Series VS is a 3 port direct operated valve with metal seal. Body ported and base mounted styles are available. Multiple pressure supply is possible with balanced spool and sleeve. Any given port can accept high or low pressure supply without affecting the system life or operation. No-lubrication and dry-air operation is possible.3 port direct operated valve, metal seal, Body ported or

Series VS is a 3 port direct operated valve with metal seal. Body ported and base mounted styles are available. Multiple pressure supply is possible with balanced spool and sleeve. Any given port can accept high or low pressure supply without affecting the system life or operation. No-lubrication and dry-air operation is possible.3 port direct operated valve, metal seal, Body ported or

SMC Solenoid Valve. [Features] · Supports multiple different pressure supplies with balanced spool and sleeve · Oil-free and supports dry-air operations

CATALOG

F E R E N T D I A.

1

M5 x 0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 376.

2

, 60C (F and FS type only)] IDF IDU IDF FS Refer to SMC website for details.

A

(E X C E S S I V E F O R C E I N T H E D I R E C T I O N O F R O TAT I O N A P P L I E D T O T H E P I S T O N R O D M AY D A M A G E T H E I N T E R N A L M E C H A N I S M.) R E F E R T O T H E F O L L O W I N G TA B L E F O R D I M E N S I O N S W I T H A R M 32/40/50/63S E R I E S MK2 T I G H T E N I N G T O R Q U E F O R M O U N T I N G.

Electric Actuators

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B () () (170) A 110 20 95 95 () () (150) A B A B 100 200 300 400 500 600 Stroke Model LG1H212SC-700-F-X10 LG1H212SC-800-F-X10 LG1H212SC-900-F-X10 LG1H212SC-1000-F-X10 LG1H212SC-1200-F-X10 Stroke Model LG1H212SC100-F-X10 LG1H212SC200-F-X10 LG1H212SC300-F-X10 LG1H212SC400-F-X10 LG1H212SC500-F-X10 LG1H212SC600-F-X10 580 680

Table of Contents

Refer to pages starting with 181 for mounting. 95 100 8(4)-6.2 B 95 ( ) ( ) (170) A 95 110 20 95 ( ) ( ) (150) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H212SC-100-F LG1H212SC-200-F LG1H212SC-300-F LG1H212SC-400-F LG1H212SC-500-F LG1H212SC-600-F LG1H212SC-700-F LG1H212SC-800-F LG1H212SC-900-F LG1H212SC-1000-F LG1H212SC-1200-F 80 180 280 380 480 580 680 780 880

ZP

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U

ZP

E F G H J K Vacuum inlet direction q Pad dia.

High Purity Fluoropolymer

M M H W Y L E 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size 18.5 35 1/8" 16.5 14 14 15 (L) 21.5 36.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

Fluoropolymer Piping Equipment

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

Table of Contents

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

AC Servo Motor Driver (Pulse input type/Positioning type ）

600 _ _ 1 F 290 7 9 7.

ZP

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Table of Contents

Gripping point L (mm) MRHQ F F Misc.

ZP

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U