Flow Control Equipment

How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

CLA

lor 9~re lock- tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10

PSxx-OMM0006CN

ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1

VQZ1000/2000/3000

01 F 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) None Nil DIN rail mounting style (For manifold) IN side port size OUT side port size D 01 02 C6 C8 One-touch fitting for 6 One-touch fitting for 8 Rc 1/8 Rc 1/4 One-touch fitting for 6 One-touch fitting for 8 01 02 C6 C8 Rc 1/8 Rc 1/4 F With bracket N Name plate Note) When two or more symbols are specified

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Electrical entry G H L LN LO M MN MO Grommet (Lead wire: 300mm) Grommet (Lead wire: 600mm) With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector L plug connector M plug connector 2.2-36 Series SYJ700 Body Ported Grommet (G), (H): SYJ7l2-l G H ll-01 With bracket: SYJ7l2-l G H ll-01-F Manual override 11 23.5 Depress and turn to operate and lock

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASD230F-M5-04D-X12 744 ASDF-D Series Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting How to Order ASD 3 3 0 F 01 06 S D Made to Order Lubricant: Vaseline X12 AS-F Ex.)

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

E-P HYREG

Description 0 1 0 1 VY110 0 1 VY120 0 1 VY130 0 1 0 1 0 1 VY140 VY170 0 1 VY190 0 1 VY1D00 VY150 VY1B0 VY1A0 ITV B F G N AN120-M5 VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) IC VEXA-18-3A VEX1-18-2A G27-10-01 AN120-M5 G36-10-01 AN101-01 AN120-M5 G46-10-01 AN210-02 G27-10-R1-X207 Pressure gauge ITVH Pilot EXH port silencer ITVX Sub-plate and Base Gasket

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

F

F E R E N T D I A.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

4/5 Port Air Operated Valve Series SYJA3000 1

Note 3) 5 port base mounted without sub-plate: SYJA540 5-2-23 6 Series SYJA5000 Dimesions: Body Ported Dimensions: Base Mounted 2 position single: SYJA5140-01 2 position single: SYJA5120-M5(-F) 41.5 (For mounting) 2-4.3 M5 x 0.8 (Pilot port) 1 Manual override 15 5 11 A B A B 1 M5 x 0.8 (Pilot port) 10 24 A B 19 R P 2-2.6 2-3.5 4 37.5 (For mounting) (For manifold mounting) (Bracket) 47 42

4/5 Port Air Operated Valve SYJA3000 Series

With bracket F Nil Without bracket *The bracket is not mounted.

Modular Type Regulator Series AR

1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10

HRX-OM-W002

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.