ZR OFF ON OFF Combination Symbol: K3 Combination Symbol: C3 Feature: Operation can be controlled by an external pilot valve.
Applicable tubing O.D. 3.2 Applicable tubing O.D. 4 Applicable tubing O.D. 6 M5 female thread Straight VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 Elbow VVQ1000-F1-LC3 VVQ1000-F1-LC4 08 8 stations Note) 2 pcs. are included in one set. 26 Series ZQ Specific Product Precautions Be sure to read before handling.
Seal type allows selection of metal seals or rubber seals Type of actuation A, B port size 2 position 3 position 4 position One-touch fitting Effective area mm (Cv factor) Single/Double Double (Latching/ Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber
D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V
VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism
C2.5 to C3 89.1p0.8 89.1p0.8 80 or more 80 or more 11.6 16.4 24.2 10 80A Steel tube 80A Steel tube A Piping A Piping 24 Series VXFA2 Dimensions: Direct piping type VXFA21A<<< VXFA22A<<< VXFA23A<<< A B D E F C 1/4 Pilot port I H G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I VXFA21A< VXFA22A< VXFA23A< 3/4 1 1 1/2 73 84 132 66 74 110 66 74 110 36 45 63 64.5 74.5 106
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V
D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V
D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V
Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.
Ports 2, 4 size (metric) Ports 2, 4 size (inch) Ports 2, 4 Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M Ports 2, 4 Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting
This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position
This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) (mm) Size N M Q Size d 10 9.5 8.5 M3 15 3.4 15 Body (A) 10 11 M3 20 4.5 20 A port B port A port 13 14 M5 B port Q N 30 5.5 30 14 15.5 M5 (Standard) (Altered) 40 5.5 M 40 20 21 M5 (Top view from long-shaft side) 31 Series CRB2 Symbol: C4 Symbol: C3 Applicable to single vane type only Change
This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position
This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position
CM2 15 = C3 CG1 Mounting nut (Refer to page 6-2-13.)
Model: 42 (Dual AC Type), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 5L (ΓΈ3/16" Elbow)
To be arranged by the user. 6.3 Option L [Large capacity tank] 6.3.1 Option L [Large capacity tank] Large capacity tank provide you extra space volume for fluid collection of approximately 5L above high level.