations by using a spanner. Refer to the table below for the tightening torque.

MU

22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 11 M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 15 M12 x 1.75 depth 18 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 H 14 14 15 18 21 ZZ 91 98 105 127 131

Table of Contents

Exploded View: VQ1000-Plug Lead Unit (F, P, T, S kit) . 115 115 116 121 122 122 123 126 126 127 130 131 132 136 140 144 148 152 156 160 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 164 167 168 172 174 176 177 179 184 184 185 186 186 187 188 188 190 194 198 202

ARM10/11

A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

asilltr

t 0s6 (%6') lele 2% 075 (%\ l ela 2/a 106 (1I6',1 131 216 -, Bore Stroke t 150 \1y2\ 13/4 2% 20o (2\ 11%6 2%a 106 (1'16') lia l=0.52 150 {1%") 114 l=0.5 250l2%\ 23la 3146 300 (3) 2% 3% 400 (4'l 2sla 3?/16 NOTE 1) Female threacl length ("1") is shoner for iie above listed strokes.

Title not found

0.300 0.420 0.517 0.595 0.660 0.725 0.780 0.880 1.00 1/8 1.2 1.68 2.06 2.37 2.64 2.89 3.12 3.53 4.04 1/4 4.8 6.7 8.3 9.5 10.6 11.6 12.4 14.0 16.2 3/8 10.8 15.2 18.5 21.4 23.8 26.0 28.0 31.8 36.4 1/2 19.1 27.0 33.0 38.5 42.3 46.3 50.0 56.5 64.6 5/8 30.0 42.2 51.7 59.5 66.2 72.6 78.0 88.0 101 3/4 43.0 60.6 74.0 85.3 95.2 104 112 127 145 7/8 58.8 82.6 101 116 130 142 153 173 198 1 76.5 108 131

MU

59 67 81 84 L 52.5 59 67 81 84 LD LU 13 14 17 23 23 ZZ 116 127 138 171 175 LA 35 41 46 62 62 ZZ Model MUl25 MUl32 MUl40 MUl50 MUl63 lLC 18 22 26 32 32 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 CD-MU02 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 Dimensions L, Z, and ZZ are reference dimensions for installing a single knuckle joint, which may be used as a guide.

Title not found

0.300 0.420 0.517 0.595 0.660 0.725 0.780 0.880 1.00 1/8 1.2 1.68 2.06 2.37 2.64 2.89 3.12 3.53 4.04 1/4 4.8 6.7 8.3 9.5 10.6 11.6 12.4 14.0 16.2 3/8 10.8 15.2 18.5 21.4 23.8 26.0 28.0 31.8 36.4 1/2 19.1 27.0 33.0 38.5 42.3 46.3 50.0 56.5 64.6 5/8 30.0 42.2 51.7 59.5 66.2 72.6 78.0 88.0 101 3/4 43.0 60.6 74.0 85.3 95.2 104 112 127 145 7/8 58.8 82.6 101 116 130 142 153 173 198 1 76.5 108 131

Vacuum

manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41

17

A0.2 D (mm) MGPM MGPL/A Hexagon socket head cap screw 50 56 72 82 98 106 130 142 180 210 Bore size (mm) A (mm) B (mm) C (mm) M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 10 12 14 18 22 22 27 27 33 39 41 46 54 64 78 86 110 124 156 188 18 22 24 30 34 40 46 58 54 62 5.

Air Cylinder NCQ7 Series Compact Cylinder

t 0s6 (%6') lele 2% 075 (%\ l ela 2/a 106 (1I6',1 131 216 -, Bore Stroke t 150 \1y2\ 13/4 2% 20o (2\ 11%6 2%a 106 (1'16') lia l=0.52 150 {1%") 114 l=0.5 250l2%\ 23la 3146 300 (3) 2% 3% 400 (4'l 2sla 3?/16 NOTE 1) Female threacl length ("1") is shoner for iie above listed strokes.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specification Note 4) Value for the low power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

LVD20 LVD30 LVD40 LVD50 LVC20 LVC30 LVC40 LVC50 A 54.5 79.5 82 105.5 54.5 79 96 129 B 114 67 83 93 79 106 131 154 Integral tubing (construction) 493 Guide ring Eliminates lateral motion of the poppet which reduces internal leakage. Piston damper Absorbs piston momentum to minimize impact-induced particle generation.

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.

ARM10/11

A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

MU

22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 11 M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 15 M12 x 1.75 depth 18 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 H 14 14 15 18 21 ZZ 91 98 105 127 131

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 12 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)