C95

When in a locked condition, do not apply a load accompanied by an impact shock, strong vibration or turning force, etc.

LEKF-OMZ0035

Do not disassemble, modify, or repair the controller and its peripheral devices. 4. Do not put anything conductive or flammable inside of the controller. It may cause a fire. 5. Do not conduct an insulation resistance test or withstand voltage test on this product. 6. Ensure sufficient space for maintenance activities.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Do not use in direct sunlight. 5. When there are heat sources in the surrounding area, block off them. 6. Do not subject it to excessive vibration and/or impact. Please consult with SMC regarding use in this kind of environment, as this can cause damage and malfunction.

CXWM/CXWL

For dimensions of the 25 stroke, refer to page 8-26-14.

Rotary Table

Do not allow short-circuit of loads. If the power is turned ON with a load in a short circuit condition, the switch will be instantly damaged because of excess current flow into the switch. PNP output type auto switches do not have built-in short circuit protection circuits. Carefully handle as the auto switch may be damage. -14- 7. Avoid incorrect wiring.

OMU0023

Do not use non-defined or unavailable addresses or flags. Otherwise, the Card Motor may make an unexpected movement, leading to damage.

IN20267

Do not use in an area where a magnetic field is generated. Malfunction may result. Do not let foreign matter, such as wire debris, get inside the product. Failure or malfunction may result. Do not use the product in an environment that is exposed to cyclic temperature patterns.

10

6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

HRX-OM-R028

Pump breaker trip2 15 Pump inverter error 1: These alarms do not occur on the product of the cooling method -W. 2: These alarms do not occur on the product of the power specification '-20'.

ITV

G PPA ITV203 0.005 to 0.5 MPa 14-8-14 1/4, 3/8 AL ITV205 0.005 to 0.9 MPa Series ITV3000 ITV301 0.005 to 0.1 MPa Controls air pressure steplessly in proportion to an electric signal. ITV303 1/4, 3/8, 1/2 0.005 to 0.5 MPa 14-8-14 ITV305 0.005 to 0.9 MPa Series ITV209 Controls vacuum pressure steplessly in proportion to an electric signal.

RSH/RS1H

The lever is released to allow rotations in 90 increments. 20 32, 50, 63, 80 Guide rod Set screw (M3) 10-9-14 14 Series RSH/RS1H/RSA Specific Product Precautions 2 Be sure to read before handling. Selection (RSA) Selection (RSH, RS1H) Caution 1. Do not allow pallets to strike the lever when it is standing up.

RSH/RS1H

The lever is released to allow rotations in 90 increments. 20 32, 50, 63, 80 Guide rod Set screw (M3) 10-9-14 14 Series RSH/RS1H/RSA Specific Product Precautions 2 Be sure to read before handling. Selection (RSA) Selection (RSH, RS1H) Caution 1. Do not allow pallets to strike the lever when it is standing up.

MGP-OM0242Q

Excessive lateral load Check horizontal mounting of model selection with catalogue. 17 14. Auto Switch 14-1. Applicable auto switches 14-2. Auto switch proper mounting position (detection at stroke end) and Its mounting height 14-3. Minimum mountable stroke for a cylinder with auto switch(es) (mm) Auto switch model Number of auto sw itches 12 16 20 25 32 40 50 63 1pc.

K35-OMX0029

Do not apply excessive lateral load to the piston rod.

CNA

16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

CNA

16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

25

Also, do not drop or apply a strong shock. Otherwise, damage or an accident can occur. Also, do not drop or apply a strong shock. Otherwise, damage or an accident may occur. 7. Do not affix any tape or seals to the body.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

14 15 D-B59W 14 14 17 16 18 D-G5NB 35 35 40 40 40 D-G39/K39 D-G39C/K39C 9 9 10 10 11 D-P3DWA 4.5 4.5 5.5 5.5 5.5 D-P4DW 4 4 4.5 4 4.5 * Values which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and may change substantially depending on the ambient environment.