51

Head Flange (mm) Bore size (mm) Standard stroke A AL D J B B1 C H1 H ZZ E F FX FD FT GA GB I KA MM NA P S 20 25 32 40 50 63 80 100 12 12.5 11 10.5 15 15 17 20 85 92 94 101 130 130 162 166 14.5 17.5 17.5 23.5 29 29 35.5 35.5 5 6 6 8 11 11 13 16 14 16.5 20 26 32 38 50 60 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 8 10 12

JIS Standard Hydraulic Cylinder

10.5 21 Proof pressure (MPa) Related Products Symbol Specifications -XA -XC14 Change of rod end shape Minimum operating pressure (MPa) Head: 0.15 Rod: 0.2 Change of trunnion bracket mounting position DWithout auto switch: 10 to 80C With auto switch: 10 to 60C Ambient and fluid temperature Piston speed 8 to 300 mm/s Cushion Cushion seal type Rod Sizes Stroke length tolerance to 100 st , 101

Rotary Cylinder Series MRQ Size: 32, 40 1

Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

CLQ

9 9 80 92 108 38 8 33.5 60 Data 101 46 75, 100 107.5 43.5 10 to 50 80 53.5 117.5 11 11 99 116 134 43 10 43.5 77 117.5 53.5 75, 100 126 53 10 to 50 Rod end nut L1 100 63 136 11 11 117 136 154 50 12 43.5 94 136 63 75, 100 Double Clevis Style Double clevis style: CLQD/CDLQD Stroke range Without auto switch With auto switch Bore size (mm) CT 4-N Cap bolt CD CT A CL A B CL B 126 36 112 10 to

Series AP3500

Vespel is a registered trademark of DuPont. 101 Air operated type (For low pressure) Diaphragm Valve for Ultra High Purity Series AP4500 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed or normally open LOTO option available as an option (AP4540) Indicator switch available as an option (AP4550) How to Order (Inlet) (Outlet) AP

4-channel Flow Monitor ( compatible)

[March 2023] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved No.PF-OMA1011-A

CLQ

46 9 9 80 92 108 38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100

Electric Actuator with Integrated Guide

In the unlikely event that malfunction is caused by the ground, it may be disconnected. 97 101 Photo Micro Sensor and Proximity Switches Precautions Be sure to read before handling. Refer to the main pages for precautions on respective series. Operating Environment Incorrect Usage Warning Caution 1. Never use in an atmosphere of explosive gases.

MRQ

Symbol Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

Compact Cylinder with Lock Series CLQ

46 9 9 80 92 108 38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100

One-touch Fittings Series KQ2

(Example, KQ2H 06-02-X12) Specification Dimension How to Order Stainless steel One-touch fittings 2 For use in highiy corrosive atmospheres where brass is not acceptable. Specification Dimension Same as KQ2 series. Same as KQ2 series.

AC Servo Motor Driver (CC-Link Type)

. ## Description 00 Set to the test operation mode. 01 Station number 1 02 Station number 2 03 Station number 3 : : : : 62 Station number 62 63 Station number 63 64 Station number 64 Note 2. $$$ indicates numbers from 0 to 255, and the number indicates the executing point table number. 3. indicates the warning/alarm No. 4. Requires set up software(MR Configurator2TM) . -11- 3.

PSxx-OMR0001CN

5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4 1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

PSxx-OMT0001CN

5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

Stations: 2 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 4 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 5 Stations, Piping: P Common, R Individual, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 7 Stations, Piping: P Common, R Individual, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 8 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 12 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -