High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SS5YJ3-31-05 --M3 Valve mounting direction Valve stations -02 Single solenoid coil is located on the opposite side of the A, B port. 2 stations : : Single solenoid coil is located on same side as the A, B port.

Series SY100 3 Port Solenoid Valve Rubber Seal

Stations 3 2 1 SY114-5GZ Blank plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5.1set (S41 type 5-station manifold part number) SY100-77-1A .1set (Blank plate assembly part number) SY114-5GZ.4set (Valve) : Assembly symbolprefix "" mark to the installed solenoid valve part number.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Hole diameter 5 9 Features 1 3 Port Direct Operated Poppet 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry Rated voltage 100VAC 50/60 Hz 200VAC 50/60 Hz 110VAC 50/60 Hz 220VAC 50/60 Hz 24VDC 12VDC 240VAC 50/60 Hz Other DO-DIN terminal (without connector) 1 2 3 G-grommet (lead wire length: 300mm) H-grommet (lead wire length: 600mm) D-DIN type

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P, E Port Locations: B (Both Sides), Thread: 00N (NPT), Mounting: D (DIN Rail Mounting w/DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 7 Stations, P, E Port Location: D Side, Thread: 00N (NPT)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 4 Stations, P, E Port Location: D Side, Thread: 00N (NPT)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: S (All Single Wiring), Valve Stations: 5 Stations, P, E Port Location: D Side, Thread: 00N (NPT)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P, E Port Location: U Side, Thread: 00N (NPT), Mounting: D (DIN Rail Mounting w/DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 12 Stations, P, E Port Location: D Side, Thread: 00N (NPT)

Model: 52 (Top Ported), Connector Type: PH (Flat Ribbon Cable, 10 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: S (All Single Wiring), Valve Stations: 5 Stations, P, E Port Location: D Side, Thread: 00N (NPT), Mounting: D (DIN Rail Mounting w/DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 5 Stations, P, E Port Location: B (Both Sides), Thread: 00N (NPT), Mounting: D (DIN Rail Mounting w/DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 2 Stations, P, E Port Location: D Side, Thread: 00N (NPT)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P, E Port Location: D Side, Thread: 00N (NPT)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P, E Port Location: D Side, Thread: 00N (NPT), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: S (All Single Wiring), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), Thread: 00N (NPT), Mounting: D (DIN Rail Mounting w/DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: S (All Single Wiring), Valve Stations: 5 Stations, P, E Port Location: B (Both Sides), Thread: 00N (NPT), Mounting: D (DIN Rail Mounting w/DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: S (All Single Wiring), Valve Stations: 6 Stations, P, E Port Location: B (Both Sides), Thread: 00N (NPT), Mounting: D (DIN Rail Mounting w/DIN Rail)