Precision Regulator Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 Set point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000
Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 03, Type: 1 (Common Exhaust), Thread: 00N (NPT)
Series: 5 (VFA5000), Manifold: 20 (P.R Port Size 3/8), Stations: 03, Type: 1 (Common Exhaust), Thread: 00N (NPT)
Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 03, Type: 1 (Common Exhaust), Thread: 00N (NPT)
Stations: 03, P, R Port Thread: 00N (NPT)
Type: 21 (Common SUP/Individual EXH), Stations: 03, Bracket: None, Thread: 00N (NPT)
Type: 20 (Common SUP/Common EXH), Stations: 03, Bracket: None, Thread: 00N (NPT)
Type: 20 (Common SUP/Common EXH), Stations: 03, Bracket: F (w/Bracket, Not Mounted), Thread: 00N (NPT)
Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type
Range Setting Enabled Section 2 Maker setting Do not change.
Do not unpack the device until installing it. Do not drop or knock the controller. Keep the flow ports and cable glands plugged until installing.
Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 2000 D-SMC.L.A. P-80 (N)
Do not use in an atmosphere where corrosive gases, chemicals, sea water, water, or water vapor is present. Do not use in cases where there is direct contact with any of the above. 2. Do not use in an explosive environment. 3. Do not use in a place subject to heavy vibration and/or impact. 4. The valve should not be exposed to prolonged sunlight. Use a protective cover if necessary. 5.
Do not use in an atmosphere where corrosive gases, chemicals, sea water, water, or water vapor is present. Do not use in cases where there is direct contact with any of the above. 2. Do not use in an explosive environment. 3. Do not use in a place subject to heavy vibration and/or impact. 4. The valve should not be exposed to prolonged sunlight. Use a protective cover if necessary. 5.
;'16" 03/4" 'ol/2~ AsP330F'!U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?
Do not operate in environments with corrosive gases, chemicals, sea water, fresh water or water vapor, or where there will be contact with the same. 2. In locations exposed to direct sunlight, block the sunlight. 3. Do not operate in locations where vibration or impact occurs. 4. Do not operate in a location near a heat source where radiated heat will be received. Pressure gauge 1.
Do not disassemble or modify the main unit. Operating Environment Warning Caution 1. Do not use in the following environments, as this can cause damage and reduced performance. 1. Do not step on or place heavy objects on the unit. 1. Locations with an atmosphere of corrosive gases, organic solvents or chemical solutions, and locations where there may be contact with the same. 2.
Do not use in atmospheres contacting corrosive gases, chemicals, sea water, water, water steam, or where there is direct contact with any of these. 2. Do not use in explosive atmosphere. 3. Do not use in locations subject to vibration or impact. 4. Do not expose to direct sunlight for an extended period of time. Protective cover should be used to shield. 5.