VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

Vacuum Pad: Ball Joint Type

10-0-A10 (With buffer/One-touch fitting) ZPT F 10-01-A14 (With buffer/Female thread) Applicable tubing O.D.

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): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

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(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

HRX-OM-S004

(2/4) Alarm operations Alarm threshold and others A.RUN P.RUN A.STP Code Alarm name OFF Display Default setting Settable range Display Set temperature 1.0oC (33.8 o F) (-)5 1.034.0 oC (33.893.2 o F) Monitoring method Circulating fluid drop 0 03 AL04 discharge temp.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(PF2A7 0) 2% F .S. (PF2A7 1) 2% F.S. Monitor unit 1% F.S. 1 digit (Fluid: Dry air) 1% F .S. 1% F .S. (Fluid: Dry air) 1% F.S. Monitor unit 0.1% F.S. Monitor unit Monitor unit 0.1% F.S. 0.1% F.S. 0.1% F.S. (Fluid: Dry air) (Fluid: Dry air) Analog output: 5% F.S. Analog output: 0.3% F.S.

Direct Solenoid

D ENSIONS A B c D E F 2.66 (67.5) 2.42 (61.5) (14) 0.28 17', 0.16 (4) 1.42 (36) ,ltrF-l rD C Solsnoid DIN "Electricrl Connector" 'AC" Vottage only ml--l l "*---l-l I .f;T.

HRX-OM-Q026

G1, Symbol N: NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side water temp. range oC 5 to 35 Automatic water fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Metal Stainless steel, Copper (Brazing filler metal for the heat

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

Series AS-FM/AS-M/ASD-FM

Symbol JIS symbol 1 Series AS-FM How to Order AS 2 2 1 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

F

... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

IR1000/2000/3000

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

PFxx-OMJ0005CN

Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES

AS-FG/ASD-FG

Note) Use Series AS-F with -X214 for the throttle valve.

HRX-OM-W032

G1, Symbol N: NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side water temp. range oC 5 to 35 Automatic water fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact part material Metal Stainless steel, Copper (Brazing

SMC Electronic Switch Series Variations

ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

Series SYJA300 3 Port Air Operated Valve

Note) Model number for base mounted style without sub-plate is SYJA5 2 and SYJA7 2. 1 2 1 2 Body ported Series SYJA500 With Bracket Model No. of air operated valve SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not assembled.

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached