CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CV/MVGQ

0.033 RS Q G 45 75 60 4 40 7 19.5 13 22 12 76.5 Up to 300 17 32 37 6 8 26 0 0.033 50 82 36 66 5 52 7 21 16 24 14 84.5 Up to 300 22 41 47.3 8 10 32 0 0.039 RS H A ZZ Z S QY Q NN NA N MM K I Bore size (mm) 20 25 32 40 RZQ 116 107 62 14 19.8 M20 x 1.5 24 15 M8 x 1.25 5 28 120 111 62 14 22 M26 x 1.5 30 15 M10 x 1.25 5.5 33.5 MI W S 122 113 64 16 25.8 M26 x 1.5 34.5 15 M10 x 1.25 5.5 37.5 154 143

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 thread depth 4.5 W Z ZZ SS S Model CXSW6-10 CXSW6-20 CXSW6-30 CXSW6-40 CXSW6-50 (Piping port) (Opposite side: Same) 66 103 46 40 10 (Z) (13) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50

CXWM/CXWL

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com for fixing adjusting bolt (M6) 2-Rc 1/8 Cylinder port 8H7 +0.015 0 2-M6 x 1.0 thread depth 7 2 x 2-MB x 1.25 thread depth 15 2 x 2-8H7 depth 12 +0.015 0 4-6.9 through 4-11 counterbore depth 7 (mm) ZZ Z G SS S Q P L F Model CXWM32-25 CXWM32-50 163 123 27.5 96 27 143

Cylinder with Lock

M8 x 1.25 63 35 32 78 75 39 52.5 59.5 90 1/4 56.5 20 45 14 73 16.5 53 20.5 9 58 11 M8 x 1.25 80 40 37 98 95 49 64.5 71.5 113 1/4 72 25 45 20 92 19 65 26 11.5 72 13 M10 x 1.5 100 40 37 116 114 58 73.5 80.5 131 1/4 89 30 55 20 109 19 74 26 17 72 16 M10 x 1.5 With Rubber Bumper [mm] [mm] Bore size K KA KB KC MA MB MC MM N N1 P S TT TX TY V W ZZ 32 6 10 17 3 16 4 16 M10 x 1.25 27 27 1/8 143

CXS

x 0.5 (Through) 2-M2.5 x 0.45 x 6 (Hexagon socket head cap screw) 2-M3 x 0.5 x 12.5 (Hexagon head bolt) 2-M3 x 0.5 (Hexagon nut) 6 7 4-M3 x 0.5 (Through) 4-M3 x 0.5 with depth 4.5 (Opposite side: Same) W (10) 10 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 with depth 4.5 (Piping port) (Opposite side: Same) Model W Z ZZ SS S 10 66 103 40 46 CXSW6-10 (Z) (13) (13) 20 76 123 50 56 CXSW6-20 30 86 143

Clamp Cylinder with Lock Series CLK1

0.4 (58) 0.5 (72) 0.6 (86) 32 40 50 63 241 (54) 322 (72) 402 (90) 482 (108) OUT (804) 1.29 D-C73, C76, C80 D-C73C, C80C Reed switch 12 32 207 (46) 276 (62) 346 (78) 415 (93) IN (691) 1.11 BMA2-032 BMA2-050 BMA2-063 BMA2-040 D-H7A1, H7A2, H7B, H7C D-H7NW, H7PW, H7BW D-H7LF, H7NF 378 (85) 504 (113) 630 (142) 756 (170) OUT (1260) 2.02 Solid state switch 16 40 318 (71) 424 (95) 530 (119) 636 (143

Single Axis Electric Actuator Series LJ1H

Page 101 Clean room specification . 104 Dust seal specification . 110 TSUBAKI CABLEVEYOR specification . 122 Construction . 134 Mounting . 140 Non-standard Motor Mounting Dimensions . 143 Deflection Data . 145 LJ1H/High Rigidity Guide .

MXW Series Long Stroke Slide Table

Q Q Q MXW Series Q Q Q Product Features .pages 134-135 Q Q MXW Series Q How to Order .page 136 Q Specifications.pages 137-139 Q Operation Guide .pages 140-141 Q Table Deflection .page 142 Q Construction/ Parts List, Seal Kits .page 143 Q Dimensional Drawings.pages 144-153 Q Auto Switch Specifications and Mounting .pages 154-155 Q Please see safety instructions

Guide Cylinder Series MGG

mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q P Y R O 63 80 100 63 80 100 63 80 100 300mm or more 350 to 1100 308 107 54 86 108 192 30 72 14 29 Rc 1/4 119 M12 x 1.75 depth 23 16 400mm or more 350 to 1200 355 131 66 104 128 224 35 89 19 40 Rc 3/8 145 M12 x 1.75 depth 28 23 500mm or more 350 to 1300 410 131 66 128 143

MXQ

10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143

ZPT/ZPX

EPR ZPT40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPT50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPT63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPT80HBNJ25-B01-A18 ZPT 80HBNJ50-B01-A18 75-B01-A18 ZPT100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 268 289 535 575 620 659 719 759 804 843 127 147 168 143 163 201 208 228 249 231 Misc. 40 50 63 80 100 125 0 +1 +10 1 0 +1 +19 2 0 +2 +37 3 0 +2 +61 6 +4 +

Thomas Oil-less Diaphragm Vacuum Pump Flow Rate: 56 LPM , 56 LPM, Max Vacuum: 28.9 in HgV / -980 mbar , 28.9 in HgV / -980 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 7.6 in / 193 mm Width: 5.08 in / 129 mm Height: 5.63 in / 143 mm , Length: 7.6 in / 193 mm, Width: 5.08 in / 129 mm, Height: 5.63 in / 143 mm,

Thomas Oil-less Diaphragm Vacuum Pump Flow Rate: 72 LPM , 72 LPM, Max Vacuum: 27.4 in HgV / -929 mbar , 27.4 in HgV / -929 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 7.6 in / 193 mm Width: 5.08 in / 129 mm Height: 5.63 in / 143 mm , Length: 7.6 in / 193 mm, Width: 5.08 in / 129 mm, Height: 5.63 in / 143 mm,

Stations: 2 Stations, Piping: P Common, R Common, A Side, Thread: Rc (PT), Option: Mounting Adaptor, CE/UKCA Compliant: -

Stations: 11 Stations, Piping: P Common, R Common, A Side, Thread: Rc (PT), Option: Mounting Adaptor, CE/UKCA Compliant: -

Stations: 5 Stations, Piping: P Common, R Common, A Side, Thread: Rc (PT), Option: Mounting Adaptor, CE/UKCA Compliant: -

Stations: 6 Stations, Piping: P Common, R Common, A Side, Thread: Rc (PT), Option: Mounting Adaptor, CE/UKCA Compliant: -

Stations: 7 Stations, Piping: P Common, R Individual, A Side, Thread: Rc (PT), Option: Mounting Adaptor, CE/UKCA Compliant: -

Stations: 8 Stations, Piping: P Common, R Common, A Side, Thread: Rc (PT), Option: Mounting Adaptor, CE/UKCA Compliant: -